title: Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials.
abstract: The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.
authors: State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.|School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200072, China.
authors: Na
authors: N
authors: Liu
authors: State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.|University of Chinese Academy of Sciences, Beijing, 100049, China.
authors: Feifei
authors: F
authors: Wang
authors: State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
authors: Lianqing
authors: L
authors: Liu
authors: State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
authors: Haibo
authors: H
authors: Yu
authors: School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200072, China.
authors: Shaorong
authors: S
authors: Xie
authors: Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
authors: Jun
authors: J
authors: Wang
authors: State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
authors: Yuechao
authors: Y
authors: Wang
authors: State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.|Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan.
authors: Gwo-Bin
authors: GB
authors: Lee
authors: State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.|Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong.
authors: Wen J
authors: WJ
authors: Li