title: Enhancement of noisy EDX HRSTEM spectrum-images by combination of filtering and PCA.
abstract: STEM spectrum-imaging with collecting EDX signal is considered in view of the extraction of maximum information from very noisy data. It is emphasized that spectrum-images with weak EDX signal often suffer from information loss in the course of PCA treatment. The loss occurs when the level of random noise exceeds a certain threshold. Weighted PCA, though potentially helpful in isolation of meaningful variations from noise, might provoke the complete loss of information in the situation of weak EDX signal. Filtering datasets prior PCA can improve the situation and recover the lost information. In particular, Gaussian kernel filters are found to be efficient. A new filter useful in the case of sparse atomic-resolution EDX spectrum-images is suggested.
authors.affiliation: GLOBALFOUNDRIES Dresden, Wilschdorfer Landstraße 101, 01109 Dresden, Germany. Electronic address: pavel@temdm.com.
authors.forename: Pavel
authors.initials: P
authors.lastname: Potapov
authors.affiliation: Gatan Inc., Las Positas Blvd. 5794 W, Pleasanton, CA 94588, USA.
authors.forename: Paolo
authors.initials: P
authors.lastname: Longo
authors.affiliation: JEOL Ltd., 1-2 Musasino 3-chome Akishima, Tokyo 196-8558, Japan.
authors.forename: Eiji
authors.initials: E
authors.lastname: Okunishi
keywords: Filtering; PCA; Spectrum-imaging