title: Wiring up pre-characterized single-photon emitters by laser lithography.
abstract: Future quantum optical chips will likely be hybrid in nature and include many single-photon emitters, waveguides, filters, as well as single-photon detectors. Here, we introduce a scalable optical localization-selection-lithography procedure for wiring up a large number of single-photon emitters via polymeric photonic wire bonds in three dimensions. First, we localize and characterize nitrogen vacancies in nanodiamonds inside a solid photoresist exhibiting low background fluorescence. Next, without intermediate steps and using the same optical instrument, we perform aligned three-dimensional laser lithography. As a proof of concept, we design, fabricate, and characterize three-dimensional functional waveguide elements on an optical chip. Each element consists of one single-photon emitter centered in a crossed-arc waveguide configuration, allowing for integrated optical excitation and efficient background suppression at the same time.
authors: Institute of Applied Physics, Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany.
authors: Q
authors: Q
authors: Shi
authors: Nano-Optics, Institute of Physics, Humboldt-Universität zu Berlin, Newtonstraße 15, D-12489 Berlin, Germany.
authors: B
authors: B
authors: Sontheimer
authors: Nano-Optics, Institute of Physics, Humboldt-Universität zu Berlin, Newtonstraße 15, D-12489 Berlin, Germany.
authors: N
authors: N
authors: Nikolay
authors: Department of Electronic Science and Engineering, Kyoto University, Kyoto Daigaku-Katsura, Nishikyo-ku, 615-8510 Kyoto, Japan.
authors: A W
authors: AW
authors: Schell
authors: Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT), 76344 Eggenstein-Leopoldshafen, Germany.
authors: J
authors: J
authors: Fischer
authors: Institute of Applied Physics, Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany.
authors: A
authors: A
authors: Naber
authors: Nano-Optics, Institute of Physics, Humboldt-Universität zu Berlin, Newtonstraße 15, D-12489 Berlin, Germany.
authors: O
authors: O
authors: Benson
authors: Institute of Applied Physics, Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, Germany.|Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT), 76344 Eggenstein-Leopoldshafen, Germany.
authors: M
authors: M
authors: Wegener