title: A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS.
abstract: In this paper, a finite element (FE) procedure for modeling electrostatically actu-ated MEMS is presented. It concerns a perturbation method for computing electrostatic fielddistortions due to moving conductors. The computation is split in two steps. First, an un-perturbed problem (in the absence of certain conductors) is solved with the conventional FEmethod in the complete domain. Second, a perturbation problem is solved in a reduced re-gion with an additional conductor using the solution of the unperturbed problem as a source.When the perturbing region is close to the original source field, an iterative computation maybe required. The developed procedure offers the advantage of solving sub-problems in re-duced domains and consequently of benefiting from different problem-adapted meshes. Thisapproach allows for computational efficiency by decreasing the size of the problem.
authors.affiliation: Department of Electrical Engineering and Computer Science, Applied and Computational Electromagnetics (ACE), 1 University of Liège B-4000, Li`ege, Belgium. mboutaayamou@ulg.ac.be.
authors.forename: Mohamed
authors.initials: M
authors.lastname: Boutaayamou
authors.affiliation: Department of Electrical Engineering and Computer Science, Applied and Computational Electromagnetics (ACE), 1 University of Liège B-4000, Li`ege, Belgium. r.sabariego@ulg.ac.be.
authors.forename: Ruth V
authors.initials: RV
authors.lastname: Sabariego
authors.affiliation: Department of Electrical Engineering and Computer Science, Applied and Computational Electromagnetics (ACE), 1 University of Liège B-4000, Li`ege, Belgium. patrick.dular@ulg.ac.be.
authors.forename: Patrick
authors.initials: P
authors.lastname: Dular
keywords: Electrostatic field distortions; MEMS.; finite element method; perturbation method