title: Toward Scalable Flexible Nanomanufacturing for Photonic Structures and Devices.
abstract: Continuous and scalable nanopatterning over flexible substrates is highly desirable for both commercial and scientific interests, but is difficult to realize with traditional photolithographic processes. The recent advancements in nanofabrication methodologies enable light management with photonic structures on flexible materials, providing an increasingly popular strategy to control the light harvesting in the optoelectronic devices of photovoltaics, and in organic and inorganic light-emitting diodes. Here, the current status of nanopatterning technologies for the fabrication of optoelectronic devices is summarized. Scalable nanopatterning technologies for nanomanufacturing on flexible materials are emphasized. Critical challenges in various patterning techniques when considering the resolution, scalability, processing throughput, and the use of masks and resists are addressed. The integration of flexible nanopatterned substrates with light manipulation in organic optoelectronic devices is also discussed; this enables the control of light flux and spectra. Finally, potential development directions are highlighted.
authors.affiliation: Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China.|College of Physics, Optoelectronics and Energy, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, China.
authors.forename: Wen
authors.initials: W
authors.lastname: Qiao
authors.affiliation: Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China.|College of Physics, Optoelectronics and Energy, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, China.
authors.forename: Wenbin
authors.initials: W
authors.lastname: Huang
authors.affiliation: Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China.|College of Physics, Optoelectronics and Energy, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, China.
authors.forename: Yanhua
authors.initials: Y
authors.lastname: Liu
authors.affiliation: Micro-/Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shanxi, 710049, China.
authors.forename: Xiangmin
authors.initials: X
authors.lastname: Li
authors.affiliation: Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China.|College of Physics, Optoelectronics and Energy, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, China.
authors.forename: Lin-Sen
authors.initials: LS
authors.lastname: Chen
authors.affiliation: Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China.|Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials & Devices, Soochow University, Suzhou, 215123, China.
authors.forename: Jian-Xin
authors.initials: JX
authors.lastname: Tang
keywords: flexible nanomanufacturing; light management; organic optoelectronics; photonic structures