title: Ultrahigh-Density 256-Channel Neural Sensing Microsystem Using TSV-Embedded Neural Probes.
abstract: Highly integrated neural sensing microsystems are crucial to capture accurate signals for brain function investigations. In this paper, a 256-channel neural sensing microsystem with a sensing area of 5 × 5 mm2is presented based on 2.5-D through-silicon-via (TSV) integration. This microsystem composes of dissolvable μ-needles, TSV-embedded μ-probes, 256-channel neural amplifiers, 11-bit area-power-efficient successive approximation register analog-to-digital converters, and serializers. This microsystem can detect 256 electrocorticography and local field potential signals within a small area of 5 mm × 5 mm. The neural amplifier realizes 57.8 dB gain with only 9.8 μW per channel. The overall power of this microsystem is only 3.79 mW for 256-channel neural sensing. A smaller microsystem with dimension of 6 mm × 4 mm has been also implanted into rat brain for somatosensory evoked potentials (SSEPs) recording by using contralateral and ipsilateral electrical stimuli with intensity from 0.2 to 1.0 mA, and successfully observed different SSEPs from left somatosensory cortex of a rat.
authors.affiliation: Institute of Electrical Control Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Yu-Chieh
authors.initials: YC
authors.lastname: Huang
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Po-Tsang
authors.initials: PT
authors.lastname: Huang
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Shang-Lin
authors.initials: SL
authors.lastname: Wu
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Yu-Chen
authors.initials: YC
authors.lastname: Hu
authors.affiliation: Institute of Electrical Control Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Yan-Huei
authors.initials: YH
authors.lastname: You
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Jr-Ming
authors.initials: JM
authors.lastname: Chen
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Yan-Yu
authors.initials: YY
authors.lastname: Huang
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Hsiao-Chun
authors.initials: HC
authors.lastname: Chang
authors.affiliation: Institute of Electrical Control Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Yen-Han
authors.initials: YH
authors.lastname: Lin
authors.affiliation: Institute of Cognitive Neuroscience, National Central University, Taoyuan, Taiwan, R.O.C.
authors.forename: Jeng-Ren
authors.initials: JR
authors.lastname: Duann
authors.affiliation: Department of Biological Science and Technology, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Tzai-Wen
authors.initials: TW
authors.lastname: Chiu
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Wei
authors.initials: W
authors.lastname: Hwang
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Kuan-Neng
authors.initials: KN
authors.lastname: Chen
authors.affiliation: Department of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Ching-Te
authors.initials: CT
authors.lastname: Chuang
authors.affiliation: Institute of Electrical Control Engineering and the Department of Electrical and Computer Engineering, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
authors.forename: Jin-Chern
authors.initials: JC
authors.lastname: Chiou
mesh_terms: D000669:Amplifiers, Electronic; D000818:Animals; D001921:Brain / Q000502:physiology*; D004567:Electrodes, Implanted; D005073:Evoked Potentials, Somatosensory; D055616:Microtechnology; D051381:Rats