title: RBS Depth Profiling Analysis of (Ti, Al)N/MoN and CrN/MoN Multilayers.
abstract: (Ti, Al)N/MoN and CrN/MoN multilayered films were synthesized on Si (100) surface by multi-cathodic arc ion plating system with various bilayer periods. The elemental composition and depth profiling of the films were investigated by Rutherford backscattering spectroscopy (RBS) using 2.42 and 1.52 MeV Li2+ion beams and different incident angles (0°, 15°, 37°, and 53°). The microstructures of (Ti, Al)N/MoN multilayered films were evaluated by X-ray diffraction. The multilayer periods and thickness of the multilayered films were characterized by scanning electron microscopy (SEM) and high-resolution transmission electron microscopy (HR-TEM) and then compared with RBS results.
authors.affiliation: Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan, 430072, China.|Hubei Nuclear Solid Physics Key Laboratory at School of Physics and Technology, Wuhan University, Wuhan, 430072, China.
authors.forename: Bin
authors.initials: B
authors.lastname: Han
authors.affiliation: Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan, 430072, China.
authors.forename: Zesong
authors.initials: Z
authors.lastname: Wang
authors.affiliation: Hubei Nuclear Solid Physics Key Laboratory at School of Physics and Technology, Wuhan University, Wuhan, 430072, China.
authors.forename: Neena
authors.initials: N
authors.lastname: Devi
authors.affiliation: Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan, 430072, China.
authors.forename: K K
authors.initials: KK
authors.lastname: Kondamareddy
authors.affiliation: Hubei Nuclear Solid Physics Key Laboratory at School of Physics and Technology, Wuhan University, Wuhan, 430072, China.
authors.forename: Zhenguo
authors.initials: Z
authors.lastname: Wang
authors.affiliation: Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan, 430072, China.
authors.forename: Na
authors.initials: N
authors.lastname: Li
authors.affiliation: Hubei Nuclear Solid Physics Key Laboratory at School of Physics and Technology, Wuhan University, Wuhan, 430072, China.
authors.forename: Wenbin
authors.initials: W
authors.lastname: Zuo
authors.affiliation: Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan, 430072, China. djfu@whu.edu.cn.
authors.forename: Dejun
authors.initials: D
authors.lastname: Fu
authors.affiliation: Hubei Nuclear Solid Physics Key Laboratory at School of Physics and Technology, Wuhan University, Wuhan, 430072, China. csliuan@whu.edu.cn.
authors.forename: Chuansheng
authors.initials: C
authors.lastname: Liu
keywords: Depth profiling; Microstructure; MoN; Multilayer; RBS