title: A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production.
abstract: A new method, which is easily scalable to large scale production, has been developed to obtain gas sensor devices based on zinc oxide (ZnO) nanostructures with a 'tetrapod' shape. The method can be easily extended to other kinds of nanostructures and is based on the deposition of ZnO nanostructures through polymeric masks by centrifugation, directly onto properly designed MEMS micro-hotplates. The micromachined devices, after the mask is peeled off, are ready for electrical bonding and sensing test. Sensor response has been successfully measured for some gases and volatile organic compounds with different chemical properties (ethanol, methane, nitrogen dioxide, hydrogen sulfide).
authors.affiliation: IMEM-CNR, Parco Area delle Scienze 37/A, Parma-43124 Italy. Chilab-Materials and Microsystems Laboratory, DISAT, Politecnico di Torino, Via Lungo Piazza d'Armi 6, Chivasso, Torino-10034 Italy.
authors.forename: S L
authors.initials: SL
authors.lastname: Marasso
authors.forename: A
authors.initials: A
authors.lastname: Tommasi
authors.forename: D
authors.initials: D
authors.lastname: Perrone
authors.forename: M
authors.initials: M
authors.lastname: Cocuzza
authors.forename: R
authors.initials: R
authors.lastname: Mosca
authors.forename: M
authors.initials: M
authors.lastname: Villani
authors.forename: A
authors.initials: A
authors.lastname: Zappettini
authors.forename: D
authors.initials: D
authors.lastname: Calestani