title: Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon.
abstract: An ideal photonic integrated circuit for nonlinear photonic applications requires high optical nonlinearities and low loss. This work demonstrates a heterogeneous platform by bonding lithium niobate (LN) thin films onto a silicon nitride (Si3N4) waveguide layer on silicon. It not only provides large second- and third-order nonlinear coefficients, but also shows low propagation loss in both the Si3N4and the LN-Si3N4waveguides. The tapers enable low-loss-mode transitions between these two waveguides. This platform is essential for various on-chip applications, e.g., modulators, frequency conversions, and quantum communications.
authors.forename: Lin
authors.initials: L
authors.lastname: Chang
authors.forename: Martin H P
authors.initials: MH
authors.lastname: Pfeiffer
authors.forename: Nicolas
authors.initials: N
authors.lastname: Volet
authors.forename: Michael
authors.initials: M
authors.lastname: Zervas
authors.forename: Jon D
authors.initials: JD
authors.lastname: Peters
authors.forename: Costanza L
authors.initials: CL
authors.lastname: Manganelli
authors.forename: Eric J
authors.initials: EJ
authors.lastname: Stanton
authors.forename: Yifei
authors.initials: Y
authors.lastname: Li
authors.forename: Tobias J
authors.initials: TJ
authors.lastname: Kippenberg
authors.forename: John E
authors.initials: JE
authors.lastname: Bowers