title: Effect of Nb Doping on Chemical Sensing Performance of Two-Dimensional Layered MoSe2.
abstract: Here, we report that Nb doping of two-dimensional (2D) MoSe2layered nanomaterials is a promising approach to improve their gas sensing performance. In this study, Nb atoms were incorporated into a 2D MoSe2host matrix, and the Nb doping concentration could be precisely controlled by varying the number of Nb2O5deposition cycles in the plasma enhanced atomic layer deposition process. At relatively low Nb dopant concentrations, MoSe2showed enhanced device durability as well as NO2gas response, attributed to its small grains and stabilized grain boundaries. Meanwhile, an increase in the Nb doping concentration deteriorated the NO2gas response. This might be attributed to a considerable increase in the number of metallic NbSe2regions, which do not respond to gas molecules. This novel method of doping 2D transition metal dichalcogenide-based nanomaterials with metal atoms is a promising approach to improve the performance such as stability and gas response of 2D gas sensors.
authors.affiliation: Department of advanced Functional Thin Films, Surface Technology Division, Korea Institute of Materials Science (KIMS) , 797 Changwondaero, Sungsan-Gu, Changwon, Gyeongnam 51508, Republic of Korea.|School of Materials Science and Engineering, Pusan National University , 30 Jangjeon-Dong Geumjeong-Gu, Busan 46241, Republic of Korea.
authors.forename: Sun Young
authors.initials: SY
authors.lastname: Choi
authors.affiliation: Department of advanced Functional Thin Films, Surface Technology Division, Korea Institute of Materials Science (KIMS) , 797 Changwondaero, Sungsan-Gu, Changwon, Gyeongnam 51508, Republic of Korea.
authors.forename: Yonghun
authors.initials: Y
authors.lastname: Kim
authors.affiliation: Analytical Research Division, Korea Basic Science Institute , Jeonju, Jeollabuk-do, 54907, Republic of Korea.
authors.forename: Hee-Suk
authors.initials: HS
authors.lastname: Chung
authors.affiliation: Department of advanced Functional Thin Films, Surface Technology Division, Korea Institute of Materials Science (KIMS) , 797 Changwondaero, Sungsan-Gu, Changwon, Gyeongnam 51508, Republic of Korea.
authors.forename: Ah Ra
authors.initials: AR
authors.lastname: Kim
authors.affiliation: Department of advanced Functional Thin Films, Surface Technology Division, Korea Institute of Materials Science (KIMS) , 797 Changwondaero, Sungsan-Gu, Changwon, Gyeongnam 51508, Republic of Korea.
authors.forename: Jung-Dae
authors.initials: JD
authors.lastname: Kwon
authors.affiliation: Materials Characterization Center, Testing & Certification Division, Gumi Electronics & Information Technology Research Institute , Cheomdangieop 1-ro 17, Sangdong-myeon, Gumi, Gyeongbuk 39171, Republic of Korea.
authors.forename: Jucheol
authors.initials: J
authors.lastname: Park
authors.affiliation: Department of Mechanical and Industrial Engineering, Northeastern University , Boston, Massachusetts 02115, United States.
authors.forename: Young Lae
authors.initials: YL
authors.lastname: Kim
authors.affiliation: School of Materials Science and Engineering, Pusan National University , 30 Jangjeon-Dong Geumjeong-Gu, Busan 46241, Republic of Korea.
authors.forename: Se-Hun
authors.initials: SH
authors.lastname: Kwon
authors.affiliation: Department of Materials Science and Engineering, Inha University , 100 Inharo, Nam-Gu, Incheon 22212, Republic of Korea.
authors.forename: Myung Gwan
authors.initials: MG
authors.lastname: Hahm
authors.affiliation: Department of advanced Functional Thin Films, Surface Technology Division, Korea Institute of Materials Science (KIMS) , 797 Changwondaero, Sungsan-Gu, Changwon, Gyeongnam 51508, Republic of Korea.
authors.forename: Byungjin
authors.identifier: http://orcid.org/0000-0002-3885-8139
authors.initials: B
authors.lastname: Cho
keywords: Nb doping; chemical sensing; two-dimensional layered MoSe2