title: Observation of whispering gallery modes through electron beam-induced deposition.
abstract: Surprisingly intense spectra of whispering gallery modes were observed in polymer microbeads after illumination with electrons in a scanning electron microscope and subsequent laser illumination and spectral analysis. It will be proposed that whispering gallery mode resonances became visible after local deposition of hydrocarbon material through electron beam-induced deposition. The illumination of deposited material with a near infrared laser generates a broad light spectrum, acting as a local "white light" source that couples, for favorable wavelengths, with the WGM sustained by the sphere. This facilitates a spectroscopic analysis of the WGM and provides the Q-factor and free spectral range for all investigated particles. The analysis by an integrated SEM and Raman micro-spectrometer offers a direct approach to the analysis of WGM resonators as they are, for instance, used in sensing.
authors.forename: F J
authors.initials: FJ
authors.lastname: Timmermans
authors.forename: L
authors.initials: L
authors.lastname: Chang
authors.forename: H A G M
authors.initials: HA
authors.lastname: van Wolferen
authors.forename: A T M
authors.initials: AT
authors.lastname: Lenferink
authors.forename: C
authors.initials: C
authors.lastname: Otto