Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar.
Here, a silicon nanopillar array (Si-NPA) was fabricated. It was studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids.
State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. Liw@njupt.edu.cn.|State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China. Liw@njupt.edu.cn.|Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China. Liw@njupt.edu.cn.
Wei
W
Li
State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. 1215022733@njupt.edu.cn.
Zhilin
Z
Feng
State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. 1015020833@njupt.edu.cn.
Enwen
E
Dai
State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. jiexu@njupt.edu.cn.
Jie
J
Xu
State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. Baigang@njupt.edu.cn.|Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China. Baigang@njupt.edu.cn.
Gang
G
Bai
gas sensing; ordered silicon nanopillar; organic vapour