title: Laboratory Setup for Scanning-Free Grazing Emission X-ray Fluorescence.
abstract: Grazing incidence and grazing emission X-ray fluorescence spectroscopy (GI/GE-XRF) are techniques that enable nondestructive, quantitative analysis of elemental depth profiles with a resolution in the nanometer regime. A laboratory setup for soft X-ray GEXRF measurements is presented. Reasonable measurement times could be achieved by combining a highly brilliant laser produced plasma (LPP) source with a scanning-free GEXRF setup, providing a large solid angle of detection. The detector, a pnCCD, was operated in a single photon counting mode in order to utilize its energy dispersive properties. GEXRF profiles of the Ni-Lα,βline of a nickel-carbon multilayer sample, which displays a lateral (bi)layer thickness gradient, were recorded at several positions. Simulations of theoretical profiles predicted a prominent intensity minimum at grazing emission angles between 5° and 12°, depending strongly on the bilayer thickness of the sample. This information was used to retrieve the bilayer thickness gradient. The results are in good agreement with values obtained by X-ray reflectometry, conventional X-ray fluorescence and transmission electron microscopy measurements and serve as proof-of-principle for the realized GEXRF setup. The presented work demonstrates the potential of nanometer resolved elemental depth profiling in the soft X-ray range with a laboratory source, opening, for example, the possibility of in-line or even in situ process control in semiconductor industry.
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.|Humboldt University of Berlin , School of Analytical Sciences Adlershof (IRIS-Building), Unter den Linden 6, D-10099 Berlin, Germany.
authors.forename: J
authors.identifier: 0000-0002-1085-9527
authors.initials: J
authors.lastname: Baumann
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: C
authors.initials: C
authors.lastname: Herzog
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: M
authors.initials: M
authors.lastname: Spanier
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: D
authors.initials: D
authors.lastname: Grötzsch
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: L
authors.initials: L
authors.lastname: Lühl
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: K
authors.initials: K
authors.lastname: Witte
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: A
authors.initials: A
authors.lastname: Jonas
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: S
authors.initials: S
authors.lastname: Günther
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: F
authors.initials: F
authors.lastname: Förste
authors.affiliation: PNSensor GmbH , Otto-Hahn-Ring 6, D-81739 München, Germany.
authors.forename: R
authors.initials: R
authors.lastname: Hartmann
authors.affiliation: PNSensor GmbH , Otto-Hahn-Ring 6, D-81739 München, Germany.
authors.forename: M
authors.initials: M
authors.lastname: Huth
authors.affiliation: PNSensor GmbH , Otto-Hahn-Ring 6, D-81739 München, Germany.
authors.forename: D
authors.initials: D
authors.lastname: Kalok
authors.affiliation: PNSensor GmbH , Otto-Hahn-Ring 6, D-81739 München, Germany.
authors.forename: D
authors.initials: D
authors.lastname: Steigenhöfer
authors.affiliation: AXO DRESDEN GmbH , Gasanstaltstraße 8b, D-01237 Dresden, Germany.
authors.forename: M
authors.initials: M
authors.lastname: Krämer
authors.affiliation: AXO DRESDEN GmbH , Gasanstaltstraße 8b, D-01237 Dresden, Germany.
authors.forename: T
authors.initials: T
authors.lastname: Holz
authors.affiliation: AXO DRESDEN GmbH , Gasanstaltstraße 8b, D-01237 Dresden, Germany.
authors.forename: R
authors.initials: R
authors.lastname: Dietsch
authors.affiliation: PNSensor GmbH , Otto-Hahn-Ring 6, D-81739 München, Germany.|University of Siegen , Department of Physics, Walter-Flex-Straße 3, D-57068 Siegen, Germany.
authors.forename: L
authors.initials: L
authors.lastname: Strüder
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: B
authors.initials: B
authors.lastname: Kanngießer
authors.affiliation: Technical University of Berlin , Institute of Optics and Atomic Physics, Hardenbergstraße 36, D-10587 Berlin, Germany.
authors.forename: I
authors.initials: I
authors.lastname: Mantouvalou