title: Highly Oriented Growth of Piezoelectric Thin Films on Silicon Using Two-Dimensional Nanosheets as Growth Template Layer.
abstract: Ca2Nb3O10(CNOns) and Ti0.87O2(TiOns) metal oxide nanosheets (ns) are used as a buffer layer for epitaxial growth of piezoelectric capacitor stacks on Si and Pt/Ti/SiO2/Si (Pt/Si) substrates. Highly (001)- and (110)-oriented Pb(Zr0.52Ti0.48)O3(PZT) films are achieved by utilizing CNOns and TiOns, respectively. The piezoelectric capacitors are characterized by polarization and piezoelectric hysteresis loops and by fatigue measurements. The devices fabricated with SrRuO3top and bottom electrodes directly on nanosheets/Si have ferroelectric and piezoelectric properties well comparable with devices that use more conventional oxide buffer layers (stacks) such as YSZ, CeO2/YSZ, or SrTiO3on Si. The devices grown on nanosheets/Pt/Si with Pt top electrodes show significantly improved polarization fatigue properties over those of similar devices grown directly on Pt/Si. The differences in properties are ascribed to differences in the crystalline structures and the density of the films. These results show a route toward the fabrication of single crystal piezoelectric thin films and devices with high quality, long-lifetime piezoelectric capacitor structures on nonperovskite and even noncrystalline substrates such as glass or polished metal surfaces.
authors: MESA+ Institute for Nanotechnology, University of Twente , P.O. Box 217, 7500AE Enschede, The Netherlands.|Solmates B.V., Drienerlolaan 5, 7522NB Enschede, The Netherlands.|International Training Institute for Materials Science, Hanoi University of Science and Technology , Dai Co Viet 1, Hanoi 10000, Vietnam.
authors: Minh D
authors: MD
authors: Nguyen
authors: MESA+ Institute for Nanotechnology, University of Twente , P.O. Box 217, 7500AE Enschede, The Netherlands.
authors: Huiyu
authors: H
authors: Yuan
authors: MESA+ Institute for Nanotechnology, University of Twente , P.O. Box 217, 7500AE Enschede, The Netherlands.
authors: Evert P
authors: EP
authors: Houwman
authors: Solmates B.V., Drienerlolaan 5, 7522NB Enschede, The Netherlands.
authors: Matthijn
authors: M
authors: Dekkers
authors: MESA+ Institute for Nanotechnology, University of Twente , P.O. Box 217, 7500AE Enschede, The Netherlands.
authors: Gertjan
authors: G
authors: Koster
authors: MESA+ Institute for Nanotechnology, University of Twente , P.O. Box 217, 7500AE Enschede, The Netherlands.
authors: Johan E
authors: JE
authors: Ten Elshof
authors: MESA+ Institute for Nanotechnology, University of Twente , P.O. Box 217, 7500AE Enschede, The Netherlands.
authors: Guus
authors: G
authors: Rijnders
keywords: PZT thin films; microcantilevers; nanosheets; piezoMEMS; piezoelectric coefficients