title: A High-Performance Nb Nano-Superconducting Quantum Interference Device with a Three-Dimensional Structure.
abstract: A superconducting quantum interference device (SQUID) miniaturized into the nanoscale is promising in the inductive detection of a single electron spin. A nano-SQUID with a strong spin coupling coefficient, a low flux noise, and a wide working magnetic field range is highly desired in a single spin resonance measurement. Nano-SQUIDs with Dayem bridge junctions excel in a high working field range and in the direct coupling from spins to the bridge. However, the common planar structure of nano-SQUIDs is known for problems such as a shallow flux modulation depth and a troublesome hysteresis in current-voltage curves. Here, we developed a fabrication process for creating three-dimensional (3-D) niobium (Nb) nano-SQUIDs with nanobridge junctions that can be tuned independently. Characterization of the device shows up to 45.9% modulation depth with a reversible current-voltage curve. Owning to the large modulation depth, the measured flux noise is as low as 0.34 μΦ0/Hz1/2. The working field range of the SQUID is greater than 0.5 T parallel to the SQUID plane. We believe that 3-D Nb nano-SQUIDs provide a promising step toward effective single-spin inductive detection.
authors.affiliation: Center for Excellence in Superconducting Electronics, State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences , Shanghai 200050, China.
authors.forename: Lei
authors.initials: L
authors.lastname: Chen
authors.affiliation: Center for Excellence in Superconducting Electronics, State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences , Shanghai 200050, China.|University of Chinese Academy of Sciences , Beijing 100049, China.
authors.forename: Hao
authors.initials: H
authors.lastname: Wang
authors.affiliation: Center for Excellence in Superconducting Electronics, State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences , Shanghai 200050, China.
authors.forename: Xiaoyu
authors.initials: X
authors.lastname: Liu
authors.affiliation: Center for Excellence in Superconducting Electronics, State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences , Shanghai 200050, China.|University of Chinese Academy of Sciences , Beijing 100049, China.
authors.forename: Long
authors.initials: L
authors.lastname: Wu
authors.affiliation: Center for Excellence in Superconducting Electronics, State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences , Shanghai 200050, China.|University of Chinese Academy of Sciences , Beijing 100049, China.|Shanghai Tech University , Shanghai Shi 200031, China.
authors.forename: Zhen
authors.initials: Z
authors.lastname: Wang
keywords: 3D nano-SQUID; flux modulation depth; flux noise; high magnetic field; on-chip spin detection