title: 3D heterostructures and systems for novel MEMS/NEMS.
abstract: In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties.
authors.affiliation: Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia.
authors.forename: Victor
authors.initials: V
authors.lastname: Yakovlevich Prinz
authors.affiliation: Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia.
authors.forename: Vladimir
authors.initials: V
authors.lastname: Alexandrovich Seleznev
authors.affiliation: Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia.
authors.forename: Alexander
authors.initials: A
authors.lastname: Victorovich Prinz
authors.affiliation: Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia.
authors.forename: Alexander
authors.initials: A
authors.lastname: Vladimirovich Kopylov
keywords: MEMS/NEMS heterostructures; micro-electro-mechanical systems (MEMS); nano-electro-mechanical systems (NEMS)