Precise measurement of micro bubble resonator thickness by internal aerostatic pressure sensing.
We develop a new, simple and non-destructive method to precisely measure the thickness of thin wall micro bubble resonators (MBRs) by using internal aerostatic pressure sensing. Measurement error of 1% at a bubble wall thickness of 2 μm is achieved. This method is applicable to both thin wall and thick wall MBR with high measurement accuracy.
Qijing
Q
Lu
Jie
J
Liao
Sheng
S
Liu
Xiang
X
Wu
Liying
L
Liu
Lei
L
Xu