title: High speed and high resolution table-top nanoscale imaging.
abstract: We present a table-top coherent diffractive imaging (CDI) experiment based on high-order harmonics generated at 18 nm by a high average power femtosecond fiber laser system. The high photon flux, narrow spectral bandwidth, and high degree of spatial coherence allow for ultrahigh subwavelength resolution imaging at a high numerical aperture. Our experiments demonstrate a half-pitch resolution of 15 nm, close to the actual Abbe limit of 12 nm, which is the highest resolution achieved from any table-top extreme ultraviolet (XUV) or x-ray microscope. In addition, sub-30 nm resolution was achieved with only 3 s of integration time, bringing live diffractive imaging and three-dimensional tomography on the nanoscale one step closer to reality. The current resolution is solely limited by the wavelength and the detector size. Thus, table-top nanoscopes with only a few-nanometer resolutions are in reach and will find applications in many areas of science and technology.
authors.forename: G K
authors.initials: GK
authors.lastname: Tadesse
authors.forename: R
authors.initials: R
authors.lastname: Klas
authors.forename: S
authors.initials: S
authors.lastname: Demmler
authors.forename: S
authors.initials: S
authors.lastname: Hädrich
authors.forename: I
authors.initials: I
authors.lastname: Wahyutama
authors.forename: M
authors.initials: M
authors.lastname: Steinert
authors.forename: C
authors.initials: C
authors.lastname: Spielmann
authors.forename: M
authors.initials: M
authors.lastname: Zürch
authors.forename: T
authors.initials: T
authors.lastname: Pertsch
authors.forename: A
authors.initials: A
authors.lastname: Tünnermann
authors.forename: J
authors.initials: J
authors.lastname: Limpert
authors.forename: J
authors.initials: J
authors.lastname: Rothhardt