title: A stand-alone compact EUV microscope based on gas-puff target source.
abstract: We report on a very compact desk-top transmission extreme ultraviolet (EUV) microscope based on a laser-plasma source with a double stream gas-puff target, capable of acquiring magnified images of objects with a spatial (half-pitch) resolution of sub-50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi-monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy.
authors.affiliation: Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
authors.forename: Alfio
authors.initials: A
authors.lastname: Torrisi
authors.affiliation: Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
authors.forename: Przemyslaw
authors.initials: P
authors.lastname: Wachulak
authors.affiliation: Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
authors.forename: Łukasz
authors.initials: Ł
authors.lastname: Węgrzyński
authors.affiliation: Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
authors.forename: Tomasz
authors.initials: T
authors.lastname: Fok
authors.affiliation: Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
authors.forename: Andrzej
authors.initials: A
authors.lastname: Bartnik
authors.affiliation: Faculty of Biomedical Engineering, Czech Technical University in Prague, Kladno, Czech Republic.
authors.forename: Tomáš
authors.initials: T
authors.lastname: Parkman
authors.affiliation: Faculty of Biomedical Engineering, Czech Technical University in Prague, Kladno, Czech Republic.
authors.forename: Šárka
authors.initials: Š
authors.lastname: Vondrová
authors.affiliation: Faculty of Biomedical Engineering, Czech Technical University in Prague, Kladno, Czech Republic.
authors.forename: Jana
authors.initials: J
authors.lastname: Turňová
authors.affiliation: Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
authors.forename: Bartłomiej J
authors.initials: BJ
authors.lastname: Jankiewicz
authors.affiliation: Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
authors.forename: Bartosz
authors.initials: B
authors.lastname: Bartosewicz
authors.affiliation: Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
authors.forename: Henryk
authors.initials: H
authors.lastname: Fiedorowicz
keywords: EUV microscopy; EUV source; Fresnel zone plate; gas-puff target; imaging