title: Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests.
abstract: This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process. The size of the accelerometer is 1.5 × 1.5 mm², thus fitting the 1.8 × 1.8 mm² haptic actuator array cell. The detailed fabrication process of the miniaturized accelerometer is illustrated. Performance evaluation of the fabricated accelerometer is conducted by comparing it with a commercial piezoelectric accelerometer. The output current of the fabricated accelerometer increases linearly with the acceleration. The miniaturized ZnO NW accelerometer is feasible for acceleration measurement of small and lightweight devices.
authors.affiliation: Creative Research Center for Nanocellulose Future Composites, Department of Mechanical Engineering, Inha University, 100 Inha-Ro, Nam-Ku, Incheon 22212, Korea. kim_hyunchan@naver.com.
authors.forename: Hyun Chan
authors.initials: HC
authors.lastname: Kim
authors.affiliation: Creative Research Center for Nanocellulose Future Composites, Department of Mechanical Engineering, Inha University, 100 Inha-Ro, Nam-Ku, Incheon 22212, Korea. whysosary@naver.com.
authors.forename: Sangho
authors.initials: S
authors.lastname: Song
authors.affiliation: Creative Research Center for Nanocellulose Future Composites, Department of Mechanical Engineering, Inha University, 100 Inha-Ro, Nam-Ku, Incheon 22212, Korea. jaehwan@inha.ac.kr.
authors.forename: Jaehwan
authors.initials: J
authors.lastname: Kim
keywords: ZnO nanowire; accelerometer; micro fabrication; miniaturization; piezoelectric