title: Comb-referenced laser distance interferometer for industrial nanotechnology.
abstract: A prototype laser distance interferometer is demonstrated by incorporating the frequency comb of a femtosecond laser for mass-production of optoelectronic devices such as flat panel displays and solar cell devices. This comb-referenced interferometer uses four different wavelengths simultaneously to enable absolute distance measurement with the capability of comprehensive evaluation of the measurement stability and uncertainty. The measurement result reveals that the stability reaches 3.4 nm for a 3.8 m distance at 1.0 s averaging, which further reduces to 0.57 nm at 100 s averaging with a fractional stability of 1.5 × 10(-10). The uncertainty is estimated to be in a 10(-8) level when distance is measured in air due to the inevitable ambiguity in estimating the refractive index, but it can be enhanced to a 10(-10) level in vacuum.
authors: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon, 305-701, South Korea.
authors: Yoon-Soo
authors: YS
authors: Jang
authors: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon, 305-701, South Korea.|Department of Instrument Science and Technology, College of Mechatronic Engineering and Automation, National University of Defence Technology (NUDT), Hunan, Changsha, 410073, China.
authors: Guochao
authors: G
authors: Wang
authors: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon, 305-701, South Korea.
authors: Sangwon
authors: S
authors: Hyun
authors: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon, 305-701, South Korea.
authors: Hyun Jay
authors: HJ
authors: Kang
authors: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon, 305-701, South Korea.
authors: Byung Jae
authors: BJ
authors: Chun
authors: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon, 305-701, South Korea.
authors: Young-Jin
authors: YJ
authors: Kim
authors: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon, 305-701, South Korea.
authors: Seung-Woo
authors: SW
authors: Kim