Mechanical assembly of complex, 3D mesostructures from releasable multilayers of advanced materials.
Capabilities for assembly of three-dimensional (3D) micro/nanostructures in advanced materials have important implications across a broad range of application areas, reaching nearly every class of microsystem technology. Approaches that rely on the controlled, compressive buckling of 2D precursors are promising because of their demonstrated compatibility with the most sophisticated planar technologies, where materials include inorganic semiconductors, polymers, metals, and various heterogeneous combinations, spanning length scales from submicrometer to centimeter dimensions. We introduce a set of fabrication techniques and design concepts that bypass certain constraints set by the underlying physics and geometrical properties of the assembly processes associated with the original versions of these methods. In particular, the use of releasable, multilayer 2D precursors provides access to complex 3D topologies, including dense architectures with nested layouts, controlled points of entanglement, and other previously unobtainable layouts. Furthermore, the simultaneous, coordinated assembly of additional structures can enhance the structural stability and drive the motion of extended features in these systems. The resulting 3D mesostructures, demonstrated in a diverse set of more than 40 different examples with feature sizes from micrometers to centimeters, offer unique possibilities in device design. A 3D spiral inductor for near-field communication represents an example where these ideas enable enhanced quality (Q) factors and broader working angles compared to those of conventional 2D counterparts.
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Zheng
Z
Yan
Center for Mechanics and Materials, Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, P.R. China.
Fan
F
Zhang
Center for Mechanics and Materials, Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, P.R. China.
Fei
F
Liu
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, P.R. China.
Mengdi
M
Han
Center for Mechanics and Materials, Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, P.R. China.
Dapeng
D
Ou
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Yuhao
0000-0002-2442-5690
Y
Liu
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Qing
Q
Lin
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Xuelin
X
Guo
Center for Mechanics and Materials, Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, P.R. China.
Haoran
H
Fu
Departments of Civil and Environmental Engineering, Mechanical Engineering and Materials Science and Engineering, Center for Engineering and Health, and Skin Disease Research Center, Northwestern University, Evanston, IL 60208, USA.
Zhaoqian
Z
Xie
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Mingye
M
Gao
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Yuming
Y
Huang
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
JungHwan
J
Kim
Department of Automotive Engineering, Tsinghua University, Beijing 100084, P.R. China.
Yitao
Y
Qiu
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Kewang
K
Nan
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Jeonghyun
0000-0003-3090-1435
J
Kim
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Philipp
P
Gutruf
Departments of Civil and Environmental Engineering, Mechanical Engineering and Materials Science and Engineering, Center for Engineering and Health, and Skin Disease Research Center, Northwestern University, Evanston, IL 60208, USA.; School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai 200092, P.R. China.
Hongying
H
Luo
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
An
A
Zhao
Center for Mechanics and Materials, Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, P.R. China.
Keh-Chih
KC
Hwang
Departments of Civil and Environmental Engineering, Mechanical Engineering and Materials Science and Engineering, Center for Engineering and Health, and Skin Disease Research Center, Northwestern University, Evanston, IL 60208, USA.
Yonggang
Y
Huang
Center for Mechanics and Materials, Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, P.R. China.
Yihui
Y
Zhang
Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.; Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
John A
JA
Rogers
3D Assembly; buckling; microfabrication; multilayer; near field communication
Nat Mater. 2016 Jun;15(6):679-85
26974408
Nat Mater. 2013 Oct;12 (10 ):893-8
23995324
Adv Mater. 2010 Mar 12;22(10):1084-101
20401933
Proc Natl Acad Sci U S A. 2009 Jan 20;106(3):703-8
19139411
Science. 2014 Sep 12;345(6202):1322-6
25214624
Adv Mater. 2015 Mar 4;27(9):1480-511
25619358
Nanoscale. 2011 Jan;3(1):96-120
21031195
ACS Nano. 2011 Apr 26;5(4):2447-57
21366271
Angew Chem Int Ed Engl. 2013 Feb 18;52(8):2326-30
23341048
Nano Lett. 2014 Jul 9;14(7):4164-70
24937214
Nat Nanotechnol. 2006 Dec;1(3):201-7
18654187
Science. 2009 Aug 21;325(5943):977-81
19696346
Adv Mater. 2013 Sep 25;25(36):5081-5
23824583
Science. 2015 Jan 9;347(6218):154-9
25574018
Phys Rev Lett. 2007 Apr 13;98(15):156103
17501365
Small. 2015 Feb 25;11(8):906-12
25367846
Proc Natl Acad Sci U S A. 2007 Oct 2;104(40):15607-12
17898178
Science. 2011 Nov 18;334(6058):962-5
22096194
Proc Natl Acad Sci U S A. 2009 Dec 1;106(48):20149-54
19934059
Nat Nanotechnol. 2011 May;6(5):277-81
21423184
Small. 2010 Apr 9;6(7):792-806
20349446
Adv Funct Mater. 2016 Apr 25;26(16):2629-2639
27499727
Nat Commun. 2013;4:1943
23733138
Proc Natl Acad Sci U S A. 2012 Jun 12;109(24):9287-92
22645374
Adv Mater. 2013 Sep 6;25(33):4539-43
23776158
Small. 2011 Jul 18;7(14):1943-8
21671431
Nature. 2004 Mar 25;428(6981):386
15042080
Nat Mater. 2012 Nov;11(11):986-94
22922448
Nat Mater. 2009 Aug;8(8):648-53
19578336
Adv Mater. 2014 Jan;26(4):532-69
24338738
Proc Natl Acad Sci U S A. 2015 Sep 22;112(38):11757-64
26372959
Adv Mater. 2012 Oct 9;24(39):5284-318
22936418
Nature. 2001 Mar 8;410(6825):168
11242068
Science. 2014 Jun 20;344(6190):1373-7
24948733
Nature. 2008 Sep 18;455(7211):376-9
18690249