title: Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges.
abstract: Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic field sensors based on MEMS resonators, which operate with Lorentz force. These sensors have a compact structure, wide measurement range, low energy consumption, high sensitivity and suitable performance. The design methodology, simulation tools, damping sources, sensing techniques and future applications of magnetic field sensors are discussed. The design process is fundamental in achieving correct selection of the operation principle, sensing technique, materials, fabrication process and readout systems of the sensors. In addition, the description of the main sensing systems and challenges of the MEMS sensors are discussed. To develop the best devices, researches of their mechanical reliability, vacuum packaging, design optimization and temperature compensation circuits are needed. Future applications will require multifunctional sensors for monitoring several physical parameters (e.g., magnetic field, acceleration, angular ratio, humidity, temperature and gases).
authors: Micro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, Mexico. leherrera@uv.mx.
authors: Agustín Leobardo
authors: AL
authors: Herrera-May
authors: Engineering Faculty, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, Mexico. jsoler@uv.mx.
authors: Juan Carlos
authors: JC
authors: Soler-Balcazar
authors: Electronic Instrumentation Faculty, Universidad Veracruzana, Cto. Gonzálo Aguirre Beltran S/N, Xalapa, Veracruz 91000, Mexico. hvazquez@uv.mx.
authors: Héctor
authors: H
authors: Vázquez-Leal
authors: Micro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, Mexico. jaimartinez@uv.mx.
authors: Jaime
authors: J
authors: Martínez-Castillo
authors: Engineering Faculty, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, Mexico. mvigueras@uv.mx.
authors: Marco Osvaldo
authors: MO
authors: Vigueras-Zuñiga
authors: Departamento de Ingeniería Mecánica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle de Santiago km 3.5+1.8 km, Palo Blanco, Salamanca, Guanajuato 36885, Mexico. aguilera@ugto.mx.
authors: Luz Antonio
authors: LA
authors: Aguilera-Cortés
mesh_terms: D004867:Equipment Design; D021621:Imaging, Three-Dimensional; D060526:Magnetic Fields; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*
keywords: Lorentz force; MEMS; magnetic field sensor; resonators; sensing technique