title: Maskless wafer-level microfabrication of optical penetrating neural arrays out of soda-lime glass: Utah Optrode Array.
abstract: Borrowing from the wafer-level fabrication techniques of the Utah Electrode Array, an optical array capable of delivering light for neural optogenetic studies is presented in this paper: the Utah Optrode Array. Utah Optrode Arrays are micromachined out of sheet soda-lime-silica glass using standard backend processes of the semiconductor and microelectronics packaging industries such as precision diamond grinding and wet etching. 9 × 9 arrays with 1100μ m × 100μ m optrodes and a 500μ m back-plane are repeatably reproduced on 2i n wafers 169 arrays at a time. This paper describes the steps and some of the common errors of optrode fabrication.
authors.affiliation: Department of Electrical and Computer Engineering, University of Utah, 50 South Central Campus Dr., Room MEB 2110, Salt Lake City, UT, 84112, USA. r.boutte@utah.edu.
authors.forename: Ronald W
authors.initials: RW
authors.lastname: Boutte
authors.affiliation: Department of Electrical and Computer Engineering, University of Utah, 50 South Central Campus Dr., Room MEB 2110, Salt Lake City, UT, 84112, USA.
authors.forename: Steve
authors.initials: S
authors.lastname: Blair
mesh_terms: D017610:Calcium Compounds / Q000737:chemistry*; D005898:Glass / Q000737:chemistry*; D055616:Microtechnology / Q000295:instrumentation*; D009420:Nervous System; D062308:Optogenetics / Q000295:instrumentation*; D010087:Oxides / Q000737:chemistry*; D066330:Printing, Three-Dimensional; D012972:Sodium Hydroxide / Q000737:chemistry*
chemical_list: D017610:Calcium Compounds; D010087:Oxides; C004569:soda lime; D012972:Sodium Hydroxide
keywords: MEMS; Maskless; Microfabrication; Neurophotonics; Optogenetics; Utah optrode Array (UOA)