title: High efficiency light-induced dielectrophoresis biochip prepared using CVD techniques.
abstract: This article describes a high-efficiency light-induced dielectrophoresis biochip containing a thin film prepared through inductively coupled plasma chemical vapor deposition (ICPCVD). The biochip comprises two ITO glass substrates and a photoconductive amorphous silicon thin film. The biochip can effectively sort particular particles (or cells) by projecting visible light onto the surface of the silicon thin film. The sorting efficiency of biochips is highly associated with the quality of the deposited amorphous silicon thin films; therefore, the choice of deposition technique is extremely critical. However, no study has examined this problem. Hence, the current study thoroughly compared the efficiency of the biochip when films produced through plasma-enhanced chemical vapor deposition and ICPCVD are used.
authors.affiliation: Department of Computer and Communication, Kun Shan University, No.949 Dawan Rd., Yongkang Dist, Tainan City, 710, Taiwan. qqq25q@gmail.com.
authors.forename: Hung-Wei
authors.identifier: 0000-0002-7785-9206
authors.initials: HW
authors.lastname: Wu
authors.affiliation: Department of Photonics, National Cheng Kung University, Tainan, Taiwan.
authors.forename: Yao-Sheng
authors.initials: YS
authors.lastname: Huang
authors.affiliation: Department of Photonics, National Cheng Kung University, Tainan, Taiwan.
authors.forename: Hsin-Ying
authors.initials: HY
authors.lastname: Lee
authors.affiliation: Department of Computer and Communication, Kun Shan University, No.949 Dawan Rd., Yongkang Dist, Tainan City, 710, Taiwan.
authors.forename: Wu-Han
authors.initials: WH
authors.lastname: Tsai
authors.affiliation: Department of Computer and Communication, Kun Shan University, No.949 Dawan Rd., Yongkang Dist, Tainan City, 710, Taiwan.
authors.forename: Kuan-Yu
authors.initials: KY
authors.lastname: Chen
authors.affiliation: Department of Computer and Communication, Kun Shan University, No.949 Dawan Rd., Yongkang Dist, Tainan City, 710, Taiwan.
authors.forename: Li-Yi
authors.initials: LY
authors.lastname: Jian
mesh_terms: D017097:Electric Impedance; D004586:Electrophoresis / Q000295:instrumentation*; D056656:Lab-On-A-Chip Devices; D008027:Light; D058626:Plasma Gases / Q000737:chemistry*; D014835:Volatilization
chemical_list: D058626:Plasma Gases
keywords: Biochip; light-induced dielectrophoresis; silicon thin film