title: Tilting and moving-object lens for a 3D electron microscope.
abstract: I investigated the tilting and movement of the objective lens of a 3D electron microscope electrically as an extension of the moving-objective lens concept. The electric or magnetic potential along the tilted optical axis is analytically expressed by a multipole potential expansion about the fixed central axis. The field distributions for axially symmetric dipole and quadrupole components are numerically shown, where the optical axis of a bell-shaped magnetic lens is tilted around the lens center by up to 60°. The hexapole and octapole components are also shown at a tilt angle of 45°.
authors: Honorary Member, The Japanese Society of Microscopy, 1-14-9 Takakurachou, Miyakojima-ku, Osaka 534-0011, Japan ura_katsumi@mvb.biglobe.ne.jp.
authors: Katsumi
authors: K
authors: Ura
keywords: LSI testing; MOL; large-angle tilts; multipole expansion; three-dimensional electron microscope