title: A novel 2-step ALD route to ultra-thin MoS2films on SiO2through a surface organometallic intermediate.
abstract: The lack of scalable-methods for the growth of 2D MoS2crystals, an identified emerging material with applications ranging from electronics to energy storage, is a current bottleneck against its large-scale deployment. We report here a two-step ALD route with new organometallic precursors, Mo(NMe2)4and 1,2-ethanedithiol (HS(CH2)2SH) which consists in the layer-by-layer deposition of an amorphous surface Mo(iv) thiolate at 50 °C, followed by a subsequent annealing at higher temperature leading to ultra-thin MoS2nanocrystals (∼20 nm-large) in the 1-2 monolayer range. In contrast to the usual high-temperature growth of 2D dichalcogenides, where nucleation is the key parameter to control both thickness and uniformity, our novel two-step ALD approach enables chemical control over these two parameters, the growth of 2D MoS2crystals upon annealing being ensured by spatial confinement and facilitated by the formation of a buffer oxysulfide interlayer.
authors.affiliation: Univ. Grenoble Alpes, FR-38000 Grenoble, CEA, LETI, Minatec Campus, FR-38054 Grenoble Cedex 9, France. francois.martin@cea.fr and Université de Lyon, C2P2 - UMR 5265 (CNRS - Université de Lyon 1 - CPE Lyon), Équipe Chimie Organométallique de Surface CPE Lyon, 43 Boulevard du 11 Novembre 1918, FR-69616 Villeurbanne Cedex, France. alessandra.quadrelli@cpe.fr.
authors.forename: Stéphane
authors.initials: S
authors.lastname: Cadot
authors.affiliation: Univ. Grenoble Alpes, FR-38000 Grenoble, CEA, LETI, Minatec Campus, FR-38054 Grenoble Cedex 9, France. francois.martin@cea.fr.
authors.forename: Olivier
authors.initials: O
authors.lastname: Renault
authors.affiliation: Univ. Grenoble Alpes, FR-38000 Grenoble, CEA, LETI, Minatec Campus, FR-38054 Grenoble Cedex 9, France. francois.martin@cea.fr.
authors.forename: Mathieu
authors.initials: M
authors.lastname: Frégnaux
authors.affiliation: Univ. Grenoble Alpes, FR-38000 Grenoble, CEA, LETI, Minatec Campus, FR-38054 Grenoble Cedex 9, France. francois.martin@cea.fr.
authors.forename: Denis
authors.initials: D
authors.lastname: Rouchon
authors.affiliation: Univ. Grenoble Alpes, FR-38000 Grenoble, CEA, LETI, Minatec Campus, FR-38054 Grenoble Cedex 9, France. francois.martin@cea.fr.
authors.forename: Emmanuel
authors.initials: E
authors.lastname: Nolot
authors.affiliation: Université de Lyon, C2P2 - UMR 5265 (CNRS - Université de Lyon 1 - CPE Lyon), Équipe Chimie Organométallique de Surface CPE Lyon, 43 Boulevard du 11 Novembre 1918, FR-69616 Villeurbanne Cedex, France. alessandra.quadrelli@cpe.fr.
authors.forename: Kai
authors.initials: K
authors.lastname: Szeto
authors.affiliation: Université de Lyon, C2P2 - UMR 5265 (CNRS - Université de Lyon 1 - CPE Lyon), Équipe Chimie Organométallique de Surface CPE Lyon, 43 Boulevard du 11 Novembre 1918, FR-69616 Villeurbanne Cedex, France. alessandra.quadrelli@cpe.fr.
authors.forename: Chloé
authors.initials: C
authors.lastname: Thieuleux
authors.affiliation: Université de Lyon, C2P2 - UMR 5265 (CNRS - Université de Lyon 1 - CPE Lyon), Équipe Chimie Organométallique de Surface CPE Lyon, 43 Boulevard du 11 Novembre 1918, FR-69616 Villeurbanne Cedex, France. alessandra.quadrelli@cpe.fr.
authors.forename: Laurent
authors.initials: L
authors.lastname: Veyre
authors.affiliation: Univ. Grenoble Alpes, FR-38000 Grenoble, CEA, INAC, SP2 M, Minatec Campus, FR-38054 Grenoble Cedex 9, France.
authors.forename: Hanako
authors.initials: H
authors.lastname: Okuno
authors.affiliation: Univ. Grenoble Alpes, FR-38000 Grenoble, CEA, LETI, Minatec Campus, FR-38054 Grenoble Cedex 9, France. francois.martin@cea.fr.
authors.forename: François
authors.initials: F
authors.lastname: Martin
authors.affiliation: Université de Lyon, C2P2 - UMR 5265 (CNRS - Université de Lyon 1 - CPE Lyon), Équipe Chimie Organométallique de Surface CPE Lyon, 43 Boulevard du 11 Novembre 1918, FR-69616 Villeurbanne Cedex, France. alessandra.quadrelli@cpe.fr.
authors.forename: Elsje Alessandra
authors.initials: EA
authors.lastname: Quadrelli