title: High-resolution and wide-bandwidth light intensity fiber optic displacement sensor for MEMS metrology.
abstract: We report on the design, properties, and applications of a high-resolution and wide-bandwidth light intensity fiber optic displacement sensor for microelectromechanical system (MEMS) metrology. There are two types of structures that the system is dedicated to: vibrating with both high and low frequencies. In order to ensure high-frequency and high-resolution measurements, frequency down mixing and selective signal processing were applied. The obtained effective measuring bandwidth ranges from single hertz to 1 megahertz. The achieved resolution presented here is 116  pm/Hz1/2and 138  pm/Hz1/2for low-frequency and high-frequency operation modes, respectively, whereas the measurement of static displacement is 100 μm.
authors: Karolina
authors: K
authors: Orłowska
authors: Michał
authors: M
authors: Świątkowski
authors: Piotr
authors: P
authors: Kunicki
authors: Daniel
authors: D
authors: Kopiec
authors: Teodor
authors: T
authors: Gotszalk