title: Silicon technologies for arrays of Single Photon Avalanche Diodes.
abstract: In order to fulfill the requirements of many applications, we recently developed a new technology aimed at combining the advantages of traditional thin and thick silicon Single Photon Avalanche Diodes (SPAD). In particular we demonstrated single-pixel detectors with a remarkable improvement in the Photon Detection Efficiency in the red/near-infrared spectrum (e.g. 40% at 800nm) while maintaining a timing jitter better than 100ps. In this paper we discuss the limitations of such Red-Enhanced (RE) technology from the point of view of the fabrication of small arrays of SPAD and we propose modifications to the structure aimed at overcoming these issues. We also report the first preliminary experimental results attained on devices fabricated adopting the improved structure.
authors.affiliation: Politecnico di Milano, Dipartimento di Elettronica, Informazione e Bioingegneria, piazza Leonardo da Vinci 32 - 20133 Milano, Italy.
authors.forename: Angelo
authors.initials: A
authors.lastname: Gulinatti
authors.affiliation: Politecnico di Milano, Dipartimento di Elettronica, Informazione e Bioingegneria, piazza Leonardo da Vinci 32 - 20133 Milano, Italy.
authors.forename: Francesco
authors.initials: F
authors.lastname: Ceccarelli
authors.affiliation: Politecnico di Milano, Dipartimento di Elettronica, Informazione e Bioingegneria, piazza Leonardo da Vinci 32 - 20133 Milano, Italy.
authors.forename: Ivan
authors.initials: I
authors.lastname: Rech
authors.affiliation: Politecnico di Milano, Dipartimento di Elettronica, Informazione e Bioingegneria, piazza Leonardo da Vinci 32 - 20133 Milano, Italy; MPD Micro-Photon-Devices, via Stradivari 4 - 39100 Bolzano, Italy.
authors.forename: Massimo
authors.initials: M
authors.lastname: Ghioni
keywords: Enhanced Photon Detection Efficiency; Photon Counting; Photon Detection Efficiency (PDE); RE-SPAD; Red-Enhanced SPAD; SPAD arrays; Single-Photon Avalanche Diode (SPAD); Time Correlated Single Photon Counting (TCSPC)