title: Nanoimprint lithography for nanodevice fabrication.
abstract: Nanoimprint lithography (NIL) is a compelling technique for low cost nanoscale device fabrication. The precise and repeatable replication of nanoscale patterns from a single high resolution patterning step makes the NIL technique much more versatile than other expensive techniques such as e-beam or even helium ion beam lithography. Furthermore, the use of mechanical deformation during the NIL process enables grayscale lithography with only a single patterning step, not achievable with any other conventional lithography techniques. These strengths enable the fabrication of unique nanoscale devices by NIL for a variety of applications including optics, plasmonics and even biotechnology. Recent advances in throughput and yield in NIL processes demonstrate the potential of being adopted for mainstream semiconductor device fabrication as well.
authors.affiliation: Hewlett Packard Laboratories, 1501 Page Mill Road, Palo Alto, CA 94304 USA.
authors.forename: Steven
authors.initials: S
authors.lastname: Barcelo
authors.affiliation: Hewlett Packard Laboratories, 1501 Page Mill Road, Palo Alto, CA 94304 USA.
authors.forename: Zhiyong
authors.initials: Z
authors.lastname: Li