title: Fabrication of a ZnO Pyroelectric Sensor.
abstract: This paper proposes a two-step radio frequency (RF) sputtering process to forma ZnO film for pyroelectric sensors. It is shown that the two-step sputtering process with alower power step followed by a higher power step can significantly improve the voltageresponsivity of the ZnO pyroelectric sensor. The improvement is attributed mainly to theformation of ZnO film with a strongly preferred orientation towards the c-axis.Furthermore, a nickel film deposited onto the uncovered parts of the ZnO film caneffectively improve the voltage responsivity at higher modulating frequencies since thenickel film can enhance the incident energy absorption of the ZnO layer.
authors.affiliation: Nano-Electro-Mechanical Systems Research Center, National Taiwan University, Taipei, Taiwan. cchsiao@mail.nems.ntu.edu.tw.
authors.forename: Chun-Ching
authors.initials: CC
authors.lastname: Hsiao
authors.affiliation: Advanced Manufacturing Research Center, Department of Mechatronic Engineering, Huafan University, Taipei, Taiwan. kyhuang@cc.hfu.edu.tw.
authors.forename: Kuo-Yi
authors.initials: KY
authors.lastname: Huang
authors.affiliation: Advanced Manufacturing Research Center, Department of Mechatronic Engineering, Huafan University, Taipei, Taiwan. ychu@cc.hfu.edu.tw.
authors.forename: Yuh-Chung
authors.initials: YC
authors.lastname: Hu
keywords: ZnO; pyroelectric sensor; thin film deposition