title: Three-Dimensional Integration of Black Phosphorus Photodetector with Silicon Photonics and Nanoplasmonics.
abstract: We demonstrate the integration of a black phosphorus photodetector in a hybrid, three-dimensional architecture of silicon photonics and metallic nanoplasmonics structures. This integration approach combines the advantages of the low propagation loss of silicon waveguides, high-field confinement of a plasmonic nanogap, and the narrow bandgap of black phosphorus to achieve high responsivity for detection of telecom-band, near-infrared light. Benefiting from an ultrashort channel (∼60 nm) and near-field enhancement enabled by the nanogap structure, the photodetector shows an intrinsic responsivity as high as 10 A/W afforded by internal gain mechanisms, and a 3 dB roll-off frequency of 150 MHz. This device demonstrates a promising approach for on-chip integration of three distinctive photonic systems, which, as a generic platform, may lead to future nanophotonic applications for biosensing, nonlinear optics, and optical signal processing.
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.
authors.forename: Che
authors.initials: C
authors.lastname: Chen
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.
authors.forename: Nathan
authors.identifier: 0000-0003-2552-9376
authors.initials: N
authors.lastname: Youngblood
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.
authors.forename: Ruoming
authors.initials: R
authors.lastname: Peng
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.
authors.forename: Daehan
authors.initials: D
authors.lastname: Yoo
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.
authors.forename: Daniel A
authors.initials: DA
authors.lastname: Mohr
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.
authors.forename: Timothy W
authors.initials: TW
authors.lastname: Johnson
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.
authors.forename: Sang-Hyun
authors.identifier: 0000-0002-6992-5007
authors.initials: SH
authors.lastname: Oh
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.
authors.forename: Mo
authors.identifier: 0000-0002-5500-0900
authors.initials: M
authors.lastname: Li
keywords: Silicon photonics; black phosphorus; extraordinary optical transmission; nanogap; photodetector; plasmonics