title: Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries.
abstract: We report the electrochemical performance of porous NASICON-type Li3Fe2(PO4)3 thin films to be used as a cathode for Li-ion microbatteries. Crystalline porous NASICON-type Li3Fe2(PO4)3 layers were obtained by radio frequency sputtering with an annealing treatment. The thin films were characterized by XRD, SEM, and electrochemical techniques. The chronoamperometry experiments showed that a discharge capacity of 88 mAhg(-1) (23 μAhcm(-2)) is attained for the first cycle at C/10 to reach 65 mAhg(-1) (17 μAhcm(-2)) after 10 cycles with a good stability over 40 cycles.
authors.affiliation: Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France.
authors.forename: Vinsensia Ade
authors.initials: VA
authors.lastname: Sugiawati
authors.affiliation: Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France. florence.vacandio@univ-amu.fr.
authors.forename: Florence
authors.initials: F
authors.lastname: Vacandio
authors.affiliation: Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France.
authors.forename: Marielle
authors.initials: M
authors.lastname: Eyraud
authors.affiliation: Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France.
authors.forename: Philippe
authors.initials: P
authors.lastname: Knauth
authors.affiliation: Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France. thierry.djenizian@univ-amu.fr.|Department of Flexible Electronics, Ecole National Supérieure des Mines de Saint-Etienne, Center of Microelectronics in Provence, 13 541, Gardanne, France. thierry.djenizian@univ-amu.fr.
authors.forename: Thierry
authors.initials: T
authors.lastname: Djenizian
keywords: Cathode thin film; Li-ion microbatteries; NASICON-type Li3Fe2(PO4)3; Radio frequency sputtering