title: A dual-axis single-proof-mass angular accelerometer for a vestibular prosthesis.
abstract: A dual-axis single-proof-mass angular accelerometer has been developed for a vestibular prosthesis. Designed to sense head rotations both in the yaw and the pitch planes, the output of the inertial sensor may be coded as amplitude or rate modulated biphasic current pulses to stimulate vestibular nerves. Fabricated with a high aspect ratio commercial process, a sensor with small form factor (1.4 mm × 0.8 mm) is achieved with a scale factor of 95.5 μV/rad/sec2 and 145.8 μV/rad/sec2 in the yaw and the pitch planes, respectively. Superior linear acceleration rejection was demonstrated for both rotating axis, and an overall power consumption of 296 μW was estimated including sensor and interface circuit.
authors.lastname: Yaesuk Jeong
authors.forename: Hakan
authors.initials: H
authors.lastname: Toreyin
authors.forename: Anosh
authors.initials: A
authors.lastname: Daruwalla
authors.forename: Pamela
authors.initials: P
authors.lastname: Bhatti
authors.forename: Farrokh
authors.initials: F
authors.lastname: Ayazi
mesh_terms: D000054:Acceleration; D004566:Electrodes; D006801:Humans; D019736:Prostheses and Implants; D019919:Prosthesis Implantation; D014722:Vestibule, Labyrinth / Q000502:physiology*