title: Mid-infrared materials and devices on a Si platform for optical sensing.
abstract: In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNxwaveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.
authors.affiliation: Microphotonics Center, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
authors.forename: Vivek
authors.initials: V
authors.lastname: Singh
authors.affiliation: Microphotonics Center, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
authors.forename: Pao Tai
authors.initials: PT
authors.lastname: Lin
authors.affiliation: Microphotonics Center, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
authors.forename: Neil
authors.initials: N
authors.lastname: Patel
authors.affiliation: Department of Materials Science and Engineering, University of Delaware, Newark, DE 19716, USA.
authors.forename: Hongtao
authors.initials: H
authors.lastname: Lin
authors.affiliation: Department of Materials Science and Engineering, University of Delaware, Newark, DE 19716, USA.
authors.forename: Lan
authors.initials: L
authors.lastname: Li
authors.affiliation: Department of Materials Science and Engineering, University of Delaware, Newark, DE 19716, USA.
authors.forename: Yi
authors.initials: Y
authors.lastname: Zou
authors.affiliation: Department of Materials Science and Engineering, University of Delaware, Newark, DE 19716, USA.
authors.forename: Fei
authors.initials: F
authors.lastname: Deng
authors.affiliation: Department of Materials Science and Engineering, University of Delaware, Newark, DE 19716, USA.
authors.forename: Chaoying
authors.initials: C
authors.lastname: Ni
authors.affiliation: Department of Materials Science and Engineering, University of Delaware, Newark, DE 19716, USA.
authors.forename: Juejun
authors.initials: J
authors.lastname: Hu
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: James
authors.initials: J
authors.lastname: Giammarco
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: Anna Paola
authors.initials: AP
authors.lastname: Soliani
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: Bogdan
authors.initials: B
authors.lastname: Zdyrko
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: Igor
authors.initials: I
authors.lastname: Luzinov
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: Spencer
authors.initials: S
authors.lastname: Novak
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: Jackie
authors.initials: J
authors.lastname: Novak
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: Peter
authors.initials: P
authors.lastname: Wachtel
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: Sylvain
authors.initials: S
authors.lastname: Danto
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA.
authors.forename: J David
authors.initials: JD
authors.lastname: Musgraves
authors.affiliation: Department of Materials Science and Engineering, Clemson University, Clemson, SC 29634, USA; College of Optics and Photonics, CREOL, University of Central Florida, Orlando, FL 32816, USA.
authors.forename: Kathleen
authors.initials: K
authors.lastname: Richardson
authors.affiliation: Microphotonics Center, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
authors.forename: Lionel C
authors.initials: LC
authors.lastname: Kimerling
authors.affiliation: Microphotonics Center, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
authors.forename: Anuradha M
authors.initials: AM
authors.lastname: Agarwal
keywords: Chalcogenides; Lab-on-a-chip; Mid-infrared; Photodetectors; Photonic crystals; Polymer enrichment layers; Resonators; Waveguides