High-Mobility Multilayered MoS2Flakes with Low Contact Resistance Grown by Chemical Vapor Deposition.
The controlled synthesis of high-quality multilayer (ML) MoS2flakes with gradually shrinking basal planes by chemical vapor deposition (CVD) is demonstrated. These CVD-grown ML MoS2flakes exhibit much higher mobility and current density than mechanically exfoliated ML flakes due to the reduced contact resistance which mainly resulted from direct contact between the lower MoS2layers and electrodes.
Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084, China.
Jingying
J
Zheng
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, China.
Xingxu
X
Yan
Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084, China.
Zhixing
Z
Lu
Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084, China.
Hailong
H
Qiu
Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084, China.
Guanchen
G
Xu
State Key Laboratory for Mesoscopic Physics, Collaborative Innovation Center of Quantum Matter, School of Physics, Center for Nanochemisty, Peking University, Beijing, 100871, China.
Xu
X
Zhou
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, China.
Peng
P
Wang
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, China.|Department of Chemical Engineering and Materials Science, University of California-Irvine, Irvine, CA, 92697, USA.|Department of Physics and Astronomy, University of California-Irvine, Irvine, CA, 92697, USA.
Xiaoqing
X
Pan
State Key Laboratory for Mesoscopic Physics, Collaborative Innovation Center of Quantum Matter, School of Physics, Center for Nanochemisty, Peking University, Beijing, 100871, China.
Kaihui
K
Liu
Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084, China.
Liying
L
Jiao
MoS2; chemical vapor deposition; field-effect transistors; mobility; multilayer