title: Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors.
abstract: Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentally verified in graphene using uniaxial strain in graphene. Here, we report experimental and theoretical data on the uni- and biaxial piezoresistive properties of suspended graphene membranes applied to piezoresistive pressure sensors. A detailed model that utilizes a linearized Boltzman transport equation describes accurately the charge-carrier density and mobility in strained graphene and, hence, the gauge factor. The gauge factor is found to be practically independent of the doping concentration and crystallographic orientation of the graphene films. These investigations provide deeper insight into the piezoresistive behavior of graphene membranes.
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
authors: Anderson D
authors: AD
authors: Smith
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
authors: Frank
authors: F
authors: Niklaus
authors: DPIA, University of Udine , 33100 Udine, Italy.
authors: Alan
authors: A
authors: Paussa
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
authors: Stephan
authors: S
authors: Schröder
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
authors: Andreas C
authors: AC
authors: Fischer
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
authors: Mikael
authors: M
authors: Sterner
authors: Department of Electrical Engineering and Computer Science, University of Siegen , Siegen 57076, Germany.
authors: Stefan
authors: S
authors: Wagner
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
authors: Sam
authors: S
authors: Vaziri
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
authors: Fredrik
authors: F
authors: Forsberg
authors: DPIA, University of Udine , 33100 Udine, Italy.
authors: David
authors: D
authors: Esseni
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
authors: Mikael
authors: M
authors: Östling
authors: KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.|Department of Electrical Engineering and Computer Science, University of Siegen , Siegen 57076, Germany.
authors: Max C
authors: MC
authors: Lemme
keywords: (suspended) graphene membranes; MEMS; NEMS; gauge factor; graphene; nanoelectromechanical system; piezoresistive transduction; pressure transducer; strain gauge; transducer; uniaxial and biaxial strain