title: Recent progress of atomic layer deposition on polymeric materials.
abstract: As a very promising surface coating technology, atomic layer deposition (ALD) can be used to modify the surfaces of polymeric materials for improving their functions and expanding their application areas. Polymeric materials vary in surface functional groups (number and type), surface morphology and internal structure, and thus ALD deposition conditions that typically work on a normal solid surface, usually do not work on a polymeric material surface. To date, a large variety of research has been carried out to investigate ALD deposition on various polymeric materials. This paper aims to provide an in-depth review of ALD deposition on polymeric materials and its applications. Through this review, we will provide a better understanding of surface chemistry and reaction mechanism for controlled surface modification of polymeric materials by ALD. The integrated knowledge can aid in devising an improved way in the reaction between reactant precursors and polymer functional groups/polymer backbones, which will in turn open new opportunities in processing ALD materials for better inorganic/organic film integration and potential applications.
authors: Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, Innovis, #08-03, Singapore 138634, Singapore.
authors: Hong Chen
authors: HC
authors: Guo
authors: Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, Innovis, #08-03, Singapore 138634, Singapore.
authors: Enyi
authors: E
authors: Ye
authors: Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, Innovis, #08-03, Singapore 138634, Singapore. Electronic address: lizb@imre.a-star.edu.sg.
authors: Zibiao
authors: Z
authors: Li
authors: Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, Innovis, #08-03, Singapore 138634, Singapore.
authors: Ming-Yong
authors: MY
authors: Han
authors: Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, Innovis, #08-03, Singapore 138634, Singapore; Department of Materials Science and Engineering, National University of Singapore, Singapore 117574, Singapore; Singapore Eye Research Institute, 20 College Road, Singapore 169856, Singapore. Electronic address: lohxj@imre.a-star.edu.sg.
authors: Xian Jun
authors: XJ
authors: Loh
mesh_terms: D004560:Electricity; D008422:Materials Testing / Q000379:methods*; D008962:Models, Theoretical; D011108:Polymers / Q000737:chemistry*; D013499:Surface Properties
chemical_list: D011108:Polymers
keywords: Atomic layer deposition; Inorganic/polymer interfaces; Polymeric materials; Surface chemistry; Thin films