title: Locating light and heavy atomic column positions with picometer precision using ISTEM.
abstract: Recently, imaging scanning transmission electron microscopy (ISTEM) has been proposed as a promising new technique combining the advantages of conventional TEM (CTEM) and STEM (Rosenauer et al., 2014 [1]). The ability to visualize light and heavy elements together makes it a particularly interesting new, spatially incoherent imaging mode. Here, we evaluate this technique in term of precision with which atomic column locations can be measured. By using statistical parameter estimation theory, we will show that these locations can be accurately measured with a precision in the picometer range. Furthermore, a quantitative comparison is made with HAADF STEM imaging to investigate the advantages of ISTEM.
authors.affiliation: Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.
authors.forename: K H W
authors.initials: KH
authors.lastname: van den Bos
authors.affiliation: Institute for Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany.
authors.forename: F F
authors.initials: FF
authors.lastname: Krause
authors.affiliation: Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.
authors.forename: A
authors.initials: A
authors.lastname: Béché
authors.affiliation: Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.
authors.forename: J
authors.initials: J
authors.lastname: Verbeeck
authors.affiliation: Institute for Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany.
authors.forename: A
authors.initials: A
authors.lastname: Rosenauer
authors.affiliation: Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium. Electronic address: sandra.vanaert@uantwerpen.be.
authors.forename: S
authors.initials: S
authors.lastname: Van Aert
keywords: High-resolution (scanning) transmission electron microscopy (HR (S)TEM); Imaging STEM (ISTEM); Precise determination of atomic column locations; Quantitative electron microscopy; Statistical parameter estimation theory