title: An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology.
abstract: The injection and ionization of volatile organic compounds (VOA) by an integrated chip is experimentally analyzed in this paper. The integrated chip consists of a needle-to-cylinder electrode mounting on the Polymethyl Methacrylate (PMMA) substrate. The needle-to-cylinder electrode is designed and fabricated by Lithographie, Galvanoformung and Abformung (LIGA) technology. In this paper, the needle is connected to a negative power supply of -5 kV and used as the cathode; the cylinder electrodes are composed of two arrays of cylinders and serve as the anode. The ionic wind is produced based on corona and glow discharges of needle-to-cylinder electrodes. The experimental setup is designed to observe the properties of the needle-to-cylinder discharge and prove its functions as an ion source and air pump. In summary, the main results are as follows: (1) the ionic wind velocity produced by the chip is about 0.79 m/s at an applied voltage of -3300 V; (2) acetic acid and ammonia water can be injected through the chip, which is proved by pH test paper; and (3) the current measured by a Faraday cup is about 10 pA for acetic acid and ammonia with an applied voltage of -3185 V. The integrated chip is promising for portable analytical instruments, such as ion mobility spectrometry (IMS), field asymmetric ion mobility spectrometry (FAIMS), and mass spectrometry (MS).
authors.affiliation: School of Life and Environmental Sciences, Guilin University of Electronic Technology, Guilin 541004, China. lihua@guet.edu.cn.|Guangxi Experiment Center of Information Science, Guilin 541004, China. lihua@guet.edu.cn.
authors.forename: Hua
authors.initials: H
authors.lastname: Li
authors.affiliation: School of Life and Environmental Sciences, Guilin University of Electronic Technology, Guilin 541004, China. longxingzu@126.com.
authors.forename: Linxiu
authors.initials: L
authors.lastname: Jiang
authors.affiliation: School of Life and Environmental Sciences, Guilin University of Electronic Technology, Guilin 541004, China. woshizhu.123@163.com.
authors.forename: Chaoqun
authors.initials: C
authors.lastname: Guo
authors.affiliation: School of Life and Environmental Sciences, Guilin University of Electronic Technology, Guilin 541004, China. 15107429521@163.com.
authors.forename: Jianmin
authors.initials: J
authors.lastname: Zhu
authors.affiliation: School of Life and Environmental Sciences, Guilin University of Electronic Technology, Guilin 541004, China. zhangwei@guet.edu.cn.
authors.forename: Yongrong
authors.initials: Y
authors.lastname: Jiang
authors.affiliation: School of Life and Environmental Sciences, Guilin University of Electronic Technology, Guilin 541004, China. Livia_zw@163.com.
authors.forename: Zhencheng
authors.initials: Z
authors.lastname: Chen
keywords: LIGA; air pump; ion source; ionic wind; needle-to-cylinder