title: Amorphous and Crystalline Vanadium Oxides as High-Energy and High-Power Cathodes for Three-Dimensional Thin-Film Lithium Ion Batteries.
abstract: Flexible wearable electronics and on-chip energy storage for wireless sensors drive rechargeable batteries toward thin-film lithium ion batteries. To enable more charge storage on a given surface, higher energy density materials are required, while faster energy storage and release can be obtained by going to thinner films. Vanadium oxides have been examined as cathodes in classical and thin-film lithium ion batteries for decades, but amorphous vanadium oxide thin films have been mostly discarded. Here, we investigate the use of atomic layer deposition, which enables electrode deposition on complex three-dimensional (3D) battery architectures, to obtain both amorphous and crystalline VO2and V2O5, and we evaluate their thin-film cathode performance. Very high volumetric capacities are found, alongside excellent kinetics and good cycling stability. Better kinetics and higher volumetric capacities were observed for the amorphous vanadium oxides compared to their crystalline counterparts. The conformal deposition of these vanadium oxides on silicon micropillar structures is demonstrated. This study shows the promising potential of these atomic layer deposited vanadium oxides as cathodes for 3D all-solid-state thin-film lithium ion batteries.
authors.affiliation: Department of Solid State Sciences, Ghent University , Krijgslaan 281 S2, 9000 Gent, Belgium.
authors.forename: Felix
authors.identifier: http://orcid.org/0000-0001-6275-6805
authors.initials: F
authors.lastname: Mattelaer
authors.affiliation: Department of Solid State Sciences, Ghent University , Krijgslaan 281 S2, 9000 Gent, Belgium.
authors.forename: Kobe
authors.initials: K
authors.lastname: Geryl
authors.affiliation: Department of Solid State Sciences, Ghent University , Krijgslaan 281 S2, 9000 Gent, Belgium.
authors.forename: Geert
authors.initials: G
authors.lastname: Rampelberg
authors.affiliation: Department of Solid State Sciences, Ghent University , Krijgslaan 281 S2, 9000 Gent, Belgium.
authors.forename: Jolien
authors.initials: J
authors.lastname: Dendooven
authors.affiliation: Department of Solid State Sciences, Ghent University , Krijgslaan 281 S2, 9000 Gent, Belgium.
authors.forename: Christophe
authors.initials: C
authors.lastname: Detavernier
keywords: atomic layer deposition; battery; lithium ion battery; thin film electrode; vanadium oxide