title: Piezoelectric polymer gated OFET: Cutting-edge electro-mechanical transducer for organic MEMS-based sensors.
abstract: The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to inorganic MEMS-based sensors have been the major concerns. In the present work, an organic MEMS sensor with a cutting-edge electro-mechanical transducer based on an active organic field effect transistor (OFET) has been demonstrated. Using poly(vinylidenefluoride/trifluoroethylene) (P(VDF-TrFE)) piezoelectric polymer as active gate dielectric in the transistor mounted on a polymeric micro-cantilever, unique electro-mechanical properties were observed. Such an advanced scheme enables highly efficient integrated electro-mechanical transduction for physical and chemical sensing applications. Record relative sensitivity over 600 in the low strain regime (<0.3%) was demonstrated, which represents a key-step for the development of highly sensitive all organic MEMS-based sensors.
authors.affiliation: Univ. Bordeaux, Laboratoire de l'Intégration du Matériau au Système, UMR 5218, ENSCBP, 16 avenue Pey Berland, 33607, Pessac Cedex, France.
authors.forename: Damien
authors.initials: D
authors.lastname: Thuau
authors.affiliation: Univ. Bordeaux, Laboratoire de l'Intégration du Matériau au Système, UMR 5218, ENSCBP, 16 avenue Pey Berland, 33607, Pessac Cedex, France.
authors.forename: Mamatimin
authors.initials: M
authors.lastname: Abbas
authors.affiliation: Univ. Bordeaux, Laboratoire de l'Intégration du Matériau au Système, UMR 5218, ENSCBP, 16 avenue Pey Berland, 33607, Pessac Cedex, France.
authors.forename: Guillaume
authors.initials: G
authors.lastname: Wantz
authors.affiliation: Univ. Bordeaux, Laboratoire de l'Intégration du Matériau au Système, UMR 5218, ENSCBP, 16 avenue Pey Berland, 33607, Pessac Cedex, France.
authors.forename: Lionel
authors.initials: L
authors.lastname: Hirsch
authors.affiliation: Univ. Bordeaux, Laboratoire de l'Intégration du Matériau au Système, UMR 5218, ENSCBP, 16 avenue Pey Berland, 33607, Pessac Cedex, France.
authors.forename: Isabelle
authors.initials: I
authors.lastname: Dufour
authors.affiliation: Univ. Bordeaux, Laboratoire de l'Intégration du Matériau au Système, UMR 5218, ENSCBP, 16 avenue Pey Berland, 33607, Pessac Cedex, France.
authors.forename: Cédric
authors.initials: C
authors.lastname: Ayela