Hard X-Ray Microscope With Submicrometer Spatial Resolution.
A high-resolution hard x-ray microscope is described. This system is capable of detecting line features as small as 0.6µm in width, and resolving line pairs 1.2-µm wide and 1.2-µm apart. Three types of two-dimensional image detectors are discussed and compared for use with hard x rays in high resolution. Principles of x-ray image magnification are discussed based on x-ray optics and diffraction physics. Examples of applications are shown in microradiography with fiber reinforced composite materials (SiC in Ti3Al Nb) and in diffraction imaging (topography) with device patterns on a silicon single crystal. High-resolution tomography has now become a reality.
National Institute of Standards and Technology, Gaithersburg, MD 20899.
Masao
M
Kuriyama
National Institute of Standards and Technology, Gaithersburg, MD 20899.
Ronald C
RC
Dobbyn
National Institute of Standards and Technology, Gaithersburg, MD 20899.
Richard D
RD
Spal
National Institute of Standards and Technology, Gaithersburg, MD 20899.
Harold E
HE
Burdette
National Institute of Standards and Technology, Gaithersburg, MD 20899.
David R
DR
Black
CCD detectors; fiber reinforced composite; microtomography; multilayer films; x-ray lens; x-ray microscope