title: Photonic crystal waveguides on silicon rich nitride platform.
abstract: We demonstrate design, fabrication, and characterization of two-dimensional photonic crystal (PhC) waveguides on a suspended silicon rich nitride (SRN) platform for applications at telecom wavelengths. Simulation results suggest that a 210 nm photonic band gap can be achieved in such PhC structures. We also developed a fabrication process to realize suspended PhC waveguides with a transmission bandwidth of 20 nm for a W1 PhC waveguide and over 70 nm for a W0.7 PhC waveguide. Using the Fabry-Pérot oscillations of the transmission spectrum we estimated a group index of over 110 for W1 PhC waveguides. For a W1 waveguide we estimated a propagation loss of 53 dB/cm for a group index of 37 and for a W0.7 waveguide the lowest propagation was 4.6 dB/cm.
authors.forename: Kapil
authors.initials: K
authors.lastname: Debnath
authors.forename: Thalia Dominguez
authors.initials: TD
authors.lastname: Bucio
authors.forename: Abdelrahman
authors.initials: A
authors.lastname: Al-Attili
authors.forename: Ali Z
authors.initials: AZ
authors.lastname: Khokhar
authors.forename: Shinichi
authors.initials: S
authors.lastname: Saito
authors.forename: Frederic Y
authors.initials: FY
authors.lastname: Gardes