title: Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO2sensing.
abstract: Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO2sensing. In this planar Au/Al2O3/Au metasurface emitter, orthogonal rectangular Au patches are arrayed alternately and exhibit nearly perfect blackbody emission at 4.26 and 3.95μm necessary for CO2monitoring at the electric power reduced by 31%. The results demonstrate that metasurface infrared thermal emitters are almost ready for commercialization.
authors.affiliation: National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan.
authors.forename: Hideki T
authors.initials: HT
authors.lastname: Miyazaki
authors.affiliation: National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan.
authors.forename: Takeshi
authors.initials: T
authors.lastname: Kasaya
authors.affiliation: National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan.
authors.forename: Hirotaka
authors.initials: H
authors.lastname: Oosato
authors.affiliation: National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan.
authors.forename: Yoshimasa
authors.initials: Y
authors.lastname: Sugimoto
authors.affiliation: National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan.
authors.forename: Bongseok
authors.initials: B
authors.lastname: Choi
authors.affiliation: National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan.
authors.forename: Masanobu
authors.initials: M
authors.lastname: Iwanaga
authors.affiliation: National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan; University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8577, Japan.
authors.forename: Kazuaki
authors.initials: K
authors.lastname: Sakoda
keywords: infrared emitters; metamaterials; metasurfaces; thermal emission