title: Luminescent YbVO4by atomic layer deposition.
abstract: UV to visible and near-infrared converting thin films of YbVO4have been deposited by atomic layer deposition, using the precursor combinations Yb(thd)3(thd = 2,2,6,6-tetramethyl-3,5-heptanedione) and O3, and VO(thd)2and O3at a deposition temperature of 240 °C, followed by post deposition annealing at 400-1000 °C. The UV absorption and the visible and near-infrared emission have been investigated in detail. The structure, thickness and composition of the deposited films have been studied by X-ray diffraction, ellipsometry, and X-ray fluorescence, respectively. The optimal pulse ratio of Yb(thd)3and VO(thd)2with respect to near-infrared emission was found to be 1 : 3, which also yielded the most crystalline sample after annealing. Crystallization of the films is accelerated when an excess of V2O5is present, enabling crystallization at temperatures as low as 500 °C, probably through a flux aided process.
authors.affiliation: Department of Chemistry, Centre for Materials Science and Nanotechnology, University of Oslo, Sem Sælands vei 26, 0371 Oslo, Norway. Ola.Nilsen@kjemi.uio.no.
authors.forename: Michael
authors.identifier: http://orcid.org/0000-0002-0914-5789
authors.initials: M
authors.lastname: Getz
authors.affiliation: Department of Chemistry, Centre for Materials Science and Nanotechnology, University of Oslo, Sem Sælands vei 26, 0371 Oslo, Norway. Ola.Nilsen@kjemi.uio.no.
authors.forename: Per-Anders
authors.initials: PA
authors.lastname: Hansen
authors.affiliation: Department of Chemistry, Centre for Materials Science and Nanotechnology, University of Oslo, Sem Sælands vei 26, 0371 Oslo, Norway. Ola.Nilsen@kjemi.uio.no.
authors.forename: Mohammed A K
authors.initials: MA
authors.lastname: Ahmed
authors.affiliation: Department of Chemistry, Centre for Materials Science and Nanotechnology, University of Oslo, Sem Sælands vei 26, 0371 Oslo, Norway. Ola.Nilsen@kjemi.uio.no.
authors.forename: Helmer
authors.initials: H
authors.lastname: Fjellvåg
authors.affiliation: Department of Chemistry, Centre for Materials Science and Nanotechnology, University of Oslo, Sem Sælands vei 26, 0371 Oslo, Norway. Ola.Nilsen@kjemi.uio.no.
authors.forename: Ola
authors.initials: O
authors.lastname: Nilsen