Photometric calibration of an in situ broadband optical thickness monitoring of thin films in a large vacuum chamber.
To improve the in situ monitoring of thin films at the Laboratoire des Matériaux Avancés, a broadband optical monitoring of the coated thin films was developed and installed in the biggest ion-beam sputtering machine in the world. Due to the configuration of the coating machine and the chamber strain under vacuum, a standard calibration procedure is impossible and a double-beam optical system is not suitable. A novel theoretical and practical solution to calibrate the measurements was found and is described in this paper. Some relevant results achieved thanks to this technique are discussed as well.
David
D
Hofman
Benoit
B
Sassolas
Christophe
C
Michel
Laurent
L
Balzarini
Laurent
L
Pinard
Julien
J
Teillon
Bertrand
B
David
Bernard
B
Lagrange
Eleonore
E
Barthelemy-Mazot
Gianpietro
G
Cagnoli