title: Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements.
abstract: Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses <1 nm, is attainable by the combination of several analytical techniques. EUV and X-ray reflectance measurements, resonant EUV reflectance across the ScLedge, and X-ray standing wave fluorescence measurements were used. The parameters of the multilayer model were determinedviaa particle-swarm optimizer and validated using a Markov chain Monte Carlo maximum-likelihood approach. For the determination of the interface roughness, diffuse scattering measurements were conducted.
authors.affiliation: Physikalisch-Technische Bundesanstalt (PTB), Abbestrasse 2-12, 10587 Berlin, Germany.
authors.forename: Anton
authors.initials: A
authors.lastname: Haase
authors.affiliation: Photon Science, DESY, Notkestrasse 85, 22607 Hamburg, Germany.
authors.forename: Saša
authors.initials: S
authors.lastname: Bajt
authors.affiliation: Physikalisch-Technische Bundesanstalt (PTB), Abbestrasse 2-12, 10587 Berlin, Germany.
authors.forename: Philipp
authors.initials: P
authors.lastname: Hönicke
authors.affiliation: Physikalisch-Technische Bundesanstalt (PTB), Abbestrasse 2-12, 10587 Berlin, Germany.
authors.forename: Victor
authors.initials: V
authors.lastname: Soltwisch
authors.affiliation: Physikalisch-Technische Bundesanstalt (PTB), Abbestrasse 2-12, 10587 Berlin, Germany.
authors.forename: Frank
authors.initials: F
authors.lastname: Scholze
keywords: interdiffusion; metrology; multilayers; roughness; water window