Rotatable Offner imaging system for ellipsometric measurement.
To realize high spatial resolution imaging ellipsometric measurement with large field of view, we developed a rotatable Offner system with unit magnification. When the conventional Offner imaging system is tilted relative to the sample plane for the ellipsometric measurement, only a small region of plane is in focus. The rotatable Offner system developed here renders the entire object in focus through all rotations. The performance of the prototype of the Offner system and imaging ellipsometer is tested by generating maps of the ellipsometric parameters Δ and Ψ for samples such as a silicon wafer and a resolution target made of chromium film evaporated on a glass substrate.
Faculty of Engineering, University of Yamanashi, Kofu, 400-8511 Yamanashi, Japan.
L
L
Jin
Faculty of Engineering, University of Yamanashi, Kofu, 400-8511 Yamanashi, Japan.
T
T
Tanaka
Faculty of Engineering, University of Yamanashi, Kofu, 400-8511 Yamanashi, Japan.
E
E
Kondoh
Faculty of Engineering, Nagoya University, Nagoya, Aichi 464-8601, Japan.
B
B
Gelloz
Mejiro Genossen, Inc., Tokyo 161-0033, Japan.
K
K
Sano
Mejiro Genossen, Inc., Tokyo 161-0033, Japan.
I
I
Fujio
Mejiro Genossen, Inc., Tokyo 161-0033, Japan.
Y
Y
Kajiyama
Mejiro Genossen, Inc., Tokyo 161-0033, Japan.
M
M
Uehara