title: The Image Transceiver Device: Studies of Improved Physical Design.
abstract: The Image Transceiver Device (ITD) design is based on combining LCOS micro-display, image processing tools and back illuminated APS imager in single CMOS chip [1]. The device is under development for Head-Mounted Display applications in augmented and virtual reality systems. The main issues with the present design are a high crosstalk of the backside imager and the need to shield the pixel circuitry from the photocharges generated in the silicon substrate. In this publication we present a modified, "deep p-well" ITD pixel design, which provides a significantly reduced crosstalk level, as well as an effective shielding of photo-charges for the pixel circuitry. The simulation performed using Silvaco software [ATLAS Silicon Device Simulator, Ray Trace and Light Absorption programs, Silvaco International, 1998] shows that the new approach provides high photo response and allows increasing the optimal thickness of the die over and above the 10-15 micrometers commonly used for back illuminated imaging devices, thereby improving its mechanical ruggedness following the thinning process and also providing a more efficient absorption of the long wavelength photons. The proposed deep p-well pixel structure is also a technology solution for the fabrication of high performance back illuminated CMOS image sensors.
authors.affiliation: Department of Electrical Engineering, Holon Institute of Technology, Holon, Israel. isak@hit.ac.il.
authors.forename: Yitzhak
authors.initials: Y
authors.lastname: David
authors.affiliation: Department of Electrical Engineering, Holon Institute of Technology, Holon, Israel. efron@bgu.ac.il.|Department of Electro-optical Engineering, Ben Gurion University, Beer-Sheva, Israel. efron@bgu.ac.il.
authors.forename: Uzi
authors.initials: U
authors.lastname: Efron
keywords: CMOS imager; Smart-Goggle.; back illuminated APS; crosstalk; head-mounted display; photoactivation