title: High-speed laser writing of arbitrary patterns in polar coordinate system.
abstract: In order to realize high-speed laser writing arbitrary patterns, we establish a set of high-speed polar coordinate laser writing system. Although the polar coordinate laser writing system is generally suitable for fabricating circular symmetric patterns, there are challenges when dealing with arbitrary patterns. Here, we propose an effective method to solve this problem by converting the pattern data from Cartesian coordinates to polar coordinates for high-speed laser writing of arbitrary patterns. Several types of arbitrary patterns are written on chalcogenide thin films with a minimum pattern linewidth of 700 ± 70 nm and a maximum writing speed of approximately 10 m/s, which corresponds to more than 600 mm2/min at 1.0 μm linewidth. This writing speed is ten times faster than that of the conventional x-y type Cartesian coordinate laser writing system.
authors.affiliation: Lab of High Density Optical Storage, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
authors.forename: Zhen
authors.initials: Z
authors.lastname: Bai
authors.affiliation: Lab of High Density Optical Storage, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
authors.forename: Jingsong
authors.initials: J
authors.lastname: Wei
authors.affiliation: Lab of High Density Optical Storage, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
authors.forename: Xin
authors.initials: X
authors.lastname: Liang
authors.affiliation: Lab of High Density Optical Storage, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
authors.forename: Kui
authors.initials: K
authors.lastname: Zhang
authors.affiliation: University of Chinese Academy of Sciences, Beijing 100049, China.
authors.forename: Tao
authors.initials: T
authors.lastname: Wei
authors.affiliation: Lab of High Density Optical Storage, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
authors.forename: Rui
authors.initials: R
authors.lastname: Wang