title: Length and Dimensional Measurements at NIST.
abstract: This paper discusses the past, present, and future of length and dimensional measurements at NIST. It covers the evolution of the SI unit of length through its three definitions and the evolution of NBS-NIST dimensional measurement from early linescales and gage blocks to a future of atom-based dimensional standards. Current capabilities include dimensional measurements over a range of fourteen orders of magnitude. Uncertainties of measurements on different types of material artifacts range down to 7×10(-8) m at 1 m and 8 picometers (pm) at 300 pm. Current work deals with a broad range of areas of dimensional metrology. These include: large-scale coordinate systems; complex form; microform; surface finish; two-dimensional grids; optical, scanning-electron, atomic-force, and scanning-tunneling microscopies; atomic-scale displacement; and atom-based artifacts.
authors: National Institute of Standards and Technology, Gaithersburg, MD 20899-8201.
authors: D A
authors: DA
authors: Swyt
keywords: atomic-force; dimensional; interferometry; length; measurements; microscopes; optical; scanning-electron; scanning-tunneling; traceability