title: Flexible Pressure Sensor with Ag Wrinkled Electrodes Based on PDMS Substrate.
abstract: Flexible pressure sensors are essential components of electronic skins for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics, robotic skins, and prosthetic limbs. Here we report a new kind of flexible pressure sensor. The sensors are capacitive, and composed of two Ag wrinkled electrodes separated by a carbon nanotubes (CNTs)/polydimethylsiloxane (PDMS) composite deformable dielectric layer. Ag wrinkled electrodes were formed by vacuum deposition on top of pre-strained and relaxed PDMS substrates which were treated using an O₂ plasma, a surface functionalization process, and a magnetron sputtering process. Ultimately, the developed sensor exhibits a maximum sensitivity of 19.80% kPa-1to capacitance, great durability over 500 cycles, and rapid mechanical responses (<200 ms). We also demonstrate that our sensor can be used to effectively detect the location and distribution of finger pressure.
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. zhaorui@nuc.edu.cn.
authors.forename: Jianli
authors.initials: J
authors.lastname: Cui
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. zhangbinzhen@nuc.edu.cn.
authors.forename: Binzhen
authors.initials: B
authors.lastname: Zhang
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. duanjunping@nuc.edu.cn.
authors.forename: Junping
authors.initials: J
authors.lastname: Duan
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. zhaorui2012@pku.edu.cn.
authors.forename: Hao
authors.initials: H
authors.lastname: Guo
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. tangjun@nuc.edu.cn.
authors.forename: Jun
authors.initials: J
authors.lastname: Tang
keywords: Ag wrinkled electrodes; carbon nanotube; flexible sensor; pressure sensor