title: A micro-scale plasma spectrometer for space and plasma edge applications (invited).
abstract: A plasma spectrometer design based on advances in lithography and microchip stacking technologies is described. A series of curved plate energy analyzers, with an integrated collimator, is etched into a silicon wafer. Tests of spectrometer elements, the energy analyzer and collimator, were performed with a 5 keV electron beam. The measured collimator transmission and energy selectivity were in good agreement with design targets. A single wafer element could be used as a plasma processing or fusion first wall diagnostic.
authors.affiliation: Department of Physics, West Virginia University, Morgantown, West Virginia 26506-6315, USA.
authors.forename: E E
authors.initials: EE
authors.lastname: Scime
authors.affiliation: Department of Physics, West Virginia University, Morgantown, West Virginia 26506-6315, USA.
authors.forename: A M
authors.initials: AM
authors.lastname: Keesee
authors.affiliation: Advanced Research Corporation, White Bear Lake, Minnesota 55110, USA.
authors.forename: M
authors.initials: M
authors.lastname: Dugas
authors.affiliation: Advanced Research Corporation, White Bear Lake, Minnesota 55110, USA.
authors.forename: S
authors.initials: S
authors.lastname: Ellison
authors.affiliation: Advanced Research Corporation, White Bear Lake, Minnesota 55110, USA.
authors.forename: J
authors.initials: J
authors.lastname: Tersteeg
authors.affiliation: Advanced Research Corporation, White Bear Lake, Minnesota 55110, USA.
authors.forename: G
authors.initials: G
authors.lastname: Wagner
authors.affiliation: NASA Goddard Space Flight Center, Greenbelt, Maryland 20771, USA.
authors.forename: A
authors.initials: A
authors.lastname: Barrie
authors.affiliation: NASA Goddard Space Flight Center, Greenbelt, Maryland 20771, USA.
authors.forename: A
authors.initials: A
authors.lastname: Rager
authors.affiliation: Department of Physics, West Virginia University, Morgantown, West Virginia 26506-6315, USA.
authors.forename: D
authors.initials: D
authors.lastname: Elliott