title: Practical electron tomography guide: Recent progress and future opportunities.
abstract: We present a review of the recent progress in electron tomography applicable to materials science samples. We focus on practical high accuracy tomographic measurements and their applications. We follow the steps leading to a reconstructed 3D volume and discuss the effect of the individual steps on the suitability of the resulting 3D volume for quantitative measurements. Both the progress in applications and new opportunities in electron tomography in materials science are reviewed.
authors.affiliation: National Institute for Nanotechnology, 11421 Saskatchewan Drive, Edmonton, Alberta, T6G 2M9, Canada. Electronic address: Misa.Hayashida@nrc-cnrc.gc.ca.
authors.forename: Misa
authors.initials: M
authors.lastname: Hayashida
authors.affiliation: National Institute for Nanotechnology, 11421 Saskatchewan Drive, Edmonton, Alberta, T6G 2M9, Canada.
authors.forename: Marek
authors.initials: M
authors.lastname: Malac
keywords: Electron tomography; High accuracy alignment; Image segmentation; Missing wedge; Radiation damage; Sample preparation; Tilt angle measurement; Volume projection; Volume reconstruction