title: Electrostatic repulsive out-of-plane actuator using conductive substrate.
abstract: A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping. Theoretical and simulated results show that the pseudo-three-layer actuator offers higher performance than the two-layer and three-layer actuators with regard to the two most important characteristics of actuators, namely, driving force and theoretical stroke. Given that the pseudo-three-layer actuator structure is compatible with both the parallel-plate actuators and these two types of repulsive actuators, a 19-element two-layer repulsive actuated deformable mirror is operated in pseudo-three-layer electrical connection mode. Theoretical and experimental results demonstrate that the pseudo-three-layer mode produces a larger displacement of 0-4.5 μm for a dc driving voltage of 0-100 V, when compared with that in two-layer mode.
authors.affiliation: State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.
authors.forename: Weimin
authors.initials: W
authors.lastname: Wang
authors.affiliation: State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.
authors.forename: Qiang
authors.initials: Q
authors.lastname: Wang
authors.affiliation: School of Electrical, Computer, and Energy Engineering, Arizona State University, Tempe, Arizona 85281, USA.
authors.forename: Hao
authors.initials: H
authors.lastname: Ren
authors.affiliation: College of Communication Engineering, Chengdu University of Information Technology, Chengdu 610225, China.
authors.forename: Wenying
authors.initials: W
authors.lastname: Ma
authors.affiliation: State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.
authors.forename: Chuankai
authors.initials: C
authors.lastname: Qiu
authors.affiliation: School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China.
authors.forename: Zexiang
authors.initials: Z
authors.lastname: Chen
authors.affiliation: State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.
authors.forename: Bin
authors.initials: B
authors.lastname: Fan