title: Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications.
abstract: Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a small grinding force and low surface roughness. The sensor head was formed by hermetically bonding two layers of SiC using a nickel diffusion bonding method. The pressure sensor illustrated a good linearity in the range of 0.1-0.9 MPa, with a resolution of 0.27% F.S. (full scale) at room temperature.
authors.affiliation: School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China. jiangyg@buaa.edu.cn.|International Research Institute for Multidisciplinary Science, Beihang University, Beijing 100191, China. jiangyg@buaa.edu.cn.
authors.forename: Yonggang
authors.initials: Y
authors.lastname: Jiang
authors.affiliation: School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China. lj379@outlook.com.
authors.forename: Jian
authors.initials: J
authors.lastname: Li
authors.affiliation: School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China. zzw89_177@126.com.
authors.forename: Zhiwen
authors.initials: Z
authors.lastname: Zhou
authors.affiliation: School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China. sdjxg@163.com.
authors.forename: Xinggang
authors.initials: X
authors.lastname: Jiang
authors.affiliation: School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China. zhangdy@buaa.edu.cn.
authors.forename: Deyuan
authors.initials: D
authors.lastname: Zhang
keywords: bonding; harsh environment; pressure sensor; silicon carbide; ultrasonic assisted machining