title: Electrospray Deposition of Uniform Thickness Ge23Sb7S70 and As40S60 Chalcogenide Glass Films.
abstract: Solution-based electrospray film deposition, which is compatible with continuous, roll-to-roll processing, is applied to chalcogenide glasses. Two chalcogenide compositions are demonstrated: Ge23Sb7S70 and As40S60, which have both been studied extensively for planar mid-infrared (mid-IR) microphotonic devices. In this approach, uniform thickness films are fabricated through the use of computer numerical controlled (CNC) motion. Chalcogenide glass (ChG) is written over the substrate by a single nozzle along a serpentine path. Films were subjected to a series of heat treatments between 100 °C and 200 °C under vacuum to drive off residual solvent and densify the films. Based on transmission Fourier transform infrared (FTIR) spectroscopy and surface roughness measurements, both compositions were found to be suitable for the fabrication of planar devices operating in the mid-IR region. Residual solvent removal was found to be much quicker for the As40S60 film as compared to Ge23Sb7S70. Based on the advantages of electrospray, direct printing of a gradient refractive index (GRIN) mid-IR transparent coating is envisioned, given the difference in refractive index of the two compositions in this study.
authors: Department of Materials Science and Engineering, Clemson University; spencen@g.clemson.edu.
authors: Spencer
authors: S
authors: Novak
authors: Department of Materials Science and Engineering, Texas A&M University; Department of Electrical and Computer Engineering, Texas A&M University.
authors: Pao-Tai
authors: PT
authors: Lin
authors: College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL), University of Central Florida.
authors: Cheng
authors: C
authors: Li
authors: Department of Materials Science and Engineering, Clemson University.
authors: Nikolay
authors: N
authors: Borodinov
authors: Department of Materials Science and Engineering, Massachusetts Institute of Technology.
authors: Zhaohong
authors: Z
authors: Han
authors: Department of Materials Science and Engineering, Massachusetts Institute of Technology.
authors: Corentin
authors: C
authors: Monmeyran
authors: Department of Materials Science and Engineering, Massachusetts Institute of Technology.
authors: Neil
authors: N
authors: Patel
authors: Department of Materials Science and Engineering, Massachusetts Institute of Technology.
authors: Qingyang
authors: Q
authors: Du
authors: College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL), University of Central Florida.
authors: Marcin
authors: M
authors: Malinowski
authors: College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL), University of Central Florida.
authors: Sasan
authors: S
authors: Fathpour
authors: College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL), University of Central Florida.
authors: Chatdanai
authors: C
authors: Lumdee
authors: College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL), University of Central Florida.
authors: Chi
authors: C
authors: Xu
authors: College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL), University of Central Florida.
authors: Pieter G
authors: PG
authors: Kik
authors: Department of Mechanical Engineering, Virginia Polytechnic Institute.
authors: Weiwei
authors: W
authors: Deng
authors: Microphotonics Center, Massachusetts Institute of Technology.
authors: Juejun
authors: J
authors: Hu
authors: Microphotonics Center, Massachusetts Institute of Technology.
authors: Anuradha
authors: A
authors: Agarwal
authors: Department of Materials Science and Engineering, Clemson University.
authors: Igor
authors: I
authors: Luzinov
authors: College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL), University of Central Florida.
authors: Kathleen
authors: K
authors: Richardson
mesh_terms: D000336:Aerosols / Q000737:chemistry; D000965:Antimony / Q000737:chemistry*; D001152:Arsenicals / Q000737:chemistry*; D018011:Chalcogens / Q000737:chemistry*; D005857:Germanium / Q000737:chemistry*; D005898:Glass / Q000737:chemistry*; D012031:Refractometry; D017550:Spectroscopy, Fourier Transform Infrared / Q000379:methods*; D013059:Spectrum Analysis, Raman; D013457:Sulfur Compounds / Q000737:chemistry*; D014961:X-Ray Diffraction
chemical_list: D000336:Aerosols; D001152:Arsenicals; D018011:Chalcogens; D013457:Sulfur Compounds; D005857:Germanium; D000965:Antimony