title: Dual-wavelength digital holography with a single low-coherence light source.
abstract: We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.
authors: Sungbin
authors: S
authors: Jeon
authors: Janghyun
authors: J
authors: Cho
authors: Ji-Nan
authors: JN
authors: Jin
authors: No-Cheol
authors: NC
authors: Park
authors: Young-Pil
authors: YP
authors: Park