title: TEM illumination settings study for optimum spatial resolution and indexing reliability in crystal orientation mappings.
abstract: The spatial resolution and the indexing quality obtained with an automated orientation and phase mapping tool are analyzed for different Transmission Electron Microscope (TEM) illumination settings. The electron probe size and convergence angle are studied for two TEM configuration modes referred as microprobe and nanoprobe modes. Using a 10μmC2aperture in a FEI Tecnai F20 (S)TEM, the nanoprobe mode is used to get a small convergent electron beam while the microprobe mode provides a nearly parallel illumination at the cost of a larger probe size. The nanoprobe configuration enables to increase the spatial resolution (∼1nm vs 3nm) but also affects the fraction of mis-indexed points (15% vs 1%). Indexing errors are attributed to the increase by a factor of three of the convergence angle with respect to the microprobe mode. While intermediate optimum settings may be found and are potentially achievable on electron microscopes providing a 'free lens' control or a larger choice of C2apertures, it is emphasized that the spatial resolution cannot be considered without reference to the indexing quality and, consequently to the convergence angle.
authors.affiliation: STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France; Univ. Grenoble Alpes, CNRS, SIMAP, F-38000 Grenoble, France. Electronic address: alexia.valery@grenoble-inp.fr.
authors.forename: A
authors.initials: A
authors.lastname: Valery
authors.affiliation: STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France.
authors.forename: A
authors.initials: A
authors.lastname: Pofelski
authors.affiliation: STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France.
authors.forename: L
authors.initials: L
authors.lastname: Clément
authors.affiliation: STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France.
authors.forename: F
authors.initials: F
authors.lastname: Lorut
authors.affiliation: Univ. Grenoble Alpes, CNRS, SIMAP, F-38000 Grenoble, France.
authors.forename: E F
authors.initials: EF
authors.lastname: Rauch
keywords: ACOM-TEM; Orientation mapping; Ped; Semiconductor; Spatial resolution; TEM