High-mechanical-frequency characteristics of optomechanical crystal cavity with coupling waveguide.
Optomechanical crystals have attracted great attention recently for their ability to realize strong photon-phonon interaction in cavity optomechanical systems. By far, the operation of cavity optomechanical systems with high mechanical frequency has to employ tapered fibres or one-sided waveguides with circulators to couple the light into and out of the cavities, which hinders their on-chip applications. Here, we demonstrate larger-centre-hole nanobeam structures with on-chip transmission-coupling waveguide. The measured mechanical frequency is up to 4.47 GHz, with a high mechanical Q-factor of 1.4 × 103in the ambient environment. The corresponding optomechanical coupling rate is calculated and measured to be 836 kHz and 1.2 MHz, respectively, while the effective mass is estimated to be 136 fg. With the transmission waveguide coupled structure and a small footprint of 3.4 μm2, this simple cavity can be directly used as functional components or integrated with other on-chip devices in future practical applications.
Department of Electronic Engineering, Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing, 100084, China.
Zhilei
Z
Huang
Department of Electronic Engineering, Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing, 100084, China.
Kaiyu
K
Cui
Department of Electronic Engineering, Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing, 100084, China.
Guoren
G
Bai
Department of Electronic Engineering, Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing, 100084, China.
Xue
X
Feng
Department of Electronic Engineering, Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing, 100084, China.
Fang
F
Liu
Department of Electronic Engineering, Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing, 100084, China.
Wei
W
Zhang
Department of Electronic Engineering, Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing, 100084, China.
Yidong
Y
Huang
Opt Express. 2013 Aug 26;21(17):19555-67
24105503
Nature. 2012 Feb 01;482(7383):63-7
22297970
Sci Rep. 2015 Nov 16;5:16526
26567535
Phys Rev Lett. 2014 Apr 18;112(15):153603
24785039
Nature. 2015 Apr 23;520(7548):522-5
25903632
Science. 2012 Dec 21;338(6114):1609-13
23160956
Science. 2010 Dec 10;330(6010):1520-3
21071628
Science. 2008 Aug 29;321(5893):1172-6
18755966
Opt Express. 2005 Feb 21;13(4):1202-14
19494990
Sci Rep. 2015 Mar 02;5:8657
25728978
Opt Express. 2011 Sep 12;19(19):18529-42
21935223
Sci Rep. 2015 Nov 04;5:15964
26530128
Nat Commun. 2014 Jul 21;5:4452
25043827
Phys Rev Lett. 2015 Mar 20;114(11):113601
25839267
Opt Express. 2016 May 30;24(11):11407-19
27410069
Nano Lett. 2012 May 9;12(5):2299-305
22471420
Anal Bioanal Chem. 2013 Aug;405(20):6497-509
23756594
Nature. 2009 Nov 5;462(7269):78-82
19838165
Nature. 2003 Oct 30;425(6961):944-7
14586465
Phys Rev Lett. 2011 May 20;106(20):203902
21668229