Detecting and locating light atoms from high-resolution STEM images: The quest for a single optimal design.
In the present paper, the optimal detector design is investigated for both detecting and locating light atoms from high resolution scanning transmission electron microscopy (HR STEM) images. The principles of detection theory are used to quantify the probability of error for the detection of light atoms from HR STEM images. To determine the optimal experiment design for locating light atoms, use is made of the so-called Cramér-Rao Lower Bound (CRLB). It is investigated if a single optimal design can be found for both the detection and location problem of light atoms. Furthermore, the incoming electron dose is optimised for both research goals and it is shown that picometre range precision is feasible for the estimation of the atom positions when using an appropriate incoming electron dose under the optimal detector settings to detect light atoms.
Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium.
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Gonnissen
Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium.
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De Backer
iMinds-Vision Lab, University of Antwerp, Universiteitsplein 1, 2610 Wilrijk, Belgium; Delft Center for Systems and Control (DCSC), Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands.
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den Dekker
iMinds-Vision Lab, University of Antwerp, Universiteitsplein 1, 2610 Wilrijk, Belgium.
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Sijbers
Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium. Electronic address: sandra.vanaert@uantwerpen.be.
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Van Aert
Data processing/image processing; Electron microscope design and characterisation; High-resolution scanning transmission electron microscopy (HR STEM)