title: Capillary-Driven Microfluidic Chips for Miniaturized Immunoassays: Efficient Fabrication and Sealing of Chips Using a "Chip-Olate" Process.
abstract: The fabrication of silicon-based microfluidic chips is invaluable in supporting the development of many microfluidic concepts for research in the life sciences and in vitro diagnostic applications such as the realization of miniaturized immunoassays using capillary-driven chips. While being extremely abundant, the literature covering microfluidic chip fabrication and assay development might not have addressed properly the challenge of fabricating microfluidic chips on a wafer level or the need for dicing wafers to release chips that need then to be further processed, cleaned, rinsed, and dried one by one. Here, we describe the "chip-olate" process wherein microfluidic structures are formed on a silicon wafer, followed by partial dicing, cleaning, and drying steps. Then, integration of reagents (if any) can be done, followed by lamination of a sealing cover. Breaking by hand the partially diced wafer yields individual chips ready for use.
authors.affiliation: IBM Research GmbH, Saumerstrasse 4, 8803, Rüschlikon, Switzerland.
authors.forename: Yuksel
authors.initials: Y
authors.lastname: Temiz
authors.affiliation: IBM Research GmbH, Saumerstrasse 4, 8803, Rüschlikon, Switzerland. emd@zurich.ibm.com.
authors.forename: Emmanuel
authors.initials: E
authors.lastname: Delamarche
mesh_terms: D004867:Equipment Design; D007118:Immunoassay / Q000295:instrumentation* / Q000379:methods*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods; D044085:Microfluidics / Q000295:instrumentation* / Q000379:methods
keywords: Capillary-driven flow; Chip singulation; Dry-film resist; Microfluidic chip fabrication; Sealing