title: High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas.
abstract: With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010and 1011W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 μm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed.
authors.affiliation: Iyoda Supra-Integrated Material Project, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency, and Frontier Research Center, Tokyo Institute of Technology, 4259-S2-3 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan.
authors.forename: Christopher S A
authors.identifier: 000000028301447X
authors.initials: CS
authors.lastname: Musgrave
authors.affiliation: Iyoda Supra-Integrated Material Project, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency, and Frontier Research Center, Tokyo Institute of Technology, 4259-S2-3 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan.
authors.forename: Takehiro
authors.initials: T
authors.lastname: Murakami
authors.affiliation: Institute of Laser Engineering, Osaka University, 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan.
authors.forename: Teruyuki
authors.initials: T
authors.lastname: Ugomori
authors.affiliation: Institute of Laser Engineering, Osaka University, 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan.
authors.forename: Kensuke
authors.initials: K
authors.lastname: Yoshida
authors.affiliation: Institute of Laser Engineering, Osaka University, 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan.
authors.forename: Shinsuke
authors.identifier: 0000000184061772
authors.initials: S
authors.lastname: Fujioka
authors.affiliation: Institute of Laser Engineering, Osaka University, 2-6 Yamada-Oka, Suita, Osaka 565-0871, Japan.
authors.forename: Hiroaki
authors.initials: H
authors.lastname: Nishimura
authors.affiliation: Iyoda Supra-Integrated Material Project, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency, and Frontier Research Center, Tokyo Institute of Technology, 4259-S2-3 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan.
authors.forename: Hironori
authors.initials: H
authors.lastname: Atarashi
authors.affiliation: Iyoda Supra-Integrated Material Project, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency, and Frontier Research Center, Tokyo Institute of Technology, 4259-S2-3 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan.
authors.forename: Tomokazu
authors.initials: T
authors.lastname: Iyoda
authors.affiliation: Iyoda Supra-Integrated Material Project, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency, and Frontier Research Center, Tokyo Institute of Technology, 4259-S2-3 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan.
authors.forename: Keiji
authors.initials: K
authors.lastname: Nagai