Scanning Probe Nanopatterning and Layer-by-Layer Thinning of Black Phosphorus.
Nanopatterning and layer-by-layer thinning of black phosphorus is demonstrated with conductive atomic-force-microscope anodic oxidation. The liquid-phase patterning byproduct is readily removed by water rinsing. An alternating-current bias enables direct nanopatterning and thinning on insulating substrates such as SiO2/Si. Field-effect transistors with patterned channels show significant improvements in current modulation by up to a factor of 50.
Applied Physics Graduate Program, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA.
Xiaolong
X
Liu
Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA.
Kan-Sheng
KS
Chen
Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA.
Spencer A
SA
Wells
Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA.
Itamar
I
Balla
Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA.
Jian
J
Zhu
Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA.
Joshua D
JD
Wood
Applied Physics Graduate Program, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA.|Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA.|Department of Chemistry, Department of Electrical Engineering and Computer Science, Northwestern University, Evanston, IL, 60208, USA.
Mark C
MC
Hersam
2D; conductive atomic force microscopy; nanolithography; phosphorene; phosphorus oxide; transistors