title: Theoretical Analysis of an Optical Accelerometer Based on Resonant Optical Tunneling Effect.
abstract: Acceleration is a significant parameter for monitoring the status of a given objects. This paper presents a novel linear acceleration sensor that functions via a unique physical mechanism, the resonant optical tunneling effect (ROTE). The accelerometer consists of a fixed frame, two elastic cantilevers, and a major cylindrical mass comprised of a resonant cavity that is separated by two air tunneling gaps in the middle. The performance of the proposed sensor was analyzed with a simplified mathematical model, and simulated using finite element modeling. The simulation results showed that the optical Q factor and the sensitivity of the accelerometer reach up to 8.857 × 10⁷ and 9 pm/g, respectively. The linear measurement range of the device is ±130 g. The work bandwidth obtained is located in 10-1500 Hz. The results of this study provide useful guidelines to improve measurement range and resolution of integrated optical acceleration sensors.
authors.affiliation: MicroNano System Research Center, Taiyuan University of Technology, Taiyuan 030024, China. jianaoqun@tyut.edu.cn.|Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China. jianaoqun@tyut.edu.cn.
authors.forename: Aoqun
authors.initials: A
authors.lastname: Jian
authors.affiliation: MicroNano System Research Center, Taiyuan University of Technology, Taiyuan 030024, China. tyut_wcg@163.com.|Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China. tyut_wcg@163.com.
authors.forename: Chongguang
authors.initials: C
authors.lastname: Wei
authors.affiliation: Laboratory of Wireless Communication Network, Taiyuan University of Technology, Taiyuan 030024, China. guolifang@tyut.edu.cn.
authors.forename: Lifang
authors.initials: L
authors.lastname: Guo
authors.affiliation: MicroNano System Research Center, Taiyuan University of Technology, Taiyuan 030024, China. hujie@tyut.edu.cn.|Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China. hujie@tyut.edu.cn.
authors.forename: Jie
authors.initials: J
authors.lastname: Hu
authors.affiliation: State Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. tangjun@nuc.edu.cn.|Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China. tangjun@nuc.edu.cn.
authors.forename: Jun
authors.initials: J
authors.lastname: Tang
authors.affiliation: State Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. liujun@nuc.edu.cn.|Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China. liujun@nuc.edu.cn.
authors.forename: Jun
authors.initials: J
authors.lastname: Liu
authors.affiliation: Department of Applied Physics, Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong, China. xuming.zhang@polyu.edu.hk.
authors.forename: Xuming
authors.initials: X
authors.lastname: Zhang
authors.affiliation: MicroNano System Research Center, Taiyuan University of Technology, Taiyuan 030024, China. sangshengbo@tyut.edu.cn.|Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China. sangshengbo@tyut.edu.cn.
authors.forename: Shengbo
authors.initials: S
authors.lastname: Sang
keywords: ROTE; accelerometer; bandwidth; finite element modeling; sensitivity