title: Monolithic Active Pixel Sensors (MAPS) in a Quadruple Well Technology for Nearly 100% Fill Factor and Full CMOS Pixels.
abstract: In this paper we present a novel, quadruple well process developed in a modern 0.18 mm CMOS technology called INMAPS. On top of the standard process, we have added a deep P implant that can be used to form a deep P-well and provide screening of N-wells from the P-doped epitaxial layer. This prevents the collection of radiation-induced charge by unrelated N-wells, typically ones where PMOS transistors are integrated. The design of a sensor specifically tailored to a particle physics experiment is presented, where each 50 mm pixel has over 150 PMOS and NMOS transistors. The sensor has been fabricated in the INMAPS process and first experimental evidence of the effectiveness of this process on charge collection is presented, showing a significant improvement in efficiency.
authors.affiliation: Department of Physics, Blackett Laboratory, Imperial College London, London, SW7 2AZ, UK. j.ballin06@imperial.ac.uk.
authors.forename: Jamie Alexander
authors.initials: JA
authors.lastname: Ballin
authors.affiliation: Rutherford Appleton Laboratory, Science and Technology Facilities Council (STFC), Harwell Science and Innovation Campus, Didcot, OX11 0QX, UK. j.p.crooks@rl.ac.uk.
authors.forename: Jamie Phillip
authors.initials: JP
authors.lastname: Crooks
authors.affiliation: Department of Physics, Blackett Laboratory, Imperial College London, London, SW7 2AZ, UK. p.dauncey@imperial.ac.uk.
authors.forename: Paul Dominic
authors.initials: PD
authors.lastname: Dauncey
authors.affiliation: Department of Physics, Blackett Laboratory, Imperial College London, London, SW7 2AZ, UK. a.magnan@imperial.ac.uk.
authors.forename: Anne-Marie
authors.initials: AM
authors.lastname: Magnan
authors.affiliation: Institut Pluridisciplinaire Hubert Curien, 23 rue du Loess - BP28, 67037 Strasbourg, France. yoshinari.mikami@ires.in2p3.fr.
authors.forename: Yoshiari
authors.initials: Y
authors.lastname: Mikami
authors.affiliation: Rutherford Appleton Laboratory, Science and Technology Facilities Council (STFC), Harwell Science and Innovation Campus, Didcot, OX11 0QX, UK. odm@hep.ph.bham.ac.uk.|School of Physics and Astronomy, University of Birmingham, Birmingham, B15 2TT, UK. odm@hep.ph.bham.ac.uk.
authors.forename: Owen Daniel
authors.initials: OD
authors.lastname: Miller
authors.affiliation: Department of Physics, Blackett Laboratory, Imperial College London, London, SW7 2AZ, UK. m.noy@imperial.ac.uk.
authors.forename: Matthew
authors.initials: M
authors.lastname: Noy
authors.affiliation: Faculty of Electrical Engineering, University of Belgrade, Bulevar kralja Aleksandra 73, 11120 Belgrade, Serbia. rajo@el.etf.rs.
authors.forename: Vladimir
authors.initials: V
authors.lastname: Rajovic
authors.affiliation: Rutherford Appleton Laboratory, Science and Technology Facilities Council (STFC), Harwell Science and Innovation Campus, Didcot, OX11 0QX, UK. m.stanitzki@rl.ac.uk.
authors.forename: Marcel
authors.initials: M
authors.lastname: Stanitzki
authors.affiliation: Rutherford Appleton Laboratory, Science and Technology Facilities Council (STFC), Harwell Science and Innovation Campus, Didcot, OX11 0QX, UK. k.stefanov@rl.ac.uk.
authors.forename: Konstantin
authors.initials: K
authors.lastname: Stefanov
authors.affiliation: Rutherford Appleton Laboratory, Science and Technology Facilities Council (STFC), Harwell Science and Innovation Campus, Didcot, OX11 0QX, UK. r.turchetta@rl.ac.uk.
authors.forename: Renato
authors.initials: R
authors.lastname: Turchetta
authors.affiliation: Rutherford Appleton Laboratory, Science and Technology Facilities Council (STFC), Harwell Science and Innovation Campus, Didcot, OX11 0QX, UK. m.tyndel@rl.ac.uk.
authors.forename: Mike
authors.initials: M
authors.lastname: Tyndel
authors.affiliation: Rutherford Appleton Laboratory, Science and Technology Facilities Council (STFC), Harwell Science and Innovation Campus, Didcot, OX11 0QX, UK. e.g.villani@rl.ac.uk.
authors.forename: Enrico Giulio
authors.initials: EG
authors.lastname: Villani
authors.affiliation: School of Physics and Astronomy, University of Birmingham, Birmingham, B15 2TT, UK. nigel.watson@rl.ac.uk.
authors.forename: Nigel Keith
authors.initials: NK
authors.lastname: Watson
authors.affiliation: School of Physics and Astronomy, University of Birmingham, Birmingham, B15 2TT, UK. jaw@hep.ph.bham.ac.uk.
authors.forename: John Allan
authors.initials: JA
authors.lastname: Wilson
keywords: CMOS; fill factor; image sensor