title: Focused electron beam based direct-write fabrication of graphene and amorphous carbon from oxo-functionalized graphene on silicon dioxide.
abstract: Controlled patterning of graphene is an important task towards device fabrication and thus is the focus of current research activities. Graphene oxide (GO) is a solution-processible precursor of graphene. It can be patterned by thermal processing. However, thermal processing of GO leads to decomposition and CO2formation. Alternatively, focused electron beam induced processing (FEBIP) techniques can be used to pattern graphene with high spatial resolution. Based on this approach, we explore FEBIP of GO deposited on SiO2. Using oxo-functionalized graphene (oxo-G) with an in-plane lattice defect density of 1% we are able to image the electron beam-induced effects by scanning Raman microscopy for the first time. Depending on electron energy (2-30 keV) and doses (50-800 mC m-2) either reduction of GO or formation of permanent lattice defects occurs. This result reflects a step towards controlled FEBIP processing of oxo-G.
authors.affiliation: Department of Chemistry and Chemical Engineering, Chalmers University of Technology, Kemivägen 10, 41258 Göteborg, Sweden.
authors.forename: Severin
authors.initials: S
authors.lastname: Schindler
authors.affiliation: Department of Chemistry and Pharmacy, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Egerlandstraße 1, 91058 Erlangen, Germany. christian.papp@fau.de.
authors.forename: Florian
authors.initials: F
authors.lastname: Vollnhals
authors.affiliation: Department of Chemistry and Pharmacy and Institute of Advanced Materials and Processes (ZMP), Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Dr.-Mack Str. 81, 90762 Fürth, Germany.
authors.forename: Christian E
authors.initials: CE
authors.lastname: Halbig
authors.affiliation: Department of Chemistry and Pharmacy, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Egerlandstraße 1, 91058 Erlangen, Germany. christian.papp@fau.de.
authors.forename: Hubertus
authors.initials: H
authors.lastname: Marbach
authors.affiliation: Department of Chemistry and Pharmacy, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Egerlandstraße 1, 91058 Erlangen, Germany. christian.papp@fau.de.
authors.forename: Hans-Peter
authors.initials: HP
authors.lastname: Steinrück
authors.affiliation: Department of Chemistry and Pharmacy, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Egerlandstraße 1, 91058 Erlangen, Germany. christian.papp@fau.de.
authors.forename: Christian
authors.initials: C
authors.lastname: Papp
authors.affiliation: Freie Universität Berlin, Institute of Chemistry and Pharmacy, Takustraße 3, 14195 Berlin, Germany. Siegfried.eigler@fu-berlin.de and Department of Chemistry and Pharmacy and Institute of Advanced Materials and Processes (ZMP), Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Dr.-Mack Str. 81, 90762 Fürth, Germany and Department of Chemistry and Chemical Engineering, Chalmers University of Technology, Kemivägen 10, 41258 Göteborg, Sweden.
authors.forename: Siegfried
authors.identifier: http://orcid.org/0000-0002-0536-8256
authors.initials: S
authors.lastname: Eigler