title: Optical coherence tomography endoscopic probe based on a tilted MEMS mirror.
abstract: This paper reports a compact microendoscopic OCT probe with an outer diameter of only 2.7 mm. The small diameter is enabled by a novel 2-axis scanning MEMS mirror with a preset 45° tilted angle. The tilted MEMS mirror is directly integrated on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the mirror plate via a set of bimorph flexure, enabling a compact probe mount design without the requirement of a 45° slope, which is capable to dramatically reduce the probe size and ease the assembly process. Additionally, the SiOB also provides trenches with properly-designed opening widths for automatic alignment of the MEMS mirror, GRIN lens and optical fiber. The 45°-tilted MEMS mirror plate is actuated by four electrothermal bimorph actuators. The packaged 2.7 mm-diameter probe offers 2-axis side-view optical scanning with a large optical scan range of 40° at a low drive voltage of 5.5 Vdc in both axes, allowing a lateral scan area of 2.2 mm × 2.2 mm at a 3 mm working distance. High-resolution 2D and 3D OCT images of the IR card,ex vivoimaging of meniscus specimens and rat brain slices,in vivoimaging of the human finger and nail have been obtained with a TDOCT system.
authors.affiliation: Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, 32611, USA; cduan@ufl.edu.
authors.forename: Can
authors.initials: C
authors.lastname: Duan
authors.affiliation: Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, 32611, USA; Department of Micro Nano Science and Systems, FEMTO-ST, Besançon, 25000, France.
authors.forename: Quentin
authors.initials: Q
authors.lastname: Tanguy
authors.affiliation: Small Animal Surgery Clinic, University of Zurich, Zurich 8057, Switzerland.
authors.forename: Antonio
authors.initials: A
authors.lastname: Pozzi
authors.affiliation: Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, 32611, USA; hkx@ufl.edu.
authors.forename: Huikai
authors.initials: H
authors.lastname: Xie
keywords: (110.4500) Optical coherence tomography; (170.2150) Endoscopic imaging; (170.3880) Medical and biological imaging; (230.4685) Optical microelectromechanical devices