title: Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars.
abstract: Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion microscope nanofabrication. Structurally, a submicrometer Si pillar can turn completely amorphous at He+doses typically used for micromachining, forming nanobubbles at higher doses. In terms of mechanical properties, the flow stress decreases markedly with increasing dosage, and the softened amorphous Si exhibits spread-out plastic flow.
authors.affiliation: Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, 710049, P. R. China.
authors.forename: Yue-Cun
authors.initials: YC
authors.lastname: Wang
authors.affiliation: Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, 710049, P. R. China.
authors.forename: Lin
authors.initials: L
authors.lastname: Tian
authors.affiliation: School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, P. R. China.
authors.forename: Fan
authors.initials: F
authors.lastname: Liu
authors.affiliation: Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, 710049, P. R. China.
authors.forename: Yuan-Bin
authors.initials: YB
authors.lastname: Qin
authors.affiliation: Engineering Research Center of Materials Behavior and Design, Ministry of Education, Nanjing University of Science and Technology, Nanjing, 210094, P. R. China.
authors.forename: Gong
authors.initials: G
authors.lastname: Zheng
authors.affiliation: School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, P. R. China.
authors.forename: Jing-Tao
authors.initials: JT
authors.lastname: Wang
authors.affiliation: Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, 710049, P. R. China.|Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, MD, 21218, USA.
authors.forename: Evan
authors.initials: E
authors.lastname: Ma
authors.affiliation: Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, 710049, P. R. China.
authors.forename: Zhi-Wei
authors.initials: ZW
authors.lastname: Shan
keywords: helium ion microscopes; helium ions dosage; mechanical behaviors; silicon micropillars