title: A novel setup for wafer curvature measurement at very high heating rates.
abstract: The curvature evolution of a thin film layer stack containing a top Al layer is measured during temperature cycles with very high heating rates. The temperature cycles are generated by means of programmable electrical power pulses applied to miniaturized polysilicon heater systems embedded inside a semiconductor chip and the curvature is measured by a fast wafer curvature measurement setup. Fast temperature cycles with heating duration of 100 ms are created to heat the specimen up to 270 °C providing an average heating rate of 2500 K/s. As a second approach, curvature measurement utilizing laser scanning Doppler vibrometry is also demonstrated which verifies the results obtained from the fast wafer curvature measurement setup. Film stresses calculated from the measured curvature values compare well to literature results, indicating that the new method can be used to measure curvature during fast temperature cycling.
authors.affiliation: KAI-Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, Technologiepark Villach, Europastrasse 8, 9524 Villach, Austria.
authors.forename: T
authors.identifier: 0000000310687259
authors.initials: T
authors.lastname: Islam
authors.affiliation: KAI-Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, Technologiepark Villach, Europastrasse 8, 9524 Villach, Austria.
authors.forename: J
authors.initials: J
authors.lastname: Zechner
authors.affiliation: KAI-Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, Technologiepark Villach, Europastrasse 8, 9524 Villach, Austria.
authors.forename: M
authors.initials: M
authors.lastname: Bernardoni
authors.affiliation: KAI-Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, Technologiepark Villach, Europastrasse 8, 9524 Villach, Austria.
authors.forename: M
authors.initials: M
authors.lastname: Nelhiebel
authors.affiliation: Erich Schmid Institute of Materials Science, Jahnstrasse 12, 8700 Leoben, Austria.
authors.forename: R
authors.initials: R
authors.lastname: Pippan