title: Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
abstract: Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.
authors.affiliation: Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. chent@suda.edu.cn.
authors.forename: Tao
authors.initials: T
authors.lastname: Chen
authors.affiliation: Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. 20154229003@stu.suda.edu.cn.
authors.forename: Yaqiong
authors.initials: Y
authors.lastname: Wang
authors.affiliation: Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. hcliu078@suda.edu.cn.
authors.forename: Huicong
authors.initials: H
authors.lastname: Liu
authors.affiliation: Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. yangzhan@suda.edu.cn.
authors.forename: Zhan
authors.initials: Z
authors.lastname: Yang
authors.affiliation: Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. pbwang@suda.edu.cn.
authors.forename: Pengbo
authors.initials: P
authors.lastname: Wang
authors.affiliation: Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. lnsun@hit.edu.cn.
authors.forename: Lining
authors.initials: L
authors.lastname: Sun
keywords: comb sensor; multi-objective topological optimization; nano-positioning stage