title: CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic Structure.
abstract: Photonic crystal (PC)-based devices have been widely used since 1990s, while PC has just stepped into the research area of nanofluidic. In this paper, photonic crystal had been used as a complementary metal oxide semiconductors (CMOS) compatible part to create a nanofluidic structure. A nanofluidic structure prototype had been fabricated with CMOS-compatible techniques. The nanofluidic channels were sealed by direct bonding polydimethylsiloxane (PDMS) and the periodic gratings on photonic crystal structure. The PC was fabricated on a 4-in. Si wafer with Si3N4as the guided mode layer and SiO2film as substrate layer. The higher order mode resonance wavelength of PC-based nanofluidic structure had been selected, which can confine the enhanced electrical field located inside the nanochannel area. A design flow chart was used to guide the fabrication process. By optimizing the fabrication device parameters, the periodic grating of PC-based nanofluidic structure had a high-fidelity profile with fill factor at 0.5. The enhanced electric field was optimized and located within the channel area, and it can be used for PC-based nanofluidic applications with high performance.
authors.affiliation: School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China.|Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, 61801, USA.|Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, 61801, USA.|Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan, 430074, China.
authors.forename: Wang
authors.initials: W
authors.lastname: Peng
authors.affiliation: School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China.
authors.forename: Youping
authors.initials: Y
authors.lastname: Chen
authors.affiliation: School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China.
authors.forename: Wu
authors.initials: W
authors.lastname: Ai
authors.affiliation: School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China. mnizhang@mail.hust.edu.cn.
authors.forename: Dailin
authors.initials: D
authors.lastname: Zhang
authors.affiliation: School of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan, 430070, China.
authors.forename: Han
authors.initials: H
authors.lastname: Song
authors.affiliation: School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China.
authors.forename: Hui
authors.initials: H
authors.lastname: Xiong
authors.affiliation: School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China.
authors.forename: Pengcheng
authors.initials: P
authors.lastname: Huang
keywords: CMOS-compatible process; PC-based nanofluidic structure; Periodical Si3N4 gratings; Photonic crystal