title: Formation of nanostructured metallic glass thin films upon sputtering.
abstract: Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.
authors.affiliation: WPI Advanced Institute for Materials Research, Tohoku University, Aoba-Ku, Sendai 980-8577, Japan.
authors.forename: Sergey V
authors.initials: SV
authors.lastname: Ketov
authors.affiliation: WPI Advanced Institute for Materials Research, Tohoku University, Aoba-Ku, Sendai 980-8577, Japan.
authors.forename: Rastko
authors.initials: R
authors.lastname: Joksimovic
authors.affiliation: Institute for Materials Research, Tohoku University, Aoba-Ku, Sendai 980-8577, Japan.
authors.forename: Guoqiang
authors.initials: G
authors.lastname: Xie
authors.affiliation: Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, 1(2), Leninskie Gory, GSP-1, Moscow 119991, Russia; Physics Faculty, Lomonosov Moscow State University, 119991 Moscow 119991, Russia; National University of Science and Technology "MISiS", Moscow, 119049, Russia.
authors.forename: Artem
authors.initials: A
authors.lastname: Trifonov
authors.affiliation: WPI Advanced Institute for Materials Research, Tohoku University, Aoba-Ku, Sendai 980-8577, Japan.
authors.forename: Kazue
authors.initials: K
authors.lastname: Kurihara
authors.affiliation: WPI Advanced Institute for Materials Research, Tohoku University, Aoba-Ku, Sendai 980-8577, Japan.
authors.forename: Dmitri V
authors.initials: DV
authors.lastname: Louzguine-Luzgin
keywords: Engineering; Materials science; Nanotechnology