title: Growth Mechanism for Low Temperature PVD Graphene Synthesis on Copper Using Amorphous Carbon.
abstract: Growth mechanism for synthesizing PVD based Graphene using Amorphous Carbon, catalyzed by Copper is investigated in this work. Different experiments with respect to Amorphous Carbon film thickness, annealing time and temperature are performed for the investigation. Copper film stress and its effect on hydrogen diffusion through the film grain boundaries are found to be the key factors for the growth mechanism, and supported by our Finite Element Modeling. Low temperature growth of Graphene is achieved and the proposed growth mechanism is found to remain valid at low temperatures.
authors.affiliation: Center for Reliability Sciences &Technologies, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan, 33302, ROC Taiwan.|Department of Electronic Engineering, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan, 33302, ROC Taiwan.
authors.forename: Udit
authors.initials: U
authors.lastname: Narula
authors.affiliation: Center for Reliability Sciences &Technologies, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan, 33302, ROC Taiwan.|Department of Electronic Engineering, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan, 33302, ROC Taiwan.|Department of Mechanical Engineering, Ming Chi University of Technology, 84, Gungjuan Road, Taishan, New Taipei City, 24301, ROC Taiwan.|Department of Urology, Chang Gung Memorial Hospital, Kwei-Shan, Taoyuan, 33305, ROC Taiwan.|Institute of Radiation Research, College of Medicine, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan, 33302, ROC Taiwan.
authors.forename: Cher Ming
authors.initials: CM
authors.lastname: Tan
authors.affiliation: Department of Electronic Engineering, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan, 33302, ROC Taiwan.|Department of Materials Engineering, Ming Chi University of Technology, Taishan, New Taipei City 24301, Taiwan.|Department of Nephrology, Chang Gung Memorial Hospital, Kwei-Shan, Taoyuan 33305, Taiwan.
authors.forename: Chao Sung
authors.initials: CS
authors.lastname: Lai