title: Solution-processed ultra-low-k thin films comprising single-walled aluminosilicate nanotubes.
abstract: Nanotube-based ultra-low-k thin films with high Young's modulus composed of single-walled aluminosilicate nanotubes (AlSiNTs) and a trace amount of poly(vinyl alcohol) (PVA) have been developed. The dehydrated AlSiNT film possesses a relative permittivity of 1.05, and a Young's modulus of 25 GPa, which exceed those of most existing ultra-low-k materials.
authors.affiliation: Department of Chemical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan. dunyen@ntu.edu.tw.
authors.forename: An-Chih
authors.initials: AC
authors.lastname: Yang
authors.affiliation: Graduate Institute of Photonics and Optoelectronics, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan. iccheng@ntu.edu.tw.
authors.forename: Yun-Shiuan
authors.initials: YS
authors.lastname: Li
authors.affiliation: Department of Chemical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan. dunyen@ntu.edu.tw.
authors.forename: Chon Hei
authors.initials: CH
authors.lastname: Lam
authors.affiliation: Department of Chemical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan. dunyen@ntu.edu.tw.
authors.forename: Heng-Yu
authors.initials: HY
authors.lastname: Chi
authors.affiliation: Graduate Institute of Photonics and Optoelectronics, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan. iccheng@ntu.edu.tw.
authors.forename: I-Chun
authors.identifier: http://orcid.org/0000-0003-2209-3298
authors.initials: IC
authors.lastname: Cheng
authors.affiliation: Department of Chemical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan. dunyen@ntu.edu.tw.
authors.forename: Dun-Yen
authors.initials: DY
authors.lastname: Kang