title: Second-generation hexavalent molybdenum oxo-amidinate precursors for atomic layer deposition.
abstract: The synthesis of molybdenum oxo-amidinate complexes MoO2(R2AMD)2[AMD = N,N'-di-R-acetamidinate; R = Cy (2; cyclohexyl) andiPr (3)], and their characterization by1H,13C NMR, X-ray diffraction, and thermogravimetric analysis is reported. Quartz-crystal microbalance and X-ray photoelectron spectroscopic studies confirm that 3 is an improved ALD precursor versus the R = t-butyl derivative for MoO3film growth. Complex 3 is accessible in higher yields (80%+), is easier to handle without mass loss, and in conjunction with O3as the second ALD reagent, yields nitride-free MoO3films.
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, USA. t-marks@northwestern.edu.
authors.forename: T
authors.initials: T
authors.lastname: Jurca
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, USA. t-marks@northwestern.edu.
authors.forename: A W
authors.initials: AW
authors.lastname: Peters
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, USA. t-marks@northwestern.edu.
authors.forename: A R
authors.initials: AR
authors.lastname: Mouat
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, USA. t-marks@northwestern.edu and Department of Chemistry, Faculty of Science, King Abdulaziz University, Jeddah 21589, Saudi Arabia.
authors.forename: O K
authors.initials: OK
authors.lastname: Farha
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, USA. t-marks@northwestern.edu.
authors.forename: J T
authors.initials: JT
authors.lastname: Hupp
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, USA. t-marks@northwestern.edu.
authors.forename: T L
authors.identifier: http://orcid.org/0000-0002-4899-2876
authors.initials: TL
authors.lastname: Lohr
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, USA. t-marks@northwestern.edu and Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439, USA. delferro@anl.gov.
authors.forename: M
authors.identifier: http://orcid.org/0000-0002-4443-165X
authors.initials: M
authors.lastname: Delferro
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, USA. t-marks@northwestern.edu.
authors.forename: T J
authors.identifier: http://orcid.org/0000-0001-8771-0141
authors.initials: TJ
authors.lastname: Marks