title: Two-axis polydimethylsiloxane-based electromagnetic microelectromechanical system scanning mirror for optical coherence tomography.
abstract: Compact size and fast imaging abilities are key requirements for the clinical implementation of an optical coherence tomography (OCT) system. Among the various small-sized technology, a microelectromechanical system (MEMS) scanning mirror is widely used in a miniaturized OCT system. However, the complexities of conventional MEMS fabrication processes and relatively high costs have restricted fast clinical translation and commercialization of the OCT systems. To resolve these problems, we developed a two-axis polydimethylsiloxane (PDMS)-based MEMS (2A-PDMS-MEMS) scanning mirror through simple processes with low costs. It had a small size of 15×15×15??mm3, was fast, and had a wide scanning range at a low voltage. The AC/DC responses were measured to evaluate the performance of the 2A-PDMS-MEMS scanning mirror. The maximum scanning angles were measured as ±16.6??deg and ±11.6??deg along the X and Y axes, respectively, and the corresponding field of view was 29.8??mm×20.5??mm with an optical focal length of 50 mm. The resonance frequencies were 82 and 57 Hz along the X and Y axes, respectively. Finally, in vivo B-scan and volumetric OCT images of human fingertips and palms were successfully acquired using the developed SD-OCT system based on the 2A-PDMS-MEMS scanning mirror.
authors.affiliation: Pohang University of Science and Technology (POSTECH), Department of Creative IT Engineering, 77 Cheongam-ro, Pohang, Republic of Korea.
authors.forename: Sehui
authors.initials: S
authors.lastname: Kim
authors.affiliation: Pohang University of Science and Technology (POSTECH), Department of Creative IT Engineering, 77 Cheongam-ro, Pohang, Republic of Korea.
authors.forename: Changho
authors.initials: C
authors.lastname: Lee
authors.affiliation: Pohang University of Science and Technology (POSTECH), Department of Creative IT Engineering, 77 Cheongam-ro, Pohang, Republic of Korea.
authors.forename: Jin Young
authors.initials: JY
authors.lastname: Kim
authors.affiliation: Kyungpook National University, School of Electrical Engineering, 80 Daehak-ro, Daegu, Republic of Korea.
authors.forename: Jeehyun
authors.initials: J
authors.lastname: Kim
authors.affiliation: Pohang University of Science and Technology (POSTECH), Department of Mechanical Engineering, 77 Cheongam-ro, Pohang, Republic of Korea.
authors.forename: Geunbae
authors.initials: G
authors.lastname: Lim
authors.affiliation: Pohang University of Science and Technology (POSTECH), Department of Creative IT Engineering, 77 Cheongam-ro, Pohang, Republic of Korea.
authors.forename: Chulhong
authors.initials: C
authors.lastname: Kim
mesh_terms: D003878:Dermatoglyphics; D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D055590:Electromagnetic Phenomena; D004867:Equipment Design; D006225:Hand / Q000000981:diagnostic imaging; D006801:Humans; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D041623:Tomography, Optical Coherence / Q000295:instrumentation* / Q000379:methods*
chemical_list: D004129:Dimethylpolysiloxanes