Investigation of the Structural, Electrical, and Optical Properties of the Nano-Scale GZO Thin Films on Glass and Flexible Polyimide Substrates.
In this study, Ga₂O₃-doped ZnO (GZO) thin films were deposited on glass and flexible polyimide (PI) substrates at room temperature (300 K), 373 K, and 473 K by the radio frequency (RF) magnetron sputtering method. After finding the deposition rate, all the GZO thin films with a nano-scale thickness of about 150 ± 10 nm were controlled by the deposition time. X-ray diffraction patterns indicated that the GZO thin films were not amorphous and all exhibited the (002) peak, and field emission scanning electron microscopy showed that only nano-scale particles were observed. The dependences of the structural, electrical, and optical properties of the GZO thin films on different deposition temperatures and substrates were investigated. X-ray photoemission spectroscopy (XPS) was used to measure the elemental composition at the chemical and electronic states of the GZO thin films deposited on different substrates, which could be used to clarify the mechanism of difference in electrical properties of the GZO thin films. In this study, the XPS binding energy spectra of Ga2p3/2and Ga2p1/2peaks, Zn2p3/2and Zn2p1/2peaks, the Ga3d peak, and O₁speaks for GZO thin films on glass and PI substrates were well compared.
Department of Electrical Engineering and Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 402, Taiwan. fansen@dragon.nchu.edu.tw.
Fang-Hsing
FH
Wang
Department of Electrical Engineering, Kun-Shan University, Tainan 710, Taiwan. knchen@mail.ksu.edu.tw.
Kun-Neng
KN
Chen
Department of Mechanical Engineering, National Kaohsiung University of Applied Science, Kaohsiung 807, Taiwan. jammy@kuas.edu.tw.
Chao-Ming
CM
Hsu
Department of Electrical Engineering and Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 402, Taiwan. stmike18@yahoo.com.tw.
Min-Chu
MC
Liu
Department of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung 81141, Taiwan. cfyang@nuk.edu.tw.
Cheng-Fu
CF
Yang
Ga2O3-doped ZnO (GZO) thin film; X-ray photoelectron spectroscopy (XPS); glass; polyimide (PI)