title: Neutron Depth Profiling: Overview and Description of NIST Facilities.
abstract: The Cold Neutron Depth Profiling (CNDP) instrument at the NIST Cold Neutron Research Facility (CNRF) is now operational. The neutron beam originates from a 16 L D2O ice cold source and passes through a filter of 135 mm of single crystal sapphire. The neutron energy spectrum may be described by a 65 K Maxwellian distribution. The sample chamber configuration allows for remote controlled scanning of 150 × 150 mm sample areas including the varying of both sample and detector angle. The improved sensitivity over the current thermal depth profiling instrument has permitted the first nondestructive measurements of17O profiles. This paper describes the CNDP instrument, illustrates the neutron depth profiling (NDP) technique with examples, and gives a separate bibliography of NDP publications.
authors.affiliation: National Institute of Standards and Technology, Gaithersburg, MD 20899.
authors.forename: R G
authors.initials: RG
authors.lastname: Downing
authors.affiliation: National Institute of Standards and Technology, Gaithersburg, MD 20899.
authors.forename: G P
authors.initials: GP
authors.lastname: Lamaze
authors.affiliation: National Institute of Standards and Technology, Gaithersburg, MD 20899.
authors.forename: J K
authors.initials: JK
authors.lastname: Langland
authors.affiliation: Korea Research Institute for Standards and Science, Taedok Science Town, Taejon, Korea 305-606.
authors.forename: S T
authors.initials: ST
authors.lastname: Hwang
keywords: NDP; boron; cold neutrons; lithium; neutron depth profiling; nitrogen; oxygen; silicon; surface analysis