title: Improvement of effective solid angle using virtual-pivot holder and large EDS detector.
abstract: This paper describes the effective solid angle improvement achieved using a large-area silicon drift detector together with a virtual-pivot double-tilt specimen holder. The virtual-pivot mechanism enables various designs of specimen-retaining and can reduce the shadowing effect. Energy-dispersive X-ray spectra were measured and converted into effective solid angles using different types of specimen holders and specimens. The investigated shadowing-free mechanical system yielded effective solid angles approaching the nominal solid angle of 0.464sr. In addition, we have demonstrated the availability of the plastic (polyetheretherketone) specimen holder for low system noise.
authors.affiliation: Electron Microscopy Group, Research Center for Advanced Measurement and Characterization, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan. Electronic address: koshiya.shogo@nims.go.jp.
authors.forename: Shogo
authors.initials: S
authors.lastname: Koshiya
authors.affiliation: Electron Microscopy Group, Research Center for Advanced Measurement and Characterization, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan. Electronic address: kimoto.koji@nims.go.jp.
authors.forename: Koji
authors.initials: K
authors.lastname: Kimoto
keywords: Energy-dispersive X-ray spectroscopy; Large solid angle; Silicon drift detector