title: Phase-shifting infrared digital holographic microscopy based on an all-fiber variable phase shifter.
abstract: Phase-shifting infrared digital holographic microscopy based on a homemade all-fiber variable phase shifter is presented to quantitatively obtain the phase distribution of an object wave carrying the information of a transparent specimen in the infrared band. The all-fiber variable phase shifter, which consists of a tubular piezoelectric transducer (PZT) and a single-mode fiber, can accurately produce any phase shift between 0 and 2π by modulating the driving voltage of the tubular PZT. Taking measurements of different staircase structures on a silicon wafer as samples, two configurations are presented based on different phase-shifting implementations: one is a slight off-axis two-step phase shift and the other is an in-line four-step phase shift. The reconstructed results prove the validity of this method.
authors.forename: Teli
authors.initials: T
authors.lastname: Xi
authors.forename: Jianglei
authors.initials: J
authors.lastname: Di
authors.forename: Xiaofeng
authors.initials: X
authors.lastname: Guan
authors.forename: Ying
authors.initials: Y
authors.lastname: Li
authors.forename: Chaojie
authors.initials: C
authors.lastname: Ma
authors.forename: Jiwei
authors.initials: J
authors.lastname: Zhang
authors.forename: Jianlin
authors.initials: J
authors.lastname: Zhao