title: Effect of crystal plane orientation on tribochemical removal of monocrystalline silicon.
abstract: The effect of crystal plane orientation on tribochemical removal of monocrystalline silicon was investigated using an atomic force microscope. Experimental results indicated that the tribochemical removal of silicon by SiO2microsphere presented strong crystallography-induced anisotropy. Further analysis suggested that such anisotropic tribochemical removal of silicon was not dependent on the crystallography-dependent surface mechanical properties (i.e., hardness and elastic modulus), but was mainly attributed to various atomic planar density and interplanar spacing in different crystal planes. Phenomenological results speculated that higher density of silicon atom could promote the formation of Si-O-Si bonds between the SiO2microsphere and silicon substrate, resulting in more severe tribochemical material removal. Larger interplanar spacing with smaller energy barrier facilitated the rupture of the Si-Si network with the help of mechanical shearing stress, which caused more serious wear of the silicon surface. The results may help understand the material removal mechanism of silicon and provide useful knowledge for chemical mechanical polishing.
authors.affiliation: Tribology Research Institute, National Traction Power Laboratory, Southwest Jiaotong University, Chengdu 610031, Sichuan Province, P. R. China.
authors.forename: Chen
authors.initials: C
authors.lastname: Xiao
authors.affiliation: Tribology Research Institute, National Traction Power Laboratory, Southwest Jiaotong University, Chengdu 610031, Sichuan Province, P. R. China.|School of Mechatronics Engineering, University of Electronic Science and Technology of China, Chengdu 611731, Sichuan Province, P. R. China.
authors.forename: Jian
authors.initials: J
authors.lastname: Guo
authors.affiliation: Tribology Research Institute, National Traction Power Laboratory, Southwest Jiaotong University, Chengdu 610031, Sichuan Province, P. R. China.
authors.forename: Peng
authors.initials: P
authors.lastname: Zhang
authors.affiliation: Tribology Research Institute, National Traction Power Laboratory, Southwest Jiaotong University, Chengdu 610031, Sichuan Province, P. R. China.
authors.forename: Cheng
authors.initials: C
authors.lastname: Chen
authors.affiliation: Tribology Research Institute, National Traction Power Laboratory, Southwest Jiaotong University, Chengdu 610031, Sichuan Province, P. R. China.
authors.forename: Lei
authors.initials: L
authors.lastname: Chen
authors.affiliation: Tribology Research Institute, National Traction Power Laboratory, Southwest Jiaotong University, Chengdu 610031, Sichuan Province, P. R. China.
authors.forename: Linmao
authors.initials: L
authors.lastname: Qian