title: Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams.
abstract: Nanoelectromechanical devices, which can be used as nanotools in nanofactories, were fabricated by focused ion beam chemical vapor deposition (FIB-CVD). The devices are made of diamond-like carbon (DLC), deposited on a Si substrate using gasified phenanthrene (C14H10) as a carbon source. The Young modulus and density of the deposited DLC were measured as 190 GPa and 3.8 g cm-3, respectively. The work function was smaller for DLC (2.9 eV) than for W (4.7 eV) and Fe (5.2 eV) deposited by FIB-CVD. A nanomanipulator was manufactured by FIB-CVD and used for actual manipulations. A glass capillary based local field emitter was developed and produced as a tool for spot deposition, and its electron field emission was confirmed. FIB-CVD is proven as an efficient fabrication technology of novel nanoelectromechanical devices.
authors.affiliation: Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan.
authors.forename: Reo
authors.initials: R
authors.lastname: Kometani
authors.affiliation: Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan.
authors.forename: Sunao
authors.initials: S
authors.lastname: Ishihara
keywords: Rutherford backscattering spectroscopy-elastic recoil detection analysis (RBS/ERDA); Young's modulus; density; diamond-like carbon (DLC); electron energy loss spectroscopy (EELS); emitter; focused ion beam (FIB); manipulator; nanoelectromechanical device; nanotool; work function