title: Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing.
abstract: We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 × 105.
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.|University of Chinese Academy of Sciences, Beijing 100049, China.|School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China.
authors.forename: Zhiwei
authors.initials: Z
authors.lastname: Fang
authors.affiliation: State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China.
authors.forename: Yingxin
authors.initials: Y
authors.lastname: Xu
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.|University of Chinese Academy of Sciences, Beijing 100049, China.
authors.forename: Min
authors.initials: M
authors.lastname: Wang
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
authors.forename: Lingling
authors.initials: L
authors.lastname: Qiao
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
authors.forename: Jintian
authors.initials: J
authors.lastname: Lin
authors.affiliation: State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China.
authors.forename: Wei
authors.initials: W
authors.lastname: Fang
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.|State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.|Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi 03006, China.
authors.forename: Ya
authors.initials: Y
authors.lastname: Cheng