title: Wafer-scale two-dimensional semiconductors from printed oxide skin of liquid metals.
abstract: A variety of deposition methods for two-dimensional crystals have been demonstrated; however, their wafer-scale deposition remains a challenge. Here we introduce a technique for depositing and patterning of wafer-scale two-dimensional metal chalcogenide compounds by transforming the native interfacial metal oxide layer of low melting point metal precursors (group III and IV) in liquid form. In an oxygen-containing atmosphere, these metals establish an atomically thin oxide layer in a self-limiting reaction. The layer increases the wettability of the liquid metal placed on oxygen-terminated substrates, leaving the thin oxide layer behind. In the case of liquid gallium, the oxide skin attaches exclusively to a substrate and is then sulfurized via a relatively low temperature process. By controlling the surface chemistry of the substrate, we produce large area two-dimensional semiconducting GaS of unit cell thickness (∼1.5 nm). The presented deposition and patterning method offers great commercial potential for wafer-scale processes.
authors.affiliation: School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia.|Manufacturing Business Unit, CSIRO, Clayton, Victoria 3168, Australia.
authors.forename: Benjamin J
authors.initials: BJ
authors.lastname: Carey
authors.affiliation: School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Jian Zhen
authors.initials: JZ
authors.lastname: Ou
authors.affiliation: School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia.|Manufacturing Business Unit, CSIRO, Clayton, Victoria 3168, Australia.
authors.forename: Rhiannon M
authors.initials: RM
authors.lastname: Clark
authors.affiliation: School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Kyle J
authors.initials: KJ
authors.lastname: Berean
authors.affiliation: School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Ali
authors.initials: A
authors.lastname: Zavabeti
authors.affiliation: Manufacturing Business Unit, CSIRO, Clayton, Victoria 3168, Australia.
authors.forename: Anthony S R
authors.initials: AS
authors.lastname: Chesman
authors.affiliation: ARC Centre of Excellence in Exciton Science, School of Science, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Salvy P
authors.initials: SP
authors.lastname: Russo
authors.affiliation: ARC Centre for Excellence for Nanoscale BioPhotonics (CNBP), School of Science, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Desmond W M
authors.initials: DW
authors.lastname: Lau
authors.affiliation: Department of Materials Science and Engineering, Monash University, Clayton, Victoria 3168, Australia.
authors.forename: Zai-Quan
authors.initials: ZQ
authors.lastname: Xu
authors.affiliation: Department of Materials Science and Engineering, Monash University, Clayton, Victoria 3168, Australia.
authors.forename: Qiaoliang
authors.identifier: 0000-0002-6971-789X
authors.initials: Q
authors.lastname: Bao
authors.affiliation: School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Omid
authors.initials: O
authors.lastname: Kevehei
authors.affiliation: ARC Centre for Excellence for Nanoscale BioPhotonics (CNBP), School of Science, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Brant C
authors.initials: BC
authors.lastname: Gibson
authors.affiliation: Department of Chemical and Bimolecular Engineering, NC State University, Raleigh, North Carolina 27695-7905, USA.
authors.forename: Michael D
authors.initials: MD
authors.lastname: Dickey
authors.affiliation: Department of Chemistry &Biochemistry and Materials Science &Engineering, University of California, Los Angeles, Los Angeles, California 90095, USA.
authors.forename: Richard B
authors.initials: RB
authors.lastname: Kaner
authors.affiliation: School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Torben
authors.initials: T
authors.lastname: Daeneke
authors.affiliation: School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia.
authors.forename: Kourosh
authors.initials: K
authors.lastname: Kalantar-Zadeh