Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source.
We present the results of the low-melting liquid metal droplets generation based on excited Rayleigh jet breakup. We discuss on the operation of the industrial and in-house designed and manufactured dispensing devices for the droplets generation. Droplet diameter can be varied in the range of 30-90 μm. The working frequency of the droplets, velocity, and the operating temperature were in the ranges of 20-150 kHz, 4-15 m/s, and up to 250 °C, respectively. The standard deviations for the droplet center of mass position both their diameter σ < 1 μm at the distance of 45 mm from the nozzle. Stable operation in the long-term (over 1.5 h) was demonstrated for a wide range of the droplet parameters: diameters, frequencies, and velocities. Physical factors affecting the stability of the generator operation have been identified. The technique for droplet synchronization, allowing using the droplet as a target for laser produced plasma, has been created; in particular, the generator has been successfully used in a high brightness extreme ultraviolet (EUV) light source. The operation with frequency up to 8 kHz was demonstrated as a result of the experimental simulation, which can provide an average brightness of the EUV source up to ∼1.2 kW/mm2sr.
EUV Labs, Sirenevyi Blvd., Troitsk, Moscow 142190, Russia.
A
A
Vinokhodov
ISAN, Phizicheskay Street, Troitsk, Moscow 142190, Russia.
M
M
Krivokorytov
EUV Labs, Sirenevyi Blvd., Troitsk, Moscow 142190, Russia.
Yu
Y
Sidelnikov
EUV Labs, Sirenevyi Blvd., Troitsk, Moscow 142190, Russia.
V
V
Krivtsun
ISAN, Phizicheskay Street, Troitsk, Moscow 142190, Russia.
V
V
Medvedev
EUV Labs, Sirenevyi Blvd., Troitsk, Moscow 142190, Russia.
V
V
Bushuev
EUV Labs, Sirenevyi Blvd., Troitsk, Moscow 142190, Russia.
K
K
Koshelev
ISTEQ, 5656 AG Eindhoven, The Netherlands.
D
D
Glushkov
ISTEQ, 5656 AG Eindhoven, The Netherlands.
S
S
Ellwi