title: The Microscopic Origin of Residual Stress for Flat Self-Actuating Piezoelectric Cantilevers.
abstract: In this study, flat piezoelectric microcantilevers were fabricated under low-stress Pb(Zr0.52Ti0.48)O3 (PZT) film conditions. They were analyzed using the Raman spectrum and wafer curvature methods. Based on the residual stress analysis, we found that a thickness of 1 μm was critical, since stress relaxation starts to occur at greater thicknesses, due to surface roughening. The (111) preferred orientation started to decrease when the film thickness was greater than 1 μm. The d33 value was closely related to the stress relaxation associated with the preferred orientation changes. We examined the harmonic response at different PZT cantilever lengths and obtained a 9.4-μm tip displacement at 3 Vp-p at 1 kHz. These analyses can provide a platform for the reliable operation of piezoelectric microdevices, potentially nanodevice when one needs to have simultaneous control of the residual stress and the piezoelectric properties.
authors: Department of Electrical Engineering, Kwangwoon University, Seoul, 139-701, Korea.
authors: Jeong Hoon
authors: JH
authors: Lee
authors: Nano-Bio Research Center, Korea Institute of Science and Technology, Seoul, 136-791, Korea.
authors: Kyo Seon
authors: KS
authors: Hwang
authors: Nano-Bio Research Center, Korea Institute of Science and Technology, Seoul, 136-791, Korea. tskim@kist.re.kr.
authors: Tae Song
authors: TS
authors: Kim
keywords: Biosensor; Cantilever; Nanomechanics; Piezoelectric; Residual stress