title: Data of ALD Al2O3rear surface passivation, Al2O3PERC cell performance, and cell efficiency loss mechanisms of Al2O3PERC cell.
abstract: This data article is related to the recently published article '20.8% industrial PERC solar cell: ALD Al2O3rear surface passivation, efficiency loss mechanisms analysis and roadmap to 24%' (Huang et al., 2017) [1]. This paper is about passivated emitter and rear cell (PERC) structures and it describes the quality of the Al2O3rear-surface passivation layer deposited by atomic layer deposition (ALD), in relation to the processing parameters (e.g. pre-clean treatment, deposition temperature, growth per cycle, and film thickness) and to the cell efficiency loss mechanisms. This dataset is made public in order to contribute to the limited available public data on industrial PERC cells, to be used by other researchers.
authors.affiliation: China Sunergy, No.123. Focheng West Road, Jiangning Zone, Nanjing, Jiangsu 211100, China; Aalto University, Department of Micro and Nanosciences, Tietotie 3, Espoo 02150, Finland.
authors.forename: Haibing
authors.initials: H
authors.lastname: Huang
authors.affiliation: China Sunergy, No.123. Focheng West Road, Jiangning Zone, Nanjing, Jiangsu 211100, China.
authors.forename: Jun
authors.initials: J
authors.lastname: Lv
authors.affiliation: Aalto University, Department of Micro and Nanosciences, Tietotie 3, Espoo 02150, Finland.
authors.forename: Yameng
authors.initials: Y
authors.lastname: Bao
authors.affiliation: China Sunergy, No.123. Focheng West Road, Jiangning Zone, Nanjing, Jiangsu 211100, China.
authors.forename: Rongwei
authors.initials: R
authors.lastname: Xuan
authors.affiliation: China Sunergy, No.123. Focheng West Road, Jiangning Zone, Nanjing, Jiangsu 211100, China.
authors.forename: Shenghua
authors.initials: S
authors.lastname: Sun
authors.affiliation: Beneq Oy, P.O. Box 262, Vantaa 01511 , Finland.
authors.forename: Sami
authors.initials: S
authors.lastname: Sneck
authors.affiliation: Aalto University, Department of Micro and Nanosciences, Tietotie 3, Espoo 02150, Finland.
authors.forename: Shuo
authors.initials: S
authors.lastname: Li
authors.affiliation: Aalto University, Department of Micro and Nanosciences, Tietotie 3, Espoo 02150, Finland.
authors.forename: Chiara
authors.initials: C
authors.lastname: Modanese
authors.affiliation: Aalto University, Department of Micro and Nanosciences, Tietotie 3, Espoo 02150, Finland.
authors.forename: Hele
authors.initials: H
authors.lastname: Savin
authors.affiliation: China Sunergy, No.123. Focheng West Road, Jiangning Zone, Nanjing, Jiangsu 211100, China.
authors.forename: Aihua
authors.initials: A
authors.lastname: Wang
authors.affiliation: China Sunergy, No.123. Focheng West Road, Jiangning Zone, Nanjing, Jiangsu 211100, China.
authors.forename: Jianhua
authors.initials: J
authors.lastname: Zhao