Wide-range tunable magnetic lens for tabletop electron microscope.
A tabletop scanning electron microscope (SEM) utilizes permanent magnets as condenser lenses to minimize its size, but this sacrifices the tunability of condenser lenses such that a tabletop system can only be operated with a fixed accelerating voltage. In contrast, the traditional condenser lens utilizes an electromagnetic coil to adjust the optical properties, but the size of the electromagnetic lens is inevitably larger. Here, we propose a tunable condenser lens for a tabletop SEM that uses a combination of permanent magnets and electromagnetic coils. The overall dimensions of the newly designed lens are the same as the original permanent magnet lens, but the new lens allows the tabletop SEM to be operated at different accelerating voltages between 1kV and 15kV.
Department of Engineering and System Science, National Tsing Hua University, Taiwan.
Wei-Yu
WY
Chang
Department of Engineering and System Science, National Tsing Hua University, Taiwan. Electronic address: fchen1@me.com.
Fu-Rong
FR
Chen
Tabletop SEM; Tunable condenser lens