title: Controlled Synthesis of Atomically Layered Hexagonal Boron Nitride via Chemical Vapor Deposition.
abstract: Hexagonal boron nitrite (h-BN) is an attractive material for many applications including electronics as a complement to graphene, anti-oxidation coatings, light emitters, etc. However, the synthesis of high-quality h-BN is still a great challenge. In this work, via controlled chemical vapor deposition, we demonstrate the synthesis of h-BN films with a controlled thickness down to atomic layers. The quality of as-grown h-BN is confirmed by complementary characterizations including high-resolution transition electron microscopy, atomic force microscopy, Raman spectroscopy and X-ray photo-electron spectroscopy. This work will pave the way for production of large-scale and high-quality h-BN and its applications as well.
authors.affiliation: School of Geography and Environmental Sciences, Guizhou Normal University, Guizhou 550001, China. liujuanj@hotmail.com.
authors.forename: Juanjuan
authors.initials: J
authors.lastname: Liu
authors.affiliation: Center for Programmable Materials, School of Material Science and Engineering, Nanyang Technological University, Singapore 637798, Singapore. govindankuttyr90@gmail.com.
authors.forename: R Govindan
authors.initials: RG
authors.lastname: Kutty
authors.affiliation: Center for Programmable Materials, School of Material Science and Engineering, Nanyang Technological University, Singapore 637798, Singapore. z.liu@ntu.edu.sg.
authors.forename: Zheng
authors.initials: Z
authors.lastname: Liu
mesh_terms: D001896:Boron Compounds / Q000138:chemical synthesis* / Q000737:chemistry; D005740:Gases / Q000737:chemistry; D006108:Graphite / Q000737:chemistry; D006358:Hot Temperature; D008422:Materials Testing / Q000379:methods*; D018625:Microscopy, Atomic Force; D049329:Nanostructures / Q000737:chemistry*; D009532:Nickel / Q000737:chemistry*; D056951:Photoelectron Spectroscopy; D013059:Spectrum Analysis, Raman; D013499:Surface Properties
chemical_list: D001896:Boron Compounds; D005740:Gases; C017282:boron nitride; D006108:Graphite; D009532:Nickel
keywords: chemical vapor deposition; hexagonal boron nitride; synthesis