Equivalent wavelength self-mixing interferometry for displacement measurement.
In order to improve fringe precision of a self-mixing signal, a simple and effective method based on an equivalent wavelength self-mixing interferometer is presented. And a linearization fringe counting method is proposed for equivalent wavelength self-mixing interferometry to quickly reconstruct target displacement. The validity of the proposed method was demonstrated by means of simulated signals and confirmed by several experimental measurements for both harmonic and aleatory target displacement with a fringe resolution of ∼125  nm.
Zhen
Z
Huang
Chengwei
C
Li
Songquan
S
Li
Dongyu
D
Li