title: Quantitative EDXS: Influence of geometry on a four detector system.
abstract: The influence of the geometry on quantitative energy dispersive X-ray spectrometry (EDXS) analysis is determined for a ChemiSTEM system (Super-X) in combination with a low-background double-tilt specimen holder. For the first time a combination of experimental measurements with simulations is used to determine the positions of the individual detectors of a Super-X system. These positions allow us to calculate the detector's solid angles and estimate the amount of detector shadowing and its influence on quantitative EDXS analysis, including absorption correction using the ζ-factor method. Both shadowing by the brass portions and the beryllium specimen carrier of the holder severely affect the quantification of low to medium atomic number elements. A multi-detector system is discussed in terms of practical consequences of the described effects, and a quantitative evaluation of a Fayalit sample is demonstrated. Corrections and suggestions for minimizing systematic errors are discussed to improve quantitative methods for a multi-detector system.
authors: Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria.
authors: Johanna
authors: J
authors: Kraxner
authors: Institute for Geometry, Graz University of Technology, Kopernikusgasse 24, 8010 Graz, Austria.
authors: Margit
authors: M
authors: Schäfer
authors: Institute for Geometry, Graz University of Technology, Kopernikusgasse 24, 8010 Graz, Austria.
authors: Otto
authors: O
authors: Röschel
authors: Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria.
authors: Gerald
authors: G
authors: Kothleitner
authors: Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria.
authors: Georg
authors: G
authors: Haberfehlner
authors: Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria.
authors: Manuel
authors: M
authors: Paller
authors: Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria. Electronic address: werner.grogger@felmi-zfe.at.
authors: Werner
authors: W
authors: Grogger
keywords: Absorption correction; Detector positions; Energy dispersive X-ray spectrometry (EDXS); Shadowing; Super-X; ζ-factor method