title: About the information depth of backscattered electron imaging.
abstract: The information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo-based software. Recommendations are given for routine estimations of BSE information depths.
authors.affiliation: Group of Microscopy and Spectroscopy of Surfaces, Department of Electron Microscopy, Institute of Scientific Instruments of the CAS, Brno, Czech Republic.
authors.forename: J
authors.initials: J
authors.lastname: Piňos
authors.affiliation: Group of Microscopy and Spectroscopy of Surfaces, Department of Electron Microscopy, Institute of Scientific Instruments of the CAS, Brno, Czech Republic.
authors.forename: Š
authors.initials: Š
authors.lastname: Mikmeková
authors.affiliation: Group of Microscopy and Spectroscopy of Surfaces, Department of Electron Microscopy, Institute of Scientific Instruments of the CAS, Brno, Czech Republic.
authors.forename: L
authors.initials: L
authors.lastname: Frank
keywords: Backscattered electrons; information depth; penetration of electrons