Novel Concept of Gas Sensitivity Characterization of Materials Suited for Implementation in FET-Based Gas Sensors.
We propose a novel technique to investigate the gas sensitivity of materials for implementation in field-effect transistor-based gas sensors. Our technique is based on the measurement of the surface charge induced by gas species adsorption, using an electrometer. Platinum sensitivity to hydrogen diluted in synthetic air has been evaluated with the proposed charge measurement technique in the operation temperature range from 80 to 190 °C at constant H2concentration of 4 % and for different concentrations ranging from 0.5 to 4 % at 130 °C.
Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, 3000 Boul. Universite, Sherbrooke, J1K OA5, Quebec, Canada. yosri.ayadi@usherbrooke.ca.|Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke, 3000 Boul. Universite, Sherbrooke, J1K OA5, Quebec, Canada. yosri.ayadi@usherbrooke.ca.|Institut des Nanotechnologies de Lyon (INL) - UMR CNRS 5270, 7 av. Jean Capelle, 69621, Villeurbanne cedex, France. yosri.ayadi@usherbrooke.ca.
Yosri
http://orcid.org/0000-0003-4998-1949
Y
Ayadi
Institut des Nanotechnologies de Lyon (INL) - UMR CNRS 5270, 7 av. Jean Capelle, 69621, Villeurbanne cedex, France.
Lama
L
Rahhal
Institut des Nanotechnologies de Lyon (INL) - UMR CNRS 5270, 7 av. Jean Capelle, 69621, Villeurbanne cedex, France.
Bertrand
B
Vilquin
Institut des Nanotechnologies de Lyon (INL) - UMR CNRS 5270, 7 av. Jean Capelle, 69621, Villeurbanne cedex, France.
Céline
C
Chevalier
Institut National de la Recherche Scientifique, 1650, Blvd. Lionel-Boulet, Varennes, J3X 1S2, Quebec, Canada.
Fabian
F
Ambriz Vargas
Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, 3000 Boul. Universite, Sherbrooke, J1K OA5, Quebec, Canada.|Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke, 3000 Boul. Universite, Sherbrooke, J1K OA5, Quebec, Canada.
Serge
S
Ecoffey
Institut National de la Recherche Scientifique, 1650, Blvd. Lionel-Boulet, Varennes, J3X 1S2, Quebec, Canada.
Andreas
A
Ruediger
Plasmionique Inc, 171B-1650, Blvd. Lionel-Boulet, Varennes, J3X 1S2, Quebec, Canada.
Andranik
A
Sarkissian
ST Microelectronics, 850 Rue Jean Monnet, 38920, Crolles, France.
Stéphane
S
Monfray
Institut des Nanotechnologies de Lyon (INL) - UMR CNRS 5270, 7 av. Jean Capelle, 69621, Villeurbanne cedex, France.
Jean-Pierre
JP
Cloarec
Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, 3000 Boul. Universite, Sherbrooke, J1K OA5, Quebec, Canada.|Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke, 3000 Boul. Universite, Sherbrooke, J1K OA5, Quebec, Canada.
Dominique
D
Drouin
Institut des Nanotechnologies de Lyon (INL) - UMR CNRS 5270, 7 av. Jean Capelle, 69621, Villeurbanne cedex, France.
Abdelkader
A
Souifi
Field-effect transistor; Gas sensor; Hydrogen detection; Platinum; Surface charge measurement