title: Universal evaluation of combined standard uncertainty for rotating-element spectroscopic ellipsometers.
abstract: We present for the first time a universal expression for the combined standard uncertainty for all types of rotating-element spectroscopic ellipsometers (RE-SEs). Specifically, we introduce general model functions as universal analytic expressions for the combined standard uncertainties of the ellipsometric sample parameters. The model functions are expressed as functions of influencing quantities that are not known exactly. The detailed expressions for the model functions are provided for the common RE-SEs. Our approach can be used for instrumentation, standardization, simulation, metrology, optimization of measurement conditions, and performance comparison between RE-SEs.
authors.forename: Yong Jai
authors.initials: YJ
authors.lastname: Cho
authors.forename: Won
authors.initials: W
authors.lastname: Chegal
authors.forename: Jeong Pyo
authors.initials: JP
authors.lastname: Lee
authors.forename: Hyun Mo
authors.initials: HM
authors.lastname: Cho