title: Optimized sensitivityof Silicon-on-Insulator (SOI) strip waveguide resonator sensor.
abstract: Evanescent field sensors have shown promise for biological sensing applications. In particular, Silicon-on-Insulator (SOI)-nano-photonic based resonator sensors have many advantages for lab-on-chip diagnostics, including high sensitivity for molecular detection and compatibility with CMOS foundries for high volume manufacturing. We have investigated the optimum design parameters within the fabrication constraints of Multi-Project Wafer (MPW) foundries that result in the highest sensitivity for a resonator sensor. We have demonstrated the optimum waveguide thickness needed to achieve the maximum bulk sensitivity with SOI-based resonator sensors to be 165 nm using the quasi-TM guided mode. The closest thickness offered by MPW foundry services is 150 nm. Therefore, resonators with 150 nm thick silicon waveguides were fabricated resulting in sensitivities as high as 270 nm/RIU, whereas a similar resonator sensor with a 220 nm thick waveguide demonstrated sensitivities of approximately 200 nm/RIU.
authors.affiliation: Department of Electrical and Computer Engineering, University of British Columbia, 2332 Main Mall, Vancouver, BC, V6T 1Z4, Canada.
authors.forename: Sahba
authors.initials: S
authors.lastname: TalebiFard
authors.affiliation: Department of Bioengineering, University of Washington, Box 355061 Seattle, WA 98195, USA.
authors.forename: Shon
authors.initials: S
authors.lastname: Schmidt
authors.affiliation: University of Laval 2325 Rue de l'Universite, Ville de Quebec, QC G1V 0A6, Canada.
authors.forename: Wei
authors.initials: W
authors.lastname: Shi
authors.affiliation: Department of Bioengineering, University of Washington, Box 355061 Seattle, WA 98195, USA.
authors.forename: WenXuan
authors.initials: W
authors.lastname: Wu
authors.affiliation: Department of Electrical and Computer Engineering, University of British Columbia, 2332 Main Mall, Vancouver, BC, V6T 1Z4, Canada.
authors.forename: Nicolas A F
authors.initials: NA
authors.lastname: Jaeger
authors.affiliation: Department of Chemical and Biological Engineering, University of British Columbia, 2360 East Mall, Vancouver, BC V6T 1Z3, Canada.
authors.forename: Ezra
authors.initials: E
authors.lastname: Kwok
authors.affiliation: Department of Bioengineering, University of Washington, Box 355061 Seattle, WA 98195, USA.
authors.forename: Daniel M
authors.initials: DM
authors.lastname: Ratner
authors.affiliation: Department of Electrical and Computer Engineering, University of British Columbia, 2332 Main Mall, Vancouver, BC, V6T 1Z4, Canada.
authors.forename: Lukas
authors.initials: L
authors.lastname: Chrostowski
keywords: (140.4780) Optical resonators; (280.1415) Biological sensing and sensors