title: A new method of probing mechanical losses of coatings at cryogenic temperatures.
abstract: A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coating nowadays. The approach is demonstrated for chromium, chromium/gold, and multilayer tantala/silica coatings. The Ta2O5/SiO2coating has been found to exhibit a loss angle lower than 1.6 × 10-5near 30 MHz at 4 K. The results are compared to the previous measurements.
authors.affiliation: FEMTO-ST Institute, Univ. Bourgogne Franche-Conté, CNRS, ENSMM 25000 Besançon, France.
authors.forename: Serge
authors.initials: S
authors.lastname: Galliou
authors.affiliation: Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 75005 Paris, France.
authors.forename: Samuel
authors.initials: S
authors.lastname: Deléglise
authors.affiliation: ARC Centre of Excellence for Engineered Quantum Systems, University of Western Australia, 35 Stirling Highway, Crawley, WA 6009, Australia.
authors.forename: Maxim
authors.initials: M
authors.lastname: Goryachev
authors.affiliation: Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 75005 Paris, France.
authors.forename: Leonhard
authors.initials: L
authors.lastname: Neuhaus
authors.affiliation: Laboratoire des Matériaux Avancés, CNRS/IN2P3, 69622 Villeurbanne, France.
authors.forename: Gianpietro
authors.initials: G
authors.lastname: Cagnoli
authors.affiliation: Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 75005 Paris, France.
authors.forename: Salim
authors.initials: S
authors.lastname: Zerkani
authors.affiliation: Laboratoire des Matériaux Avancés, CNRS/IN2P3, 69622 Villeurbanne, France.
authors.forename: Vincent
authors.initials: V
authors.lastname: Dolique
authors.affiliation: FEMTO-ST Institute, Univ. Bourgogne Franche-Conté, CNRS, ENSMM 25000 Besançon, France.
authors.forename: Jérémy
authors.initials: J
authors.lastname: Bon
authors.affiliation: FEMTO-ST Institute, Univ. Bourgogne Franche-Conté, CNRS, ENSMM 25000 Besançon, France.
authors.forename: Xavier
authors.initials: X
authors.lastname: Vacheret
authors.affiliation: FEMTO-ST Institute, Univ. Bourgogne Franche-Conté, CNRS, ENSMM 25000 Besançon, France.
authors.forename: Philippe
authors.initials: P
authors.lastname: Abbé
authors.affiliation: Laboratoire des Matériaux Avancés, CNRS/IN2P3, 69622 Villeurbanne, France.
authors.forename: Laurent
authors.initials: L
authors.lastname: Pinard
authors.affiliation: Laboratoire des Matériaux Avancés, CNRS/IN2P3, 69622 Villeurbanne, France.
authors.forename: Christophe
authors.initials: C
authors.lastname: Michel
authors.affiliation: Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 75005 Paris, France.
authors.forename: Thibaut
authors.initials: T
authors.lastname: Karassouloff
authors.affiliation: Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 75005 Paris, France.
authors.forename: Tristan
authors.initials: T
authors.lastname: Briant
authors.affiliation: Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 75005 Paris, France.
authors.forename: Pierre-François
authors.initials: PF
authors.lastname: Cohadon
authors.affiliation: Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 75005 Paris, France.
authors.forename: Antoine
authors.initials: A
authors.lastname: Heidmann
authors.affiliation: ARC Centre of Excellence for Engineered Quantum Systems, University of Western Australia, 35 Stirling Highway, Crawley, WA 6009, Australia.
authors.forename: Michael E
authors.initials: ME
authors.lastname: Tobar
authors.affiliation: FEMTO-ST Institute, Univ. Bourgogne Franche-Conté, CNRS, ENSMM 25000 Besançon, France.
authors.forename: Roger
authors.initials: R
authors.lastname: Bourquin