title: Focus on Novel Nanoelectromechanical 3D Structures: Fabrication and Properties.
authors.affiliation: Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan.
authors.forename: Shooji
authors.initials: S
authors.lastname: Yamada
authors.affiliation: NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan.
authors.forename: Hiroshi
authors.initials: H
authors.lastname: Yamaguchi
authors.affiliation: The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan.
authors.forename: Sunao
authors.initials: S
authors.lastname: Ishihara