title: Design and preparation of stress-free epitaxial BaTiO3polydomain films by RF magnetron sputtering.
abstract: Domain structures of BaTiO3thick films grown on (100) SrTiO3single-crystal substrates were engineered using an RF magnetron sputtering deposition process. By tuning the sputtering power and cooling rate and using an off-axis sputtering technique to prepare conducting perovskite oxide bottom electrode with heteroepitaxial quality, we have deposited epitaxial tetragonal single-domain and polydomain BaTiO3films with a self-assembled three-domain architecture. The electrical properties and microstructure of the BaTiO3films were characterized, and ac/a1/a2cellular polydomain structure was clearly observed in as-grown films by optical microscopy. Such a polydomain structure was a consequence of a complete relaxation of misfit stresses of the film. Engineering of this self-assembled microstructure has great potential in providing large, field-tunable pyroelectric and electromechanical responses in next-generation microelectronic devices and micro-electro-mechanical systems (MEMS).
authors.affiliation: Key Laboratory for Liquid-Solid Structural Evolution and Processing of Materials (Ministry of Education), Engineering Ceramics Key Laboratory of Shandong Province, School of Materials Science and Engineering, Shandong University, Jinan, Shandong 250061, China.
authors.forename: Wei
authors.initials: W
authors.lastname: Zhang
authors.affiliation: Key Laboratory for Liquid-Solid Structural Evolution and Processing of Materials (Ministry of Education), Engineering Ceramics Key Laboratory of Shandong Province, School of Materials Science and Engineering, Shandong University, Jinan, Shandong 250061, China.
authors.forename: Meiling
authors.initials: M
authors.lastname: Yuan
authors.affiliation: Key Laboratory for Liquid-Solid Structural Evolution and Processing of Materials (Ministry of Education), Engineering Ceramics Key Laboratory of Shandong Province, School of Materials Science and Engineering, Shandong University, Jinan, Shandong 250061, China.
authors.forename: Xianyang
authors.initials: X
authors.lastname: Wang
authors.affiliation: State Key Laboratory of New Ceramic and Fine Processing, Tsinghua University, Beijing 100084, China.
authors.forename: Wei
authors.initials: W
authors.lastname: Pan
authors.affiliation: School of Physics, Shandong University, Jinan, Shandong 250010, China.
authors.forename: Chun-Ming
authors.initials: CM
authors.lastname: Wang
authors.affiliation: Key Laboratory for Liquid-Solid Structural Evolution and Processing of Materials (Ministry of Education), Engineering Ceramics Key Laboratory of Shandong Province, School of Materials Science and Engineering, Shandong University, Jinan, Shandong 250061, China.
authors.forename: Jun
authors.initials: J
authors.lastname: Ouyang
keywords: 10.04; 20.11; 30.04; BaTiO3; domain; epitaxial films; magnetron sputtering; polydomain; self-assembly