title: Selective-area growth of periodic nanopyramid light-emitting diode arrays on GaN/sapphire templates patterned by multiple-exposure colloidal lithography.
abstract: Gallium nitride-based nanopyramid light-emitting diodes are a promising technology to achieve highly efficient solid-state lighting and beyond. Here, periodic nanopyramid light-emitting diode arrays on gallium nitride/sapphire templates were fabricated by selective-area metalorganic chemical vapor deposition and multiple-exposure colloidal lithography. The electric field intensity distribution of incident light going through polystyrene microspheres and photoresist are simulated using finite-different time-domain method. Nitrogen as the carrier gas and a low V/III ratio (ratio of molar flow rate of group-V to group-III sources) are found to be important in order to form gallium nitride nanopyramid. In addition, a broad yellow emission in photoluminescence and cathodoluminescence spectra were observed. This phenomena showed the potential of nanopyramid light-emitting diodes to realize long wavelength visible emissions.
authors.affiliation: State Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, People's Republic of China. Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, People's Republic of China. Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, People's Republic of China.
authors.forename: Zhuo
authors.initials: Z
authors.lastname: Xiong
authors.forename: Tongbo
authors.initials: T
authors.lastname: Wei
authors.forename: Yonghui
authors.initials: Y
authors.lastname: Zhang
authors.forename: Xiang
authors.initials: X
authors.lastname: Zhang
authors.forename: Chao
authors.initials: C
authors.lastname: Yang
authors.forename: Zhiqiang
authors.initials: Z
authors.lastname: Liu
authors.forename: Guodong
authors.initials: G
authors.lastname: Yuan
authors.forename: Jinmin
authors.initials: J
authors.lastname: Li
authors.forename: Junxi
authors.initials: J
authors.lastname: Wang