title: A Stepped Frequency Sweeping Method for Nonlinearity Measurement of Microresonators.
abstract: In order to measure the nonlinear features of micromechanical resonators, a free damped oscillation method based on stair-stepped frequency sinusoidal pulse excitation is investigated. In the vicinity of the resonant frequency, a frequency stepping sinusoidal pulse sequence is employed as the excitation signal. A set of free vibration response signals, containing different degrees of nonlinear dynamical characteristics, are obtained. The amplitude-frequency curves of the resonator are acquired from the forced vibration signals. Together with a singular spectrum analysis algorithm, the instantaneous amplitudes and instantaneous frequencies are extracted by a Hilbert transform from the free vibration signals. The calculated Backbone curves, and frequency response function (FRF) curves are distinct and can be used to characterize the nonlinear dynamics of the resonator. Taking a Duffing system as an example, numerical simulations are carried out for free vibration response signals in cases of different signal-to-noise ratios (SNRs). The results show that this method displays better anti-noise performance than FREEVIB. A vibrating ring microgyroscope is experimentally tested. The obtained Backbone and FRF curves agree with those obtained by the traditional frequency sweeping method. As a test technique, the proposed method can also be used to for experimentally testing the dynamic characteristics of other types of micromechanical resonators.
authors.affiliation: State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China. weiym13@mails.tsinghua.edu.cn.|High-Tech Institute of Xi'an, Xi'an 710025, China. weiym13@mails.tsinghua.edu.cn.
authors.forename: Yumiao
authors.initials: Y
authors.lastname: Wei
authors.affiliation: State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China. dongyg@mail.tsinghua.edu.cn.
authors.forename: Yonggui
authors.initials: Y
authors.lastname: Dong
authors.affiliation: High-Tech Institute of Xi'an, Xi'an 710025, China. zhangyang8195@126.com.
authors.forename: Xianxiang
authors.initials: X
authors.lastname: Huang
authors.affiliation: High-Tech Institute of Xi'an, Xi'an 710025, China. effortyao@163.com.
authors.forename: Zhili
authors.initials: Z
authors.lastname: Zhang
keywords: Backbone curve; Hilbert transform; MEMS resonators; nonlinear features; singular spectrum analysis