title: Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting.
abstract: For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a preprocess, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels.
authors.affiliation: Department of Mechanical Engineering, University of Incheon, 177 Dohwa -Dong , Nam-Ku, Incheon, Democratic People's Republic of Korea. ddaeji@incheon.ac.kr.
authors.forename: Dae Jin
authors.initials: DJ
authors.lastname: Yun
authors.affiliation: Department of Mechanical Engineering, University of Incheon, 177 Dohwa -Dong , Nam-Ku, Incheon, Democratic People's Republic of Korea.
authors.forename: Tae Il
authors.initials: TI
authors.lastname: Seo
authors.affiliation: Department of Mechanical Engineering, University of Incheon, 177 Dohwa -Dong , Nam-Ku, Incheon, Democratic People's Republic of Korea. tiseo@incheon.ac.kr.
authors.forename: Dong Sam
authors.initials: DS
authors.lastname: Park
keywords: Biochip; Micro End-milling; Micro Fluidic Channel; Powder Blasting