title: A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale.
abstract: An innovative experimental setup, PELIICAEN, allowing the modification of materials and the study of the effects induced by multiply charged ion beams at the nanoscale is presented. This ultra-high vacuum (below 5 × 10-10mbar) apparatus is equipped with a focused ion beam column using multiply charged ions and a scanning electron microscope developed by Orsay Physics, as well as a scanning probe microscope. The dual beam approach coupled to the scanning probe microscope achieves nanometer scale in situ topological analysis of the surface modifications induced by the ion beams. Preliminary results using the different on-line characterization techniques to study the formation of nano-hillocks on silicon and mica substrates are presented to illustrate the performances of the setup.
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: S
authors.initials: S
authors.lastname: Guillous
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: C
authors.initials: C
authors.lastname: Bourin
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: B
authors.initials: B
authors.lastname: Ban D'Etat
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: A
authors.initials: A
authors.lastname: Benyagoub
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: A
authors.initials: A
authors.lastname: Cassimi
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: C
authors.initials: C
authors.lastname: Feierstein
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: E
authors.initials: E
authors.lastname: Gardés
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: E
authors.initials: E
authors.lastname: Giglio
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: S
authors.initials: S
authors.lastname: Girard
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: C
authors.initials: C
authors.lastname: Grygiel
authors.affiliation: Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France.
authors.forename: A
authors.initials: A
authors.lastname: Houel
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: H
authors.initials: H
authors.lastname: Lebius
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: A
authors.initials: A
authors.lastname: Méry
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: I
authors.initials: I
authors.lastname: Monnet
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: J-M
authors.initials: JM
authors.lastname: Ramillon
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: J
authors.initials: J
authors.lastname: Rangama
authors.affiliation: CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
authors.forename: F
authors.initials: F
authors.lastname: Ropars
authors.affiliation: Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France.
authors.forename: E
authors.initials: E
authors.lastname: Verzeroli
authors.affiliation: Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France.
authors.forename: M
authors.initials: M
authors.lastname: Viteau
authors.affiliation: Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France.
authors.forename: A
authors.initials: A
authors.lastname: Delobbe