Pulled microcapillary tube resonators with electrical readout for mass sensing applications.
This paper reports a microfabrication-free approach to make hollow channel mass sensors by pulling a glass capillary and suspending it on top of a machined jig. A part of the pulled section makes simple contact with an actuation node and a quartz tuning fork (QTF) which acts as a sensing node. The two nodes define a pulled micro capillary tube resonator (PμTR) simply supported at two contacts. While a piezo actuator beneath the actuation node excites the PμTR, the QTF senses the resonance frequency of the PμTR. The proposed concept was validated by electrical and optical measurements of resonant spectra of PμTR. Then, different liquid samples including water, ethanol, glycerol, and their binary mixtures were introduced into the PμTR and the resonance frequency of the PμTR was measured as a function of liquid density. Density responsivity of -3,088 Hz-g-1cm3obtained is comparable to those of microfabricated hollow resonators. With a micro droplet generation chip configured in series with the PμTR, size distribution of oil droplets suspended in water was successfully measured with the radius resolution of 31 nm at the average droplet radius, 28.47 μm. Overall, typical off-the-shelf parts simply constitute a resonant mass sensing system along with a convenient electrical readout.
School of Mechanical and Aerospace Engineering, Seoul National University, Seoul, 08826, Korea.
Donghyuk
D
Lee
School of Materials Science and Engineering, Nanyang Technological University, Singapore, 639798, Singapore.
Joonhui
J
Kim
School of Materials Science and Engineering, Nanyang Technological University, Singapore, 639798, Singapore.
Nam-Joon
NJ
Cho
Department of Chemical and Biomolecular Engineering, Sogang University, Seoul, 04107, Korea.
Taewook
T
Kang
School of Mechanical and Aerospace Engineering, Seoul National University, Seoul, 08826, Korea.
Sangken
S
Kauh
Department of Mechanical Engineering, Sogang University, Seoul, 04107, Korea.
Jungchul
J
Lee
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