Reactive dynamics analysis of critical Nb2O5sputtering rate for drum-based metal-like deposition.
Drum-based metal-like film deposition for oxide was investigated using single wavelength in situ monitoring. The data were used to investigate the oxidation mechanism using combined second-order kinetic and parabolic models. A critical Nb2O5deposition rate of 0.507 nm/s was found at drum rotation of 1 rev/s. However, Nb2O5samples prepared at varying deposition rates showed that the deposition rate must be much lower than the critical deposition rate to achieve reasonable absorption. Thus simulation for the volume-fraction of metal in the oxide layer was done using effective medium approximation and a distribution function. Simulation gave high agreement with experimental results and allows the prediction of extinction coefficients at various deposition rates.
Shigeng
S
Song
Cheng
C
Li
Hin On
HO
Chu
Des
D
Gibson