title: Wafer-scale arrays of high-Q silica optical microcavities.
abstract: On-chip high-Q microcavities possess significant potential in terms of integration of optical microresonators into functional optoelectronic devices that could be used in various applications, including biosensors, photonic-integrated circuits, or quantum optics experiments. Yet, despite the convenience of fabricating wafer-scale integrated microresonators with moderate Q values using standard microfabrication techniques, surface-tension-induced microcavities (STIMs), which have atomic-level surface roughness enabling the observation of Q values larger than 106, could only be produced using individual thermal treatment of every single microresonator within the devised area. Here, we demonstrate a facile method for large-scale fabrication of silica STIMs of various morphologies. Q values exceeding 106are readily obtained using this technique. This study represents a significant advancement toward fabrication of wafer-scale optoelectronic circuitries.
authors.forename: Erol
authors.initials: E
authors.lastname: Ozgur
authors.forename: Ersin
authors.initials: E
authors.lastname: Huseyinoglu
authors.forename: Aykutlu
authors.initials: A
authors.lastname: Dana