title: Wafer-scale integration of sacrificial nanofluidic chips for detecting and manipulating single DNA molecules.
abstract: Wafer-scale fabrication of complex nanofluidic systems with integrated electronics is essential to realizing ubiquitous, compact, reliable, high-sensitivity and low-cost biomolecular sensors. Here we report a scalable fabrication strategy capable of producing nanofluidic chips with complex designs and down to single-digit nanometre dimensions over 200 mm wafer scale. Compatible with semiconductor industry standard complementary metal-oxide semiconductor logic circuit fabrication processes, this strategy extracts a patterned sacrificial silicon layer through hundreds of millions of nanoscale vent holes on each chip by gas-phase Xenon difluoride etching. Using single-molecule fluorescence imaging, we demonstrate these sacrificial nanofluidic chips can function to controllably and completely stretch lambda DNA in a two-dimensional nanofluidic network comprising channels and pillars. The flexible nanofluidic structure design, wafer-scale fabrication, single-digit nanometre channels, reliable fluidic sealing and low thermal budget make our strategy a potentially universal approach to integrating functional planar nanofluidic systems with logic circuits for lab-on-a-chip applications.
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.|School of Electrical, Computer and Energy Engineering, and Biodesign Center for Molecular Design &Biomimetics, Arizona State University, Tempe, Arizona 85287, USA.
authors.forename: Chao
authors.initials: C
authors.lastname: Wang
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Sung-Wook
authors.initials: SW
authors.lastname: Nam
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: John M
authors.initials: JM
authors.lastname: Cotte
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Christopher V
authors.initials: CV
authors.lastname: Jahnes
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Evan G
authors.initials: EG
authors.lastname: Colgan
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Robert L
authors.initials: RL
authors.lastname: Bruce
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Markus
authors.initials: M
authors.lastname: Brink
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Michael F
authors.initials: MF
authors.lastname: Lofaro
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Jyotica V
authors.initials: JV
authors.lastname: Patel
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Lynne M
authors.initials: LM
authors.lastname: Gignac
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Eric A
authors.initials: EA
authors.lastname: Joseph
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Satyavolu Papa
authors.initials: SP
authors.lastname: Rao
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.|Department of Genetics and Genomics Sciences, Icahn School of Medicine at Mount Sinai, New York, New York 10029, USA.
authors.forename: Gustavo
authors.initials: G
authors.lastname: Stolovitzky
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Stanislav
authors.initials: S
authors.lastname: Polonsky
authors.affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Road, PO Box 218, Yorktown Heights, New York 10598, USA.
authors.forename: Qinghuang
authors.identifier: 0000-0001-5759-5832
authors.initials: Q
authors.lastname: Lin
mesh_terms: D004247:DNA / Q000737:chemistry*; D004867:Equipment Design; D056656:Lab-On-A-Chip Devices; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D012822:Silicon Dioxide
chemical_list: D012822:Silicon Dioxide; D004247:DNA