title: Thermal-Performance Instability in Piezoresistive Sensors: Inducement and Improvement.
abstract: The field of piezoresistive sensors has been undergoing a significant revolution in terms of design methodology, material technology and micromachining process. However, the temperature dependence of sensor characteristics remains a hurdle to cross. This review focuses on the issues in thermal-performance instability of piezoresistive sensors. Based on the operation fundamental, inducements to the instability are investigated in detail and correspondingly available ameliorative methods are presented. Pros and cons of each improvement approach are also summarized. Though several schemes have been proposed and put into reality with favorable achievements, the schemes featuring simple implementation and excellent compatibility with existing techniques are still emergently demanded to construct a piezoresistive sensor with excellent comprehensive performance.
authors.affiliation: School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. liuy@xidian.edu.cn.|State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710054, China. liuy@xidian.edu.cn.
authors.forename: Yan
authors.initials: Y
authors.lastname: Liu
authors.affiliation: School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. wanghai@mail.xidian.edu.cn.
authors.forename: Hai
authors.initials: H
authors.lastname: Wang
authors.affiliation: School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. weizhao@xidian.edu.cn.
authors.forename: Wei
authors.initials: W
authors.lastname: Zhao
authors.affiliation: School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. qhb0920qhb@xidian.edu.cn.
authors.forename: Hongbo
authors.initials: H
authors.lastname: Qin
authors.affiliation: School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. fangxuan21@163.com.
authors.forename: Xuan
authors.initials: X
authors.lastname: Fang
keywords: improvement; inducement; piezoresistive sensor; thermal-performance instability