title: Optofluidic biomolecule sensors based on a-Si:H microrings embedded in silicon-glass microchannels.
abstract: The large-scale and low-cost fabrication of high sensitivity sensors for the real-time detection of biochemicals and molecular substances opens up new opportunities in the areas of bioanalytic screening and medical diagnostics. Planar integrated photonic resonators that can be fabricated with a low footprint, in spatial and wavelength multiplexed arrangements, and that enable integration with microfluidics on the wafer scale have emerged as a promising sensing platform for these application fields. We realized an optofluidic and label-free biosensor that is based on hydrogenated amorphous silicon microring resonators embedded in silicon/glass microfluidic channels for analyte injection and biomolecule immobilization. The optofluidic sensor merits for refractive index and biomolecule sensing are evaluated by sensitivity and detection limit simulations, whereas a proof of concept is demonstrated by real-time protein immobilization experiments of functionalized resonators.
authors.forename: T
authors.initials: T
authors.lastname: Lipka
authors.forename: L
authors.initials: L
authors.lastname: Moldenhauer
authors.forename: L
authors.initials: L
authors.lastname: Wahn
authors.forename: H K
authors.initials: HK
authors.lastname: Trieu