title: Area-Selective Atomic Layer Deposition of In2O3:H Using a μ-Plasma Printer for Local Area Activation.
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology , PO Box 513, 5600 MB Eindhoven, The Netherlands.
authors.forename: Alfredo
authors.initials: A
authors.lastname: Mameli
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology , PO Box 513, 5600 MB Eindhoven, The Netherlands.
authors.forename: Yinghuan
authors.initials: Y
authors.lastname: Kuang
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology , PO Box 513, 5600 MB Eindhoven, The Netherlands.
authors.forename: Morteza
authors.initials: M
authors.lastname: Aghaee
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology , PO Box 513, 5600 MB Eindhoven, The Netherlands.
authors.forename: Chaitanya K
authors.initials: CK
authors.lastname: Ande
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology , PO Box 513, 5600 MB Eindhoven, The Netherlands.
authors.forename: Bora
authors.initials: B
authors.lastname: Karasulu
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology , PO Box 513, 5600 MB Eindhoven, The Netherlands.
authors.forename: Mariadriana
authors.initials: M
authors.lastname: Creatore
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology , PO Box 513, 5600 MB Eindhoven, The Netherlands.
authors.forename: Adriaan J M
authors.initials: AJ
authors.lastname: Mackus
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology , PO Box 513, 5600 MB Eindhoven, The Netherlands.
authors.forename: Wilhelmus M M
authors.initials: WM
authors.lastname: Kessels
authors.affiliation: Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands; Department Thin Film Technology, TNO, High Tech Campus 21, 5656 AE Eindhoven, The Netherlands.
authors.forename: Fred
authors.initials: F
authors.lastname: Roozeboom