Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates.
Renewed interest has been witnessed in utilizing the piezoelectric response of PbZr0.52Ti0.48O3(PZT) films on glass substrates for applications such as adaptive optics. Accordingly, new methodologies are being explored to grow well-oriented PZT thin films to harvest a large piezoelectric response. However, thin film piezoelectric response is significantly reduced compared to intrinsic response due to substrate induced clamping, even when films are well-oriented. Here, a novel method is presented to grow preferentially (100)-oriented PZT films on glass substrates by utilizing crystalline nanosheets as seed layers. Furthermore, increasing the repetition frequency up to 20 Hz during pulsed laser deposition helps to tune the film microstructure to hierarchically ordered columns that leads to reduced clamping and enhanced piezoelectric response evidenced by transmission electron microscopy and analytical calculations. A large piezoelectric coefficient of 250 pm/V is observed in optimally tuned structure which is more than two times the highest reported piezoelectric response on glass. To confirm that the clamping compromises the piezoelectric response, denser films are deposited using a lower repetition frequency and a BiFeO3buffer layer resulting in significantly reduced piezoelectric responses. This paper demonstrates a novel method for PZT integration on glass substrates without compromising the large piezoelectric response.
Inorganic Materials Science Group, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands.
Anuj
A
Chopra
Laser Physics and Nonlinear Optics Group, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands.|Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands.
Muharrem
0000-0002-8339-2091
M
Bayraktar
Inorganic Materials Science Group, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands.
Maarten
M
Nijland
Inorganic Materials Science Group, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands.
Johan E
0000-0001-7995-6571
JE
Ten Elshof
Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands.
Fred
F
Bijkerk
Inorganic Materials Science Group, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands. a.j.h.m.rijnders@utwente.nl.
Guus
G
Rijnders