title: Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition.
abstract: We report the design of a mobile setup for synchrotron based in situ studies during atomic layer processing. The system was designed to facilitate in situ grazing incidence small angle x-ray scattering (GISAXS), x-ray fluorescence (XRF), and x-ray absorption spectroscopy measurements at synchrotron facilities. The setup consists of a compact high vacuum pump-type reactor for atomic layer deposition (ALD). The presence of a remote radio frequency plasma source enables in situ experiments during both thermal as well as plasma-enhanced ALD. The system has been successfully installed at different beam line end stations at the European Synchrotron Radiation Facility and SOLEIL synchrotrons. Examples are discussed of in situ GISAXS and XRF measurements during thermal and plasma-enhanced ALD growth of ruthenium from RuO4(ToRuS™, Air Liquide) and H2or H2plasma, providing insights in the nucleation behavior of these processes.
authors.affiliation: Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
authors.forename: Jolien
authors.initials: J
authors.lastname: Dendooven
authors.affiliation: Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
authors.forename: Eduardo
authors.initials: E
authors.lastname: Solano
authors.affiliation: Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
authors.forename: Matthias M
authors.initials: MM
authors.lastname: Minjauw
authors.affiliation: Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
authors.forename: Kevin
authors.initials: K
authors.lastname: Van de Kerckhove
authors.affiliation: Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette, France.
authors.forename: Alessandro
authors.initials: A
authors.lastname: Coati
authors.affiliation: Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette, France.
authors.forename: Emiliano
authors.initials: E
authors.lastname: Fonda
authors.affiliation: DUBBLE Beamline BM26, ESRF European Synchrotron, Avenue des Martyrs, CS40220, 38043 Grenoble, France.
authors.forename: Giuseppe
authors.initials: G
authors.lastname: Portale
authors.affiliation: Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette, France.
authors.forename: Yves
authors.initials: Y
authors.lastname: Garreau
authors.affiliation: Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
authors.forename: Christophe
authors.initials: C
authors.lastname: Detavernier