title: Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies.
abstract: We report transmissive color filters based on subwavelength dielectric gratings that can replace conventional dye-based color filters used in backside-illuminated CMOS image sensor (BSI CIS) technologies. The filters are patterned in an 80 nm-thick poly silicon film on a 115 nm-thick SiO2spacer layer. They are optimized for operating at the primary RGB colors, exhibit peak transmittance of 60-80%, and have an almost insensitive response over a ± 20° angular range. This technology enables shrinking of the pixel sizes down to near a micrometer.
authors.affiliation: T. J. Watson Laboratory of Applied Physics, California Institute of Technology , 1200 East California Boulevard, Pasadena, California 91125, United States.
authors.forename: Yu
authors.identifier: 0000-0001-7083-1270
authors.initials: Y
authors.lastname: Horie
authors.affiliation: Samsung Advanced Institute of Technology, Samsung Electronics , Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803, South Korea.
authors.forename: Seunghoon
authors.initials: S
authors.lastname: Han
authors.affiliation: Samsung Advanced Institute of Technology, Samsung Electronics , Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803, South Korea.
authors.forename: Jeong-Yub
authors.initials: JY
authors.lastname: Lee
authors.affiliation: Samsung Advanced Institute of Technology, Samsung Electronics , Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803, South Korea.
authors.forename: Jaekwan
authors.initials: J
authors.lastname: Kim
authors.affiliation: Samsung Advanced Institute of Technology, Samsung Electronics , Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803, South Korea.
authors.forename: Yongsung
authors.initials: Y
authors.lastname: Kim
authors.affiliation: T. J. Watson Laboratory of Applied Physics, California Institute of Technology , 1200 East California Boulevard, Pasadena, California 91125, United States.
authors.forename: Amir
authors.identifier: 0000-0001-8831-7552
authors.initials: A
authors.lastname: Arbabi
authors.affiliation: Samsung Advanced Institute of Technology, Samsung Electronics , Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803, South Korea.
authors.forename: Changgyun
authors.initials: C
authors.lastname: Shin
authors.affiliation: Advanced Image Research Lab, Samsung Electronics , 2 North Lake Avenue, Pasadena, California 91101, United States.
authors.forename: Lilong
authors.initials: L
authors.lastname: Shi
authors.affiliation: T. J. Watson Laboratory of Applied Physics, California Institute of Technology , 1200 East California Boulevard, Pasadena, California 91125, United States.
authors.forename: Ehsan
authors.initials: E
authors.lastname: Arbabi
authors.affiliation: T. J. Watson Laboratory of Applied Physics, California Institute of Technology , 1200 East California Boulevard, Pasadena, California 91125, United States.
authors.forename: Seyedeh Mahsa
authors.initials: SM
authors.lastname: Kamali
authors.affiliation: Samsung Advanced Institute of Technology, Samsung Electronics , Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803, South Korea.
authors.forename: Hong-Seok
authors.initials: HS
authors.lastname: Lee
authors.affiliation: Samsung Advanced Institute of Technology, Samsung Electronics , Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803, South Korea.
authors.forename: Sungwoo
authors.initials: S
authors.lastname: Hwang
authors.affiliation: T. J. Watson Laboratory of Applied Physics, California Institute of Technology , 1200 East California Boulevard, Pasadena, California 91125, United States.
authors.forename: Andrei
authors.initials: A
authors.lastname: Faraon
keywords: CMOS image sensor; Subwavelength grating; color filters; high-index contrast