title: Epidermal Inorganic Optoelectronics for Blood Oxygen Measurement.
abstract: Flexible and stretchable optoelectronics, built-in inorganic semiconductor materials, offer a wide range of unprecedented opportunities and will redefine the conventional rigid optoelectronics in biological application and medical measurement. However, a significant bottleneck lies in the brittleness nature of rigid semiconductor materials and the performance's extreme sensitivity to the light intensity variation due to human skin deformation while measuring physical parameters. In this study, the authors demonstrate a systematic strategy to design an epidermal inorganic optoelectronic device by using specific strain-isolation design, nanodiamond thinning, and hybrid transfer printing. The authors propose all-in-one suspension structure to achieve the stretchability and conformability for surrounding environment, and they propose a two-step transfer printing method for hybrid integrating III-V group emitting elements, Si-based photodetector, and interconnects. Owing to the excellent flexibility and stretchability, such device is totally conformal to skin and keeps the constant light transmission between emitting element and photodetector as well as the signal stability due to skin deformation. This method opens a route for traditional inorganic optoelectronics to achieve flexibility and stretchability and improve the performance of optoelectronics for biomedical application.
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: Haicheng
authors.initials: H
authors.lastname: Li
authors.affiliation: Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
authors.forename: Yun
authors.initials: Y
authors.lastname: Xu
authors.affiliation: Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
authors.forename: Xiaomin
authors.initials: X
authors.lastname: Li
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: Ying
authors.initials: Y
authors.lastname: Chen
authors.affiliation: Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
authors.forename: Yu
authors.initials: Y
authors.lastname: Jiang
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: Changxing
authors.initials: C
authors.lastname: Zhang
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: Bingwei
authors.initials: B
authors.lastname: Lu
authors.affiliation: National Lab for Information Science and Technology, Department of Engineering, Tsinghua University, Beijing, 100084, China.
authors.forename: Jian
authors.initials: J
authors.lastname: Wang
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: Yinji
authors.initials: Y
authors.lastname: Ma
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: Yihao
authors.initials: Y
authors.lastname: Chen
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: Yin
authors.initials: Y
authors.lastname: Huang
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: Minquang
authors.initials: M
authors.lastname: Ding
authors.affiliation: Research and development department, Chero Technology Co., Ltd., Jiaxing, 314001, China.
authors.forename: Honghong
authors.initials: H
authors.lastname: Su
authors.affiliation: Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
authors.forename: Guofeng
authors.initials: G
authors.lastname: Song
authors.affiliation: National Lab for Information Science and Technology, Department of Engineering, Tsinghua University, Beijing, 100084, China.
authors.forename: Yi
authors.initials: Y
authors.lastname: Luo
authors.affiliation: AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China.|Center for Mechanics and Materials, Tsinghua University, Beijing, 100084, China.
authors.forename: X
authors.initials: X
authors.lastname: Feng
mesh_terms: D001784:Blood Gas Analysis / Q000379:methods*; D006801:Humans; D036103:Nanotechnology / Q000379:methods*; D010100:Oxygen / Q000097:blood*; D012666:Semiconductors; D012867:Skin / Q000378:metabolism
chemical_list: D010100:Oxygen
keywords: blood oxygen; epidermal optoelectronics; flexible and strechable devices; hybrid integration