title: New figuring model based on surface slope profile for grazing-incidence reflective optics.
abstract: Surface slope profile is widely used in the metrology of grazing-incidence reflective optics instead of surface height profile. Nevertheless, the theoretical and experimental model currently used in deterministic optical figuring processes is based on surface height, not on surface slope. This means that the raw slope profile data from metrology need to be converted to height profile to perform the current height-based figuring processes. The inevitable measurement noise in the raw slope data will introduce significant cumulative error in the resultant height profiles. As a consequence, this conversion will degrade the determinism of the figuring processes, and will have an impact on the ultimate surface figuring results. To overcome this problem, an innovative figuring model is proposed, which directly uses the raw slope profile data instead of the usual height data as input for the deterministic process. In this paper, first the influence of the measurement noise on the resultant height profile is analyzed, and then a new model is presented; finally a demonstration experiment is carried out using a one-dimensional ion beam figuring process to demonstrate the validity of our approach.
authors: College of Mechatronic Engineering and Automation, National University of Defense Technology, 109 Deya Road, Changsha, Hunan 410073, People's Republic of China.
authors: Lin
authors: L
authors: Zhou
authors: NSLS II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors: Lei
authors: L
authors: Huang
authors: NSLS II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors: Nathalie
authors: N
authors: Bouet
authors: NSLS II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors: Konstantine
authors: K
authors: Kaznatcheev
authors: NSLS II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors: Matthew
authors: M
authors: Vescovi
authors: College of Mechatronic Engineering and Automation, National University of Defense Technology, 109 Deya Road, Changsha, Hunan 410073, People's Republic of China.
authors: Yifan
authors: Y
authors: Dai
authors: College of Mechatronic Engineering and Automation, National University of Defense Technology, 109 Deya Road, Changsha, Hunan 410073, People's Republic of China.
authors: Shengyi
authors: S
authors: Li
authors: NSLS II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors: Mourad
authors: M
authors: Idir
keywords: ion beam figuring; one-dimensional; surface slope; synchrotron optics