title: Ultrasensitive Pressure Detection of Few-Layer MoS2.
abstract: Ultrasensitive pressure sensors are constructed with few-layer MoS2films. As-designed Fabry-Perot (F-P) sensors exhibit nearly synchronous pressure-deflection responses with a very high sensitivity (89.3 nm Pa-1), which is three orders of magnitude higher than those of conventional diaphragm materials (e.g., silica, silver films). This kind of F-P sensor may open up new avenues for 2D materials in biomedical and environmental applications.
authors.affiliation: Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China.
authors.forename: Feifan
authors.initials: F
authors.lastname: Yu
authors.affiliation: School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing, 100191, China.
authors.forename: Qianwen
authors.initials: Q
authors.lastname: Liu
authors.affiliation: Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China.
authors.forename: Xin
authors.initials: X
authors.lastname: Gan
authors.affiliation: Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China.
authors.forename: Mingxiang
authors.initials: M
authors.lastname: Hu
authors.affiliation: Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA, 16802, USA.
authors.forename: Tianyi
authors.initials: T
authors.lastname: Zhang
authors.affiliation: School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing, 100191, China.
authors.forename: Cheng
authors.initials: C
authors.lastname: Li
authors.affiliation: Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China.
authors.forename: Feiyu
authors.initials: F
authors.lastname: Kang
authors.affiliation: Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA, 16802, USA.|Department of Chemistry, Department of Physics and Center for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, PA, 16802, USA.|Institute of Carbon Science and Technology, Shinshu University, Wakasato 4-17-1, Nagano, 380-853, Japan.
authors.forename: Mauricio
authors.initials: M
authors.lastname: Terrones
authors.affiliation: Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China.
authors.forename: Ruitao
authors.initials: R
authors.lastname: Lv
keywords: 2D materials; F-P sensor; MoS2; pressure detection