Sub-5 nm Patterning by Directed Self-Assembly of Oligo(Dimethylsiloxane) Liquid Crystal Thin Films.
Highly ordered nanopatterns are obtained at sub-5 nm periodicities by the graphoepitaxial directed self-assembly of monodisperse, oligo(dimethylsiloxane) liquid crystals. These hybrid organic/inorganic liquid crystals are of high interest for nanopatterning applications due to the combination of their ultrasmall feature sizes and their ability to be directed into highly ordered domains without additional annealing.
Laboratory of Functional Organic Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
Koen
K
Nickmans
Laboratory of Functional Organic Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
Jeffrey N
JN
Murphy
Laboratory of Macromolecular Organic Chemistry, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, 5600 MB, Eindhoven, The Netherlands.
Bas
B
de Waal
Laboratory for Chemistry of Novel Materials, Center for Innovation and Research in Materials and Polymers (CIRMAP), University of Mons (UMONS), Place du Parc 20, B 7000, Mons, Belgium.
Philippe
P
Leclère
Department of Electrical Engineering, K.U. Leuven, Kasteelpark Arenberg 10, B-3001, Leuven, Belgium.|Imec vzw, Kapeldreef 75, B-3001, Leuven, Belgium.
Jan
J
Doise
Imec vzw, Kapeldreef 75, B-3001, Leuven, Belgium.
Roel
R
Gronheid
Laboratory of Functional Organic Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.|Institute for Complex Molecular Systems, Eindhoven University of Technology, 5600 MB, Eindhoven, The Netherlands.
Dick J
DJ
Broer
Laboratory of Functional Organic Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.|Institute for Complex Molecular Systems, Eindhoven University of Technology, 5600 MB, Eindhoven, The Netherlands.
Albertus P H J
AP
Schenning
directed self-assembly; graphoepitaxy; high-χ low-N; liquid crystals; nanolithography; nanopatterning; oligo(dimethylsiloxane)