The reactor-activator for gas-jet deposition of diamond structures.
This paper presents a new method of deposition of diamond and diamond like structures by using the original reactor for activation of carbonaceous gas mixtures. One of the important characteristics of the described reactor is the power efficiency owing to low heat losses. The new method of gas flow formation opens new possibilities to get important trade-offs (wide range of background conditions and others). The principal possibility of diamond deposition is proved by experiments with the flow of hydrogen and methane mixture in tungsten resistively heating cylindrical channels. Electron microphotographs and Raman spectrum of deposited structures prove the fact that deposited samples are diamond structures. Numerical study of the mixture flow through the reactor was carried for optimization of gas flow conducted to a substrate.
Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, Lavrent'eva Ave., 1, 630090 Novosibirsk, Russia.
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Rebrov
Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, Lavrent'eva Ave., 1, 630090 Novosibirsk, Russia.
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Andreev
Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, Lavrent'eva Ave., 1, 630090 Novosibirsk, Russia.
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B'yadovskiy
Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, Lavrent'eva Ave., 1, 630090 Novosibirsk, Russia.
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Kubrak
Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, Lavrent'eva Ave., 1, 630090 Novosibirsk, Russia.
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Yudin