title: Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe Tomography.
abstract: The enhancement of the performance of advanced nitride-based optoelectronic devices requires the fine tuning of their composition, which has to be determined with a high accuracy and at the nanometer scale. For that purpose, we have evaluated and compared energy dispersive X-ray spectroscopy (EDX) in a scanning transmission electron microscope (STEM) and atom probe tomography (APT) in terms of composition analysis of AlGaN/GaN multilayers. Both techniques give comparable results with a composition accuracy better than 0.6 % even for layers as thin as 3 nm. In case of EDX, we show the relevance of correcting the X-ray absorption by simultaneous determination of the mass thickness and chemical composition at each point of the analysis. Limitations of both techniques are discussed when applied to specimens with different geometries or compositions.
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France. bbonef.prof@gmail.com.|INAC, CEA-Grenoble, 17 av. des Martyrs, F-38000, Grenoble, France. bbonef.prof@gmail.com.
authors.forename: Bastien
authors.identifier: http://orcid.org/0000-0002-1024-6747
authors.initials: B
authors.lastname: Bonef
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|INAC, CEA-Grenoble, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Miguel
authors.initials: M
authors.lastname: Lopez-Haro
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|INAC, CEA-Grenoble, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Lynda
authors.initials: L
authors.lastname: Amichi
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|INAC, CEA-Grenoble, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Mark
authors.initials: M
authors.lastname: Beeler
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|LETI, CEA-Grenoble, MINATEC Campus, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Adeline
authors.initials: A
authors.lastname: Grenier
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|INAC, CEA-Grenoble, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Eric
authors.initials: E
authors.lastname: Robin
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|INAC, CEA-Grenoble, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Pierre-Henri
authors.initials: PH
authors.lastname: Jouneau
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|INAC, CEA-Grenoble, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Nicolas
authors.initials: N
authors.lastname: Mollard
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|LETI, CEA-Grenoble, MINATEC Campus, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Isabelle
authors.initials: I
authors.lastname: Mouton
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|INAC, CEA-Grenoble, 17 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Eva
authors.initials: E
authors.lastname: Monroy
authors.affiliation: Université Grenoble Alpes, F-38000, Grenoble, France.|Institut NEEL, CNRS, 24 av. des Martyrs, F-38000, Grenoble, France.
authors.forename: Catherine
authors.initials: C
authors.lastname: Bougerol
keywords: Atom probe tomography; Energy dispersive X-ray spectroscopy; III-Nitride nanostructures; Nanoscale composition analysis; Quantitative composition analysis