title: Spatial characterization of nanotextured surfaces by visual color imaging.
abstract: We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.
authors.forename: Nikolaj A
authors.initials: NA
authors.lastname: Feidenhans'l
authors.forename: Swathi
authors.initials: S
authors.lastname: Murthy
authors.forename: Morten H
authors.initials: MH
authors.lastname: Madsen
authors.forename: Jan C
authors.initials: JC
authors.lastname: Petersen
authors.forename: Rafael
authors.initials: R
authors.lastname: Taboryski