title: Low vibration laboratory with a single-stage vibration isolation for microscopy applications.
abstract: The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate, are discussed. The optimization of the air spring system leads to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.
authors.affiliation: Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich, 52425 Jülich, Germany.
authors.forename: Bert
authors.identifier: 0000000195807031
authors.initials: B
authors.lastname: Voigtländer
authors.affiliation: Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich, 52425 Jülich, Germany.
authors.forename: Peter
authors.initials: P
authors.lastname: Coenen
authors.affiliation: Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich, 52425 Jülich, Germany.
authors.forename: Vasily
authors.initials: V
authors.lastname: Cherepanov
authors.affiliation: Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich, 52425 Jülich, Germany.
authors.forename: Peter
authors.identifier: 0000000302579741
authors.initials: P
authors.lastname: Borgens
authors.affiliation: Konstruktionsbüro Duden, Borgsenallee 35, 33649 Bielefeld, Germany.
authors.forename: Thomas
authors.initials: T
authors.lastname: Duden
authors.affiliation: Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich, 52425 Jülich, Germany.
authors.forename: F Stefan
authors.initials: FS
authors.lastname: Tautz