A Novel Slope Method for Measurement of Fluid Density with a Micro-cantilever under Flexural and Torsional Vibrations.
A novel method, which was called a slope method, has been proposed to measure fluid density by the micro-cantilever sensing chip. The theoretical formulas of the slope method were discussed and established when the micro-cantilever sensing chip was under flexural and torsional vibrations. The slope was calculated based on the fitted curve between the excitation and output voltages of sensing chip under the nonresonant status. This measuring method need not sweep frequency to find the accurate resonant frequency. Therefore, the fluid density was measured easily based on the calculated slope. In addition, the micro-cantilver was drived by double sided excitation and free end excitation to oscillate under flexural and torsional vibrations, respectively. The corresponding experiments were carried out to measure the fluid density by the slope method. The measurement results were also analyzed when the sensing chip was under flexural and torsional nonresonant vibrations separately. The measurement accuracies under these vibrations were all better than 1.5%, and the density measuring sensitivity under torsional nonresonant vibration was about two times higher than that under flexural nonresonant vibration.
State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China. libozhao@mail.xjtu.edu.cn.
Libo
L
Zhao
State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China. hyj8880@foxmail.com.
Yingjie
Y
Hu
School of Automotive, Mechanical and Electrical Engineering, Xinjiang Vocational & Technical College of Communications, Urumqi 831401, China. rahman1963@163.com.
Rahman
R
Hebibul
State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China. dianjianjun@126.com.
Jianjun
J
Ding
State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China. wtdwxy@163.com.
Tongdong
T
Wang
State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China. tingzhongxu@163.com.
Tingzhong
T
Xu
State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China. leoxixiang@foxmail.com.
Xixiang
X
Liu
State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China. zhaoyulong@mail.xjtu.edu.cn.
Yulong
Y
Zhao
State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China. zdjiang@mail.xjtu.edu.cn.
Zhuangde
Z
Jiang
double sided excitation; fluid density; free end excitation; micro-cantilever; nonresonant; slope method