title: Strong Influence of Humidity on Low-Temperature Thin-Film Fabrication via Metal Aqua Complex for High Performance Oxide Semiconductor Thin-Film Transistors.
abstract: Oxide semiconductors thin film transistors (OS TFTs) with good transparency and electrical performance have great potential for future display technology. In particular, solution-processed OS TFTs have been attracted much attention due to many advantages such as continuous, large scale, and low cost processability. Recently, OS TFTs fabricated with a metal aqua complex have been focused because they have low temperature processability for deposition on flexible substrate as well as high field-effect mobility for application of advanced display. However, despite some remarkable results, important factors to optimize their electrical performance with reproducibility and uniformity have not yet been achieved. Here, we newly introduce the strong effects of humidity to enhance the electrical performance of OS TFTs fabricated with the metal aqua complex. Through humidity control during the spin-coating process and annealing process, we successfully demonstrate solution-processed InOx/SiO2TFTs with a good electrical uniformity of ∼5% standard deviation, showing high average field-effect mobility of 2.76 cm2V-1s-1and 15.28 cm2V-1s-1fabricated at 200 and 250 °C, respectively. Also, on the basis of the systematic analyses, we demonstrate the mechanism for the change in electrical properties of InOxTFTs depending on the humidity control. Finally, on the basis of the mechanism, we extended the humidity control to the fabrication of the AlOxinsulator. Subsequently, we successfully achieved humidity-controlled InOx/AlOxTFTs fabricated at 200 °C showing high average field-effect mobility of 9.5 cm2V-1s-1.
authors.affiliation: Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University , 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea.
authors.forename: Keon-Hee
authors.initials: KH
authors.lastname: Lim
authors.affiliation: Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University , 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea.
authors.forename: Jae-Eun
authors.initials: JE
authors.lastname: Huh
authors.affiliation: Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University , 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea.
authors.forename: Jinwon
authors.initials: J
authors.lastname: Lee
authors.affiliation: Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University , 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea.
authors.forename: Nam-Kwang
authors.initials: NK
authors.lastname: Cho
authors.affiliation: Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University , 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea.
authors.forename: Jun-Woo
authors.initials: JW
authors.lastname: Park
authors.affiliation: Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University , 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea.
authors.forename: Bu-Il
authors.initials: BI
authors.lastname: Nam
authors.affiliation: Department of Aerospace and Mechanical Engineering, University of Notre Dame , Notre Dame, Indiana 46556, United States.
authors.forename: Eungkyu
authors.identifier: 0000-0002-0211-0727
authors.initials: E
authors.lastname: Lee
authors.affiliation: Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University , 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea.|Advanced Institute of Convergence Technology , 145 Gwanggyo-ro, Yeongtong-gu, Suwon 16229, Republic of Korea.
authors.forename: Youn Sang
authors.identifier: 0000-0002-4580-2037
authors.initials: YS
authors.lastname: Kim
keywords: aqueous solution process; low temperature process; metal aqua complex; oxide semiconductor; thin film transistor