title: A 3D tomographic EBSD analysis of a CVD diamond thin film.
abstract: We have studied the nucleation and growth processes in a chemical vapor deposition (CVD) diamond film using a tomographic electron backscattering diffraction method (3D EBSD). The approach is based on the combination of a focused ion beam (FIB) unit for serial sectioning in conjunction with high-resolution EBSD. Individual diamond grains were investigated in 3-dimensions particularly with regard to the role of twinning.
authors.affiliation: Max-Planck-Institut für Eisenforschung, Abteilung Mikrostrukturphysik und Umformtechnik, Max-Planck-Strasse 1, 40237 Düsseldorf, Germany.
authors.forename: Tao
authors.initials: T
authors.lastname: Liu
authors.affiliation: Max-Planck-Institut für Eisenforschung, Abteilung Mikrostrukturphysik und Umformtechnik, Max-Planck-Strasse 1, 40237 Düsseldorf, Germany.
authors.forename: Dierk
authors.initials: D
authors.lastname: Raabe
authors.affiliation: Max-Planck-Institut für Eisenforschung, Abteilung Mikrostrukturphysik und Umformtechnik, Max-Planck-Strasse 1, 40237 Düsseldorf, Germany.
authors.forename: Stefan
authors.initials: S
authors.lastname: Zaefferer
keywords: 3D EBSD; CVD diamond films; FIB; dislocation density; growth; nucleation; twinning