title: NO gas sensing at room temperature using single titanium oxide nanodot sensors created by atomic force microscopy nanolithography.
abstract: In this work, the fabrication of single titanium oxide nanodot (ND) resistive sensors for NO gas sensing at room temperature is reported. Two atomic force microscopy nanolithography methods, nanomachining and nano-oxidation, are employed. A single titanium nanowire (NW) is created first along with contact electrodes and a single titanium oxide ND is subsequently produced in the NW. Gas sensing is realized by the photo-activation and the photo-recovery approaches. It is found that a sensor with a smaller ND has better performance than a larger one. A response of 31%, a response time of 91 s, and a recovery time of 184 s have been achieved at a concentration of 10 ppm for a ND with a size of around 80 nm. The present work demonstrates the potential application of single metal oxide NDs for gas sensing with a performance that is comparable with that of metal oxide nanowire gas sensors.
authors.affiliation: Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan.
authors.forename: Li-Yang
authors.initials: LY
authors.lastname: Hong
authors.affiliation: Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan.
authors.forename: Heh-Nan
authors.initials: HN
authors.lastname: Lin
keywords: atomic force microscopy nanolithography; photo-activation; photo-recovery; resistive NO gas sensor; titanium oxide nanodot sensor