title: Obtaining and doping of InAs-QD/GaAs(001) nanostructures by ion beam sputtering.
abstract: The features of InAs quantum dots obtained on GaAs(001) single-crystal substrates by ion-beam sputtering were investigated. It has been shown that in the range of ion energies of 150 to 200 eV at a temperature of 500 °C and a beam current of 120 µA InAs quantum dots with average dimensions below 15 nm and a surface density of 1011cm-2are formed. The technique of controlled doping of InAs/GaAs nanostructures using a SnTe solid-state source was proposed. It has been established that a maximum donor concentration of 8.7·1018cm-3in the GaAs spacer layer is reached at an evaporation temperature of 415 °С. At the same time, impurity accumulation in the growth direction was observed. We have shown that increasing the impurity doping of the GaAs barrier layer increases the intensity of photoluminescence peaks of the ground state and the first excited state of the InAs quantum dots.
authors.affiliation: Department of Physics and Electronics, Platov South-Russian State Polytechnic University (NPI), 346428, 132, Prosveshchenia str., Novocherkassk, Russia; Department of Nanotechnology and Solar Energy, Southern Scientific Center of Russian Academy of Sciences, 344006, 41, Chekhov Avenue, Rostov-on-Don, Russia.
authors.forename: Sergei N
authors.initials: SN
authors.lastname: Chebotarev
authors.affiliation: Department of Nanotechnology and Solar Energy, Southern Scientific Center of Russian Academy of Sciences, 344006, 41, Chekhov Avenue, Rostov-on-Don, Russia.
authors.forename: Alexander S
authors.initials: AS
authors.lastname: Pashchenko
authors.affiliation: Department of Nanotechnology and Solar Energy, Southern Scientific Center of Russian Academy of Sciences, 344006, 41, Chekhov Avenue, Rostov-on-Don, Russia.
authors.forename: Leonid S
authors.initials: LS
authors.lastname: Lunin
authors.affiliation: Department of Physics and Electronics, Platov South-Russian State Polytechnic University (NPI), 346428, 132, Prosveshchenia str., Novocherkassk, Russia.
authors.forename: Elena N
authors.initials: EN
authors.lastname: Zhivotova
authors.affiliation: Department of Physics and Electronics, Platov South-Russian State Polytechnic University (NPI), 346428, 132, Prosveshchenia str., Novocherkassk, Russia.
authors.forename: Georgy A
authors.initials: GA
authors.lastname: Erimeev
authors.affiliation: Department of Nanotechnology and Solar Energy, Southern Scientific Center of Russian Academy of Sciences, 344006, 41, Chekhov Avenue, Rostov-on-Don, Russia.
authors.forename: Marina L
authors.initials: ML
authors.lastname: Lunina
keywords: 3D growth; doping; ion-beam sputtering; photoluminescence; quantum dots