title: EUV scatterometer with a high-harmonic-generation EUV source.
abstract: We have developed an extreme ultraviolet (EUV) scatterometer based on the analysis of coherent EUV light diffracted from a periodic array with nano-scale features. We discuss the choice of appropriate orders of the high harmonics generated coaxially along with the intense Ti:sapphire laser pulses for high resolution spatial performance. We describe an inverse-problem methodology for determining the structural parameters, and present preliminary measurement results confirming the functionality of the scatterometer. A rigorous coupled-wave analysis measurement algorithm was developed to extract accurately and quickly the relevant constitutive parameters from a measured diffraction pattern using a library-matching process.
authors.forename: Yi-Sha
authors.initials: YS
authors.lastname: Ku
authors.forename: Chia-Liang
authors.initials: CL
authors.lastname: Yeh
authors.forename: Yi-Chang
authors.initials: YC
authors.lastname: Chen
authors.forename: Chun-Wei
authors.initials: CW
authors.lastname: Lo
authors.forename: Wei-Ting
authors.initials: WT
authors.lastname: Wang
authors.forename: Ming-Chang
authors.initials: MC
authors.lastname: Chen