title: 10 nm deep, sub-nanoliter fluidic nanochannels on germanium for attenuated total reflection infrared (ATR-IR) spectroscopy.
abstract: The fabrication of sub-nanoliter fluidic channels is demonstrated, with merely 10 nm depth on germanium, using conventional semiconductor device fabrication methods and a polymer assisted room-temperature sealing method. As a first application, an ultralow volume (650 pL) was studied by ATR-IR spectroscopy. A detection limit of ∼7.9 × 1010molecules of human serum albumin (HSA) (∼0.2 mM) in D2O was achieved with highly specific ATR-IR spectroscopy.
authors.affiliation: Institute of Physics, Academia Sinica, Taiwan. cfchou@phys.sinica.edu.tw.
authors.forename: K K
authors.identifier: 0000-0002-4661-242X
authors.initials: KK
authors.lastname: Sriram
authors.affiliation: Max-Planck-Institut für Eisenforschung GmbH, Max-Planck Str. 1, 40237 Düsseldorf, Germany. a.erbe@mpie.de.
authors.forename: Simantini
authors.identifier: 0000-0002-0105-9771
authors.initials: S
authors.lastname: Nayak
authors.affiliation: Max-Planck-Institut für Eisenforschung GmbH, Max-Planck Str. 1, 40237 Düsseldorf, Germany. a.erbe@mpie.de.
authors.forename: Stefanie
authors.initials: S
authors.lastname: Pengel
authors.affiliation: Institute of Physics, Academia Sinica, Taiwan. cfchou@phys.sinica.edu.tw and Research Centre for Applied Sciences, Academia Sinica, Taiwan and Genomics Research Centre, Academia Sinica, 128, Sec.2 Academia Road, Taipei, Taiwan 11529.
authors.forename: Chia-Fu
authors.initials: CF
authors.lastname: Chou
authors.affiliation: Max-Planck-Institut für Eisenforschung GmbH, Max-Planck Str. 1, 40237 Düsseldorf, Germany. a.erbe@mpie.de and Department of Materials Science and Engineering, NTNU, Norwegian University of Science and Technology, 7491 Trondheim, Norway.
authors.forename: Andreas
authors.initials: A
authors.lastname: Erbe