title: Optimising electron microscopy experiment through electron optics simulation.
abstract: We developed a new type of electron trajectories simulation inside a complete model of a modern transmission electron microscope (TEM). Our model incorporates the precise and real design of each element constituting a TEM, i.e. the field emission (FE) cathode, the extraction optic and acceleration stages of a 300kV cold field emission gun, the illumination lenses, the objective lens, the intermediate and projection lenses. Full trajectories can be computed using magnetically saturated or non-saturated round lenses, magnetic deflectors and even non-cylindrical symmetry elements like electrostatic biprism. This multi-scale model gathers nanometer size components (FE tip) with parts of meter length (illumination and projection systems). We demonstrate that non-trivial TEM experiments requiring specific and complex optical configurations can be simulated and optimized prior to any experiment using such model. We show that all the currents set in all optical elements of the simulated column can be implemented in the real column (I2TEM in CEMES) and used as starting alignment for the requested experiment. We argue that the combination of such complete electron trajectory simulations in the whole TEM column with automatic optimization of the microscope parameters for optimal experimental data (images, diffraction, spectra) allows drastically simplifying the implementation of complex experiments in TEM and will facilitate the development of advanced use of the electron microscope in the near future.
authors.affiliation: CEMES-CNRS, 29 Rue Jeanne Marvig, 31055 Toulouse France; Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Kubo
authors.affiliation: CEMES-CNRS, 29 Rue Jeanne Marvig, 31055 Toulouse France.
authors.forename: C
authors.initials: C
authors.lastname: Gatel
authors.affiliation: CEMES-CNRS, 29 Rue Jeanne Marvig, 31055 Toulouse France.
authors.forename: E
authors.initials: E
authors.lastname: Snoeck
authors.affiliation: CEMES-CNRS, 29 Rue Jeanne Marvig, 31055 Toulouse France. Electronic address: florent.houdellier@cemes.fr.
authors.forename: F
authors.initials: F
authors.lastname: Houdellier