title: Plasma Processing with Fluorine Chemistry for Modification of Surfaces Wettability.
abstract: Using plasma in conjunction with fluorinated compounds is widely encountered in material processing. We discuss several plasma techniques for surface fluorination: deposition of fluorocarbon thin films either by magnetron sputtering of polytetrafluoroethylene targets, or by plasma-assisted chemical vapor deposition using tetrafluoroethane as a precursor, and modification of carbon nanowalls by plasma treatment in a sulphur hexafluoride environment. We showed that conformal fluorinated thin films can be obtained and, according to the initial surface properties, superhydrophobic surfaces can be achieved.
authors.affiliation: National Institute for Lasers, Plasma and Radiation Physics, Atomistilor 409, Magurele-Bucharest, Ilfov 077125, Romania. veronica.satulu@infim.ro.
authors.forename: Veronica
authors.initials: V
authors.lastname: Satulu
authors.affiliation: National Institute for Lasers, Plasma and Radiation Physics, Atomistilor 409, Magurele-Bucharest, Ilfov 077125, Romania. daniela.ionita@infim.ro.
authors.forename: Maria Daniela
authors.initials: MD
authors.lastname: Ionita
authors.affiliation: National Institute for Lasers, Plasma and Radiation Physics, Atomistilor 409, Magurele-Bucharest, Ilfov 077125, Romania. s_vizi@infim.ro.
authors.forename: Sorin
authors.initials: S
authors.lastname: Vizireanu
authors.affiliation: National Institute for Lasers, Plasma and Radiation Physics, Atomistilor 409, Magurele-Bucharest, Ilfov 077125, Romania. mitub@infim.ro.
authors.forename: Bogdana
authors.initials: B
authors.lastname: Mitu
authors.affiliation: National Institute for Lasers, Plasma and Radiation Physics, Atomistilor 409, Magurele-Bucharest, Ilfov 077125, Romania. dinescug@infim.ro.
authors.forename: Gheorghe
authors.initials: G
authors.lastname: Dinescu
mesh_terms: D005461:Fluorine / Q000737:chemistry*; D057927:Hydrophobic and Hydrophilic Interactions; D008855:Microscopy, Electron, Scanning; D056951:Photoelectron Spectroscopy; D058626:Plasma Gases; D017550:Spectroscopy, Fourier Transform Infrared; D013499:Surface Properties; D017155:Wettability
chemical_list: D058626:Plasma Gases; D005461:Fluorine
keywords: fluorinated thin films; nanostructured surfaces; plasma processing; superhydrophobic surfaces