title: Mid-Infrared Tunable Resonant Cavity Enhanced Detectors.
abstract: Mid-infrared detectors that are sensitive only in a tunable narrow spectral band are presented. They are based on the Resonant Cavity Enhanced Detector (RCED) principle and employing a thin active region using IV-VI narrow gap semiconductor layers. A Fabry-Pérot cavity is formed by two mirrors. The active layer is grown onto one mirror, while the second mirror can be displaced. This changes the cavity length thus shifting the resonances where the detector is sensitive. Using electrostatically actuated MEMS micromirrors, a very compact tunable detector system has been fabricated. Mirror movements of more than 3 μm at 30V are obtained. With these mirrors, detectors with a wavelength tuning range of about 0.7 μm have been realized. Single detectors can be used in mid-infrared micro spectrometers, while a detector arrangement in an array makes it possible to realize Adaptive Focal Plane Arrays (AFPA).
authors.affiliation: Institute of Mechanical Systems, Department of Mechanical and Process Engineering, ETH Zurich. Center of Mechanics, Tannenstrasse 3, ETH Zentrum CLA J35, CH-8092 Zürich, Switzerland. niels.quack@imes.mavt.ethz.ch.
authors.forename: Niels
authors.initials: N
authors.lastname: Quack
authors.affiliation: Institute of Mechanical Systems, Department of Mechanical and Process Engineering, ETH Zurich. Center of Mechanics, Tannenstrasse 3, ETH Zentrum CLA J35, CH-8092 Zürich, Switzerland. stefan.blunier@imes.mavt.ethz.ch.
authors.forename: Stefan
authors.initials: S
authors.lastname: Blunier
authors.affiliation: Institute of Mechanical Systems, Department of Mechanical and Process Engineering, ETH Zurich. Center of Mechanics, Tannenstrasse 3, ETH Zentrum CLA J35, CH-8092 Zürich, Switzerland. dual@imes.mavt.ethz.ch.
authors.forename: Jurg
authors.initials: J
authors.lastname: Dual
authors.affiliation: Thin Film Physics Group, Technopark, ETH-Trakt PFA J25, Technoparkstrasse 1, CH-8005 Zürich, Switzerland. ffelder@phys.ethz.ch.
authors.forename: Ferdinand
authors.initials: F
authors.lastname: Felder
authors.affiliation: Thin Film Physics Group, Technopark, ETH-Trakt PFA J25, Technoparkstrasse 1, CH-8005 Zürich, Switzerland.
authors.forename: Martin
authors.initials: M
authors.lastname: Arnold
authors.affiliation: Thin Film Physics Group, Technopark, ETH-Trakt PFA J25, Technoparkstrasse 1, CH-8005 Zürich, Switzerland. zogg@phys.ethz.ch.
authors.forename: Hans
authors.initials: H
authors.lastname: Zogg
keywords: Fabry-Perot; MEMS; RCED; micro spectrometer; micromirror; mid infrared