title: An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides.
abstract: We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.
authors.affiliation: >Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: Guangxu
authors.initials: G
authors.lastname: Ju
authors.affiliation: >Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: Matthew J
authors.initials: MJ
authors.lastname: Highland
authors.affiliation: Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: Angel
authors.identifier: 0000000182073825
authors.initials: A
authors.lastname: Yanguas-Gil
authors.affiliation: Department of Physics, Northern Illinois University, DeKalb, Illinois 60115, USA.
authors.forename: Carol
authors.initials: C
authors.lastname: Thompson
authors.affiliation: >Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: Jeffrey A
authors.initials: JA
authors.lastname: Eastman
authors.affiliation: X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: Hua
authors.initials: H
authors.lastname: Zhou
authors.affiliation: Fairview Associates, Jackson, Wyoming 83002, USA.
authors.forename: Sean M
authors.identifier: 000000020071843X
authors.initials: SM
authors.lastname: Brennan
authors.affiliation: >Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: G Brian
authors.initials: GB
authors.lastname: Stephenson
authors.affiliation: >Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: Paul H
authors.initials: PH
authors.lastname: Fuoss