title: SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods.
abstract: Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young's modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity tochanges in the environmental temperature and pH of the buffer solution. Moreover, weshow that the SU-8 cantilever surface can be functionalised directly with receptormolecules for analyte detection, thereby avoiding gold-thiol chemistry.
authors.affiliation: MIC - Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark. man@mic.dtu.dk.
authors.forename: Maria
authors.initials: M
authors.lastname: Nordström
authors.affiliation: MIC - Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark.
authors.forename: Stephan
authors.initials: S
authors.lastname: Keller
authors.affiliation: MIC - Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark.
authors.forename: Michael
authors.initials: M
authors.lastname: Lillemose
authors.affiliation: Now at PhotoSolar ApS, Denmark.
authors.forename: Alicia
authors.initials: A
authors.lastname: Johansson
authors.affiliation: MIC - Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark.
authors.forename: Søren
authors.initials: S
authors.lastname: Dohn
authors.affiliation: Now at HARTING Mitronics AG, Switzerland.
authors.forename: Daniel
authors.initials: D
authors.lastname: Haefliger
authors.affiliation: MIC - Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark.
authors.forename: Gabriela
authors.initials: G
authors.lastname: Blagoi
authors.affiliation: MIC - Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark.
authors.forename: Mogens
authors.initials: M
authors.lastname: Havsteen-Jakobsen
authors.affiliation: MIC - Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark.
authors.forename: Anja
authors.initials: A
authors.lastname: Boisen
keywords: SU-8; cantilever based sensing; label-free